FR2732781B1 - Procede de fabrication de matrice active tft pour ecran de systeme de projection - Google Patents

Procede de fabrication de matrice active tft pour ecran de systeme de projection

Info

Publication number
FR2732781B1
FR2732781B1 FR9504187A FR9504187A FR2732781B1 FR 2732781 B1 FR2732781 B1 FR 2732781B1 FR 9504187 A FR9504187 A FR 9504187A FR 9504187 A FR9504187 A FR 9504187A FR 2732781 B1 FR2732781 B1 FR 2732781B1
Authority
FR
France
Prior art keywords
active matrix
projection system
system screen
tft active
manufacturing tft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9504187A
Other languages
English (en)
Other versions
FR2732781A1 (fr
Inventor
Nicolas Szydlo
Francois Templier
Jean Michel Vignolle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thomson-LCD
Original Assignee
Thomson-LCD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9504187A priority Critical patent/FR2732781B1/fr
Application filed by Thomson-LCD filed Critical Thomson-LCD
Priority to US08/930,843 priority patent/US6174745B1/en
Priority to KR1019970707142A priority patent/KR19980703742A/ko
Priority to EP96912073A priority patent/EP0819263A1/fr
Priority to AU55044/96A priority patent/AU5504496A/en
Priority to JP8530048A priority patent/JPH11503839A/ja
Priority to PCT/FR1996/000521 priority patent/WO1996031799A1/fr
Publication of FR2732781A1 publication Critical patent/FR2732781A1/fr
Application granted granted Critical
Publication of FR2732781B1 publication Critical patent/FR2732781B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
FR9504187A 1995-04-07 1995-04-07 Procede de fabrication de matrice active tft pour ecran de systeme de projection Expired - Fee Related FR2732781B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR9504187A FR2732781B1 (fr) 1995-04-07 1995-04-07 Procede de fabrication de matrice active tft pour ecran de systeme de projection
KR1019970707142A KR19980703742A (ko) 1995-04-07 1996-04-05 화상 투영 스크린용의 액티브 박막 매트릭스 제조 방법
EP96912073A EP0819263A1 (fr) 1995-04-07 1996-04-05 Procede de fabrication de matrice active tft pour ecran de systeme de projection
AU55044/96A AU5504496A (en) 1995-04-07 1996-04-05 Method for making a tft active matrix for a projection system screen
US08/930,843 US6174745B1 (en) 1995-04-07 1996-04-05 Method for making a TFT active matrix for a protection system screen
JP8530048A JPH11503839A (ja) 1995-04-07 1996-04-05 画像投写型スクリーン用ｔｆｔアクティブ・マトリックスの製造方法
PCT/FR1996/000521 WO1996031799A1 (fr) 1995-04-07 1996-04-05 Procede de fabrication de matrice active tft pour ecran de systeme de projection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9504187A FR2732781B1 (fr) 1995-04-07 1995-04-07 Procede de fabrication de matrice active tft pour ecran de systeme de projection

Publications (2)

Publication Number Publication Date
FR2732781A1 FR2732781A1 (fr) 1996-10-11
FR2732781B1 true FR2732781B1 (fr) 1997-06-20

Family

ID=9477889

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9504187A Expired - Fee Related FR2732781B1 (fr) 1995-04-07 1995-04-07 Procede de fabrication de matrice active tft pour ecran de systeme de projection

Country Status (7)

Country Link
US (1) US6174745B1 (fr)
EP (1) EP0819263A1 (fr)
JP (1) JPH11503839A (fr)
KR (1) KR19980703742A (fr)
AU (1) AU5504496A (fr)
FR (1) FR2732781B1 (fr)
WO (1) WO1996031799A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3701832B2 (ja) * 2000-02-04 2005-10-05 インターナショナル・ビジネス・マシーンズ・コーポレーション 薄膜トランジスタ、液晶表示パネル、および薄膜トランジスタの製造方法
US6566687B2 (en) * 2001-01-18 2003-05-20 International Business Machines Corporation Metal induced self-aligned crystallization of Si layer for TFT
DE102009007947B4 (de) * 2009-02-06 2014-08-14 Universität Stuttgart Verfahren zur Herstellung eines Aktiv-Matrix-OLED-Displays
CN102645799B (zh) * 2011-03-29 2015-01-07 京东方科技集团股份有限公司 一种液晶显示器件、阵列基板和彩膜基板及其制造方法
US10482305B1 (en) 2016-01-06 2019-11-19 Apple Inc. Electronic devices with thin-film masking layers

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2533072B1 (fr) * 1982-09-14 1986-07-18 Coissard Pierre Procede de fabrication de circuits electroniques a base de transistors en couches minces et de condensateurs
JPS60213062A (ja) * 1984-04-09 1985-10-25 Hosiden Electronics Co Ltd 薄膜トランジスタの製造方法
JPH0697317B2 (ja) * 1984-04-11 1994-11-30 ホシデン株式会社 液晶表示器
US5162933A (en) * 1990-05-16 1992-11-10 Nippon Telegraph And Telephone Corporation Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium
GB9206086D0 (en) * 1992-03-20 1992-05-06 Philips Electronics Uk Ltd Manufacturing electronic devices comprising,e.g.tfts and mims
FR2689287B1 (fr) * 1992-03-30 1997-01-03 France Telecom Ecran d'affichage a masque optique et procede de realisation de cet ecran.
US5728592A (en) * 1992-10-09 1998-03-17 Fujitsu Ltd. Method for fabricating a thin film transistor matrix device
FR2702882B1 (fr) * 1993-03-16 1995-07-28 Thomson Lcd Procédé de fabrication de transistors à couches minces étagés directs.
US5796116A (en) * 1994-07-27 1998-08-18 Sharp Kabushiki Kaisha Thin-film semiconductor device including a semiconductor film with high field-effect mobility
JPH08184853A (ja) * 1994-12-27 1996-07-16 Sharp Corp アクティブマトリクス基板の製造方法およびアクティブマトリクス基板

Also Published As

Publication number Publication date
FR2732781A1 (fr) 1996-10-11
KR19980703742A (ko) 1998-12-05
AU5504496A (en) 1996-10-23
JPH11503839A (ja) 1999-03-30
US6174745B1 (en) 2001-01-16
EP0819263A1 (fr) 1998-01-21
WO1996031799A1 (fr) 1996-10-10

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse