FR2742871B1 - Localisation de defauts d'une couche metallique d'un circuit semiconducteur - Google Patents
Localisation de defauts d'une couche metallique d'un circuit semiconducteurInfo
- Publication number
- FR2742871B1 FR2742871B1 FR9515786A FR9515786A FR2742871B1 FR 2742871 B1 FR2742871 B1 FR 2742871B1 FR 9515786 A FR9515786 A FR 9515786A FR 9515786 A FR9515786 A FR 9515786A FR 2742871 B1 FR2742871 B1 FR 2742871B1
- Authority
- FR
- France
- Prior art keywords
- defects
- location
- metal layer
- semiconductor circuit
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9515786A FR2742871B1 (fr) | 1995-12-22 | 1995-12-22 | Localisation de defauts d'une couche metallique d'un circuit semiconducteur |
US08/770,476 US5976898A (en) | 1995-12-22 | 1996-12-20 | Localization of defects of a metallic layer of a semiconductor circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9515786A FR2742871B1 (fr) | 1995-12-22 | 1995-12-22 | Localisation de defauts d'une couche metallique d'un circuit semiconducteur |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2742871A1 FR2742871A1 (fr) | 1997-06-27 |
FR2742871B1 true FR2742871B1 (fr) | 1998-03-13 |
Family
ID=9486187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9515786A Expired - Fee Related FR2742871B1 (fr) | 1995-12-22 | 1995-12-22 | Localisation de defauts d'une couche metallique d'un circuit semiconducteur |
Country Status (2)
Country | Link |
---|---|
US (1) | US5976898A (fr) |
FR (1) | FR2742871B1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6500750B1 (en) * | 1999-04-05 | 2002-12-31 | Motorola, Inc. | Semiconductor device and method of formation |
US6566885B1 (en) * | 1999-12-14 | 2003-05-20 | Kla-Tencor | Multiple directional scans of test structures on semiconductor integrated circuits |
US7655482B2 (en) * | 2000-04-18 | 2010-02-02 | Kla-Tencor | Chemical mechanical polishing test structures and methods for inspecting the same |
US6855568B2 (en) * | 2001-06-29 | 2005-02-15 | Kla-Tencor Corporation | Apparatus and methods for monitoring self-aligned contact arrays using voltage contrast inspection |
US6861666B1 (en) | 2001-10-17 | 2005-03-01 | Kla-Tencor Technologies Corporation | Apparatus and methods for determining and localization of failures in test structures using voltage contrast |
FR2845684B1 (fr) * | 2002-10-09 | 2006-12-15 | Saint Gobain | Procede de suppression des defauts ponctuels inclus au sein d'un dispositif electrochimique |
US7145344B2 (en) | 2002-10-25 | 2006-12-05 | Xilinx, Inc. | Method and circuits for localizing defective interconnect resources in programmable logic devices |
US9087841B2 (en) * | 2013-10-29 | 2015-07-21 | International Business Machines Corporation | Self-correcting power grid for semiconductor structures method |
US10283425B2 (en) * | 2017-07-12 | 2019-05-07 | United Microelectronics Corp. | Test key and method for monitoring semiconductor wafer |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6489442A (en) * | 1987-09-30 | 1989-04-03 | Toshiba Corp | Measuring method of semiconductor device |
JP2970194B2 (ja) * | 1992-04-02 | 1999-11-02 | 日本電気株式会社 | 半導体集積回路 |
JPH06110069A (ja) * | 1992-09-29 | 1994-04-22 | Matsushita Electric Ind Co Ltd | 電子部品の欠陥修復方法および欠陥修復装置 |
US5430305A (en) * | 1994-04-08 | 1995-07-04 | The United States Of America As Represented By The United States Department Of Energy | Light-induced voltage alteration for integrated circuit analysis |
-
1995
- 1995-12-22 FR FR9515786A patent/FR2742871B1/fr not_active Expired - Fee Related
-
1996
- 1996-12-20 US US08/770,476 patent/US5976898A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5976898A (en) | 1999-11-02 |
FR2742871A1 (fr) | 1997-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20090831 |