FR2760085B1 - Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces - Google Patents

Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces

Info

Publication number
FR2760085B1
FR2760085B1 FR9705672A FR9705672A FR2760085B1 FR 2760085 B1 FR2760085 B1 FR 2760085B1 FR 9705672 A FR9705672 A FR 9705672A FR 9705672 A FR9705672 A FR 9705672A FR 2760085 B1 FR2760085 B1 FR 2760085B1
Authority
FR
France
Prior art keywords
stack
surface layer
thin layers
layer deposited
dimensional measurements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9705672A
Other languages
English (en)
Other versions
FR2760085A1 (fr
Inventor
Jean Canteloup
Roland Kleim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR9702283A external-priority patent/FR2760084A1/fr
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Priority to FR9705672A priority Critical patent/FR2760085B1/fr
Priority to US08/915,672 priority patent/US5898500A/en
Priority to GB9718230A priority patent/GB2322697B/en
Priority to DE19807649A priority patent/DE19807649B4/de
Priority to JP04492298A priority patent/JP4083859B2/ja
Publication of FR2760085A1 publication Critical patent/FR2760085A1/fr
Application granted granted Critical
Publication of FR2760085B1 publication Critical patent/FR2760085B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32963—End-point detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Drying Of Semiconductors (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR9705672A 1997-02-26 1997-05-07 Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces Expired - Fee Related FR2760085B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9705672A FR2760085B1 (fr) 1997-02-26 1997-05-07 Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces
US08/915,672 US5898500A (en) 1997-02-26 1997-08-21 Device and method for three-dimensional measurements and observation in situ of a surface layer deposited on a thin-film stack
GB9718230A GB2322697B (en) 1997-02-26 1997-08-28 Measurement and observation of a deposited surface layer
DE19807649A DE19807649B4 (de) 1997-02-26 1998-02-23 Vorrichtung und Verfahren zur dreidimensionalen Messung und Beobachtung dünner Schichten
JP04492298A JP4083859B2 (ja) 1997-02-26 1998-02-26 薄膜スタック上に堆積された表面層の本来の場所における三次元測定および観察のための装置および方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9702283A FR2760084A1 (fr) 1997-02-26 1997-02-26 Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces
FR9705672A FR2760085B1 (fr) 1997-02-26 1997-05-07 Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces

Publications (2)

Publication Number Publication Date
FR2760085A1 FR2760085A1 (fr) 1998-08-28
FR2760085B1 true FR2760085B1 (fr) 1999-05-14

Family

ID=26233346

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9705672A Expired - Fee Related FR2760085B1 (fr) 1997-02-26 1997-05-07 Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces

Country Status (5)

