FR2722878B1 - Capteur de pression differentielle de type capacitif - Google Patents
Capteur de pression differentielle de type capacitifInfo
- Publication number
- FR2722878B1 FR2722878B1 FR9409088A FR9409088A FR2722878B1 FR 2722878 B1 FR2722878 B1 FR 2722878B1 FR 9409088 A FR9409088 A FR 9409088A FR 9409088 A FR9409088 A FR 9409088A FR 2722878 B1 FR2722878 B1 FR 2722878B1
- Authority
- FR
- France
- Prior art keywords
- pressure sensor
- differential pressure
- capacitive type
- type differential
- capacitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9409088A FR2722878B1 (fr) | 1994-07-22 | 1994-07-22 | Capteur de pression differentielle de type capacitif |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9409088A FR2722878B1 (fr) | 1994-07-22 | 1994-07-22 | Capteur de pression differentielle de type capacitif |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2722878A1 FR2722878A1 (fr) | 1996-01-26 |
FR2722878B1 true FR2722878B1 (fr) | 1996-09-06 |
Family
ID=9465651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9409088A Expired - Fee Related FR2722878B1 (fr) | 1994-07-22 | 1994-07-22 | Capteur de pression differentielle de type capacitif |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2722878B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7539003B2 (en) | 2005-12-01 | 2009-05-26 | Lv Sensors, Inc. | Capacitive micro-electro-mechanical sensors with single crystal silicon electrodes |
US9156676B2 (en) * | 2013-04-09 | 2015-10-13 | Honeywell International Inc. | Sensor with isolated diaphragm |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
DE3344799A1 (de) * | 1983-12-10 | 1985-06-13 | Hans W. Dipl.-Phys. ETH Winterthur Keller | Piezoresistives druckmesselement |
US4732042A (en) * | 1986-04-22 | 1988-03-22 | Motorola Inc. | Cast membrane protected pressure sensor |
DE59101980D1 (de) * | 1990-05-02 | 1994-07-28 | Siemens Ag | Kapazitiver Sensor mit Frequenzausgang. |
DE4206675C2 (de) * | 1992-02-28 | 1995-04-27 | Siemens Ag | Verfahren zum Herstellen von Druckdifferenz-Sensoren |
-
1994
- 1994-07-22 FR FR9409088A patent/FR2722878B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2722878A1 (fr) | 1996-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2775075B1 (fr) | Capteur de pression differentielle | |
DE59508560D1 (de) | Kapazitiver Drucksensor | |
FR2746656B1 (fr) | Nebuliseur a capteur de pression | |
FR2741441B1 (fr) | Appareil de detection de pression de type capacitif | |
DE59504814D1 (de) | Drucksensor | |
DK0674164T3 (da) | Kapacitativ trykføler eller differenstrykføler | |
DE69612576D1 (de) | Mikrobearbeiteter symmetrischer Differentialdrucksensor mit Polysilizium | |
FR2674627B1 (fr) | Capteur de pression resonant. | |
FR2559899B1 (fr) | Detecteur de pression capacitif | |
FR2740217B1 (fr) | Capteur de pression | |
FR2614988B1 (fr) | Capteur capacitif de pression | |
FR2729758B1 (fr) | Indicateur de pression differentielle | |
FR2555743B1 (fr) | Capteur inductif de pression differentielle | |
DE59500186D1 (de) | Kapazitiver Beschleunigungssensor | |
FR2643148B1 (fr) | Capteur de pression du type semiconducteur sur isolant | |
BR9703820A (pt) | Detector de pressão diferencial capacitiva | |
DE59506697D1 (de) | Drucksensor | |
FI943048A (fi) | Kapasitiivista tyyppiä oleva differentiaalinen paineanturi | |
FR2664979B1 (fr) | Micro-capteur de pression. | |
BE893875A (fr) | Capteur de pression differentielle | |
FR2731071B1 (fr) | Indicateur de pression differentielle | |
FR2687783B1 (fr) | Micro-capteur de pression. | |
DE59505227D1 (de) | Drucksensor | |
FR2722878B1 (fr) | Capteur de pression differentielle de type capacitif | |
FR2720827B1 (fr) | Capteur de pression différentielle. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
ST | Notification of lapse |
Effective date: 20110331 |