FR2679649B1 - Procede d'exploitation d'interferogrammes et interferometre mettant ce procede en óoeuvre. - Google Patents

Procede d'exploitation d'interferogrammes et interferometre mettant ce procede en óoeuvre.

Info

Publication number
FR2679649B1
FR2679649B1 FR9208979A FR9208979A FR2679649B1 FR 2679649 B1 FR2679649 B1 FR 2679649B1 FR 9208979 A FR9208979 A FR 9208979A FR 9208979 A FR9208979 A FR 9208979A FR 2679649 B1 FR2679649 B1 FR 2679649B1
Authority
FR
France
Prior art keywords
interferograms
operating
interferometer
implementing
interferometer implementing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9208979A
Other languages
English (en)
Other versions
FR2679649A1 (fr
Inventor
Michael Kuchel Dr
Karl-Heinz Schuster
Klaus Freischlad Dr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of FR2679649A1 publication Critical patent/FR2679649A1/fr
Application granted granted Critical
Publication of FR2679649B1 publication Critical patent/FR2679649B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069—Synchronization of light source or manipulator and detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02087—Combining two or more images of the same region
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
FR9208979A 1991-07-22 1992-07-21 Procede d'exploitation d'interferogrammes et interferometre mettant ce procede en óoeuvre. Expired - Fee Related FR2679649B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4124223A DE4124223C2 (de) 1991-07-22 1991-07-22 Verfahren zur Auswertung von Interferogrammen und Interferometer

Publications (2)

Publication Number Publication Date
FR2679649A1 FR2679649A1 (fr) 1993-01-29
FR2679649B1 true FR2679649B1 (fr) 1995-03-31

Family

ID=6436716

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9208979A Expired - Fee Related FR2679649B1 (fr) 1991-07-22 1992-07-21 Procede d'exploitation d'interferogrammes et interferometre mettant ce procede en óoeuvre.

Country Status (4)

Country Link
US (1) US5357341A (fr)
JP (1) JP3302406B2 (fr)
DE (1) DE4124223C2 (fr)
FR (1) FR2679649B1 (fr)

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US6404482B1 (en) * 1992-10-01 2002-06-11 Nikon Corporation Projection exposure method and apparatus
US5473434A (en) * 1994-05-16 1995-12-05 Zygo Corporation Phase shifting interferometer and method for surface topography measurement
DE19513234C2 (de) * 1995-04-07 2001-02-22 Ettemeyer Andreas Verfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
DE19513233C2 (de) * 1995-04-07 2001-01-04 Andreas Ettemeyer Verfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
US5764363A (en) * 1995-06-30 1998-06-09 Nikon Corporation Apparatus for observing a surface using polarized light
US5981937A (en) * 1997-10-14 1999-11-09 Denaro; James Optical system for observing rotating objects
TW524966B (en) * 