Country Link
US (1) US5898500A (fr)
JP (1) JP4083859B2 (fr)
DE (1) DE19807649B4 (fr)
FR (1) FR2760085B1 (fr)
GB (1) GB2322697B (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7688435B2 (en) * 1997-09-22 2010-03-30 Kla-Tencor Corporation Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect
US7630086B2 (en) * 1997-09-22 2009-12-08 Kla-Tencor Corporation Surface finish roughness measurement
US7714995B2 (en) * 1997-09-22 2010-05-11 Kla-Tencor Corporation Material independent profiler
IL123727A (en) 1998-03-18 2002-05-23 Nova Measuring Instr Ltd Method and apparatus for measurement of patterned structures
US6476920B1 (en) 1998-03-18 2002-11-05 Nova Measuring Instruments, Ltd. Method and apparatus for measurements of patterned structures
US6836324B2 (en) * 1998-03-18 2004-12-28 Nova Measuring Instruments Ltd. Method and apparatus for measurements of patterned structures
DE19922919C2 (de) 1999-05-19 2002-01-17 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
US6582619B1 (en) 1999-09-30 2003-06-24 Lam Research Corporation Methods and apparatuses for trench depth detection and control
US6160621A (en) * 1999-09-30 2000-12-12 Lam Research Corporation Method and apparatus for in-situ monitoring of plasma etch and deposition processes using a pulsed broadband light source
DE60040960D1 (de) * 1999-11-08 2009-01-15 Leica Microsystems Verfahren und Vorrichtung zur Dickenmessung von durchsichtigen Filmen
US6547458B1 (en) * 1999-11-24 2003-04-15 Axcelis Technologies, Inc. Optimized optical system design for endpoint detection
US6411389B1 (en) * 2000-05-03 2002-06-25 The Regents Of The University Of Claifornia Optical monitor for real time thickness change measurements via lateral-translation induced phase-stepping interferometry
US6804009B2 (en) * 2000-05-03 2004-10-12 The Regents Of The University Of California Wollaston prism phase-stepping point diffraction interferometer and method
US7453577B2 (en) * 2004-12-14 2008-11-18 Asml Netherlands B.V. Apparatus and method for inspecting a patterned part of a sample
US7161669B2 (en) 2005-05-06 2007-01-09 Kla- Tencor Technologies Corporation Wafer edge inspection
FR2891904B1 (fr) * 2005-10-06 2007-12-21 Horiba Jobin Yvon Sas Soc Par Procede de mesure optique d'une couche en temps reel, en incidence normale
US7397553B1 (en) 2005-10-24 2008-07-08 Kla-Tencor Technologies Corporation Surface scanning
US7554654B2 (en) * 2007-01-26 2009-06-30 Kla-Tencor Corporation Surface characteristic analysis
JP5010978B2 (ja) * 2007-05-22 2012-08-29 株式会社ディスコ レーザー加工装置
JP2009031166A (ja) * 2007-07-27 2009-02-12 Chuo Seiki Kk 干渉縞生成方法および干渉計
WO2011135819A1 (fr) * 2010-04-26 2011-11-03 株式会社ニコン Dispositif de microscope avec éclairement structurel
FR3060736B1 (fr) 2016-12-16 2019-05-24 Horiba Jobin Yvon Sas Methode et instrument de mesure de profondeur de gravure par interferometrie polarimetrique differentielle et appareil de spectrometrie de decharge luminescente comprenant un tel instrument de mesure
WO2024128048A1 (fr) * 2022-12-13 2024-06-20 株式会社東京精密 Dispositif et procédé d'inspection

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1447254A1 (de) * 1963-11-29 1968-12-19 Polskie Zaklady Optyczne Interferenz-Polarisationsmikroskop
JPS567006A (en) * 1979-06-22 1981-01-24 Ibm Method of extending measurement range of interference
JPS62211503A (ja) * 1986-03-13 1987-09-17 Hitachi Ltd 段差計測装置
JPH02251707A (ja) * 1989-03-27 1990-10-09 Nikon Corp 位置検出装置
FR2680414B1 (fr) * 1991-08-14 1995-05-24 Sofie Ensemble d'observation et de mesures interferometriques simultanees par laser, en particulier sur des structures a couches minces.
JPH05232384A (ja) * 1992-02-18 1993-09-10 Olympus Optical Co Ltd 干渉顕微鏡
EP0561015A1 (fr) * 1992-03-17 1993-09-22 International Business Machines Corporation Mesure de phase interferométrique
JPH05264250A (ja) * 1992-03-18 1993-10-12 Kosaka Kenkyusho:Kk 表面形状の光学的測定装置
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
JPH07239212A (ja) * 1994-02-28 1995-09-12 Nikon Corp 位置検出装置
FR2718231B1 (fr) * 1994-04-05 1996-06-21 Sofie Procédé et dispositif pour quantifier in situ la morphologie et l'épaisseur dans une zone localisée d'une couche superficielle en cours de traitement sur une structure à couches minces .
US5710631A (en) * 1995-04-11 1998-01-20 International Business Machines Corporation Apparatus and method for storing interferometric images of scanned defects and for subsequent static analysis of such defects
FR2737560B1 (fr) * 1995-08-02 1997-09-19 Sofie Instr Procede et dispositif pour quantifier in situ, par reflectometrie, la morphologie d'une zone localisee lors de la gravure de la couche superficielle d'une structure a couches minces
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process

Also Published As

Publication number Publication date
GB2322697B (en) 2001-04-25
GB2322697A (en) 1998-09-02
DE19807649B4 (de) 2010-10-14
US5898500A (en) 1999-04-27
DE19807649A1 (de) 1998-08-27
JP4083859B2 (ja) 2008-04-30
FR2760085A1 (fr) 1998-08-28
JPH10300422A (ja) 1998-11-13
GB9718230D0 (en) 1997-11-05

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ST Notification of lapse

Effective date: 20140131