FR2687010B1 - - Google Patents

Info

Publication number
FR2687010B1
FR2687010B1 FR9300812A FR9300812A FR2687010B1 FR 2687010 B1 FR2687010 B1 FR 2687010B1 FR 9300812 A FR9300812 A FR 9300812A FR 9300812 A FR9300812 A FR 9300812A FR 2687010 B1 FR2687010 B1 FR 2687010B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9300812A
Other versions
FR2687010A1 (fr
Inventor
Hiroji Ebe
Akira Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of FR2687010A1 publication Critical patent/FR2687010A1/fr
Application granted granted Critical
Publication of FR2687010B1 publication Critical patent/FR2687010B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02551—Group 12/16 materials
    • H01L21/02562—Tellurides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
    • C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02395—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02433—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02609—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/973—Substrate orientation

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Recrystallisation Techniques (AREA)
  • Light Receiving Elements (AREA)
FR9300812A 1992-01-31 1993-01-27 Structure cristalline composite a couche epitaxiale des groupes ii-vi sur substrat de silicium et son procede d'obtention. Granted FR2687010A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01666392A JP3263964B2 (ja) 1992-01-31 1992-01-31 半導体装置形成用結晶とその製造方法

Publications (2)

Publication Number Publication Date
FR2687010A1 FR2687010A1 (fr) 1993-08-06
FR2687010B1 true FR2687010B1 (fr) 1995-05-12

Family

ID=11922573

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9300812A Granted FR2687010A1 (fr) 1992-01-31 1993-01-27 Structure cristalline composite a couche epitaxiale des groupes ii-vi sur substrat de silicium et son procede d'obtention.

Country Status (4)

Country Link
US (2) US5302232A (fr)
JP (1) JP3263964B2 (fr)
FR (1) FR2687010A1 (fr)
GB (1) GB2263708B (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449927A (en) * 1994-05-16 1995-09-12 Santa Barbara Research Center Multilayer buffer structure including II-VI compounds on a silicon substrate
JPH08107068A (ja) * 1994-10-03 1996-04-23 Nec Corp ＭＢＥ法によるＳｉ基板上ＣｄＴｅ成長方法
JP2570646B2 (ja) * 1994-12-13 1997-01-08 日本電気株式会社 Ｓｉベ−ス半導体結晶基板及びその製造方法
GB2302209A (en) * 1994-12-20 1997-01-08 Mitsubishi Electric Corp Method of growing compound semiconductor layer
US5833749A (en) * 1995-01-19 1998-11-10 Nippon Steel Corporation Compound semiconductor substrate and process of producing same
US5998809A (en) * 1995-10-06 1999-12-07 Raytheon Company Room temperature 3-5 micrometer wavelength HgCdTe heterojunction emitter
US6045614A (en) * 1996-03-14 2000-04-04 Raytheon Company Method for epitaxial growth of twin-free, (111)-oriented II-VI alloy films on silicon substrates
US6091127A (en) * 1997-04-02 2000-07-18 Raytheon Company Integrated infrared detection system
US6036770A (en) * 1996-04-04 2000-03-14 Raytheon Company Method of fabricating a laterally continuously graded mercury cadmium telluride layer
US5861626A (en) * 1996-04-04 1999-01-19 Raytheon Ti System, Inc. Mercury cadmium telluride infrared filters and detectors and methods of fabrication
US5998235A (en) 1997-06-26 1999-12-07 Lockheed Martin Corporation Method of fabrication for mercury-based quaternary alloys of infrared sensitive materials
DE19938631A1 (de) * 1999-08-14 2001-02-22 Hatto Schick Verfahren zur Herstellung dünner einkristalliner Schichten
US6872252B2 (en) 2002-03-06 2005-03-29 Agilent Technologies, Inc. Lead-based perovskite buffer for forming indium phosphide on silicon
US7541105B2 (en) * 2006-09-25 2009-06-02 Seagate Technology Llc Epitaxial ferroelectric and magnetic recording structures including graded lattice matching layers
WO2009052486A1 (fr) * 2007-10-18 2009-04-23 United States Of America As Representated By The Administrator Of The National Aeronautics And Spaceadministration Mise au point de bande interdite hybride pour des matériaux semi-conducteurs super-hétéro-épitaxiaux, et produits issus de ces derniers
GB2489924A (en) * 2011-04-06 2012-10-17 Isis Innovation Integrating III-V or II-VI devices with high resistivity silicon or germanium substrates
CN102888584B (zh) * 2012-09-17 2014-05-14 上海大学 一种基于金刚石薄膜上沉积CdTe薄膜的方法
US8823146B1 (en) 2013-02-19 2014-09-02 Raytheon Company Semiconductor structure having silicon devices, column III-nitride devices, and column III-non-nitride or column II-VI devices
US9614026B2 (en) 2013-03-13 2017-04-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High mobility transport layer structures for rhombohedral Si/Ge/SiGe devices
CN106883419B (zh) * 2017-01-19 2020-07-03 湖北大学 一种钴基金属-有机骨架材料的快速合成方法及其应用
WO2018156698A1 (fr) 2017-02-24 2018-08-30 First Solar, Inc. Couches semi-conductrices photovoltaïques dopées et procédés de fabrication

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2078695B (en) * 1980-05-27 1984-06-20 Secr Defence Cadmium mercury telluride deposition
EP0106537B1 (fr) * 1982-10-19 1989-01-25 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Dépôt chimique en phase vapeur de films en partant de composés organométalliques
GB2156857B (en) * 1983-11-30 1987-01-14 Philips Electronic Associated Method of manufacturing a semiconductor device
JPS61274313A (ja) * 1985-05-29 1986-12-04 Mitsubishi Electric Corp 半導体装置
JPS61276313A (ja) * 1985-05-31 1986-12-06 Oki Electric Ind Co Ltd 半導体装置の製造方法
US4828938A (en) * 1986-04-11 1989-05-09 Hughes Aircraft Company Method for depositing materials containing tellurium and product
JPS63194322A (ja) * 1987-02-09 1988-08-11 Sharp Corp 化合物半導体基板
JP2563937B2 (ja) * 1987-08-24 1996-12-18 日本電信電話株式会社 ▲ｉｉｉ▼−▲ｖ▼族化合物半導体結晶基板
JPH01231331A (ja) * 1988-03-11 1989-09-14 Seisan Gijutsu Shinko Kyokai 半導体単結晶製造方法
JP2687445B2 (ja) * 1988-06-11 1997-12-08 ソニー株式会社 ヘテロエピタキシャル成長方法

Also Published As

Publication number Publication date
GB2263708A (en) 1993-08-04
GB9301489D0 (en) 1993-03-17
JP3263964B2 (ja) 2002-03-11
FR2687010A1 (fr) 1993-08-06
GB2263708B (en) 1995-01-18
US5394826A (en) 1995-03-07
US5302232A (en) 1994-04-12
JPH05217890A (ja) 1993-08-27

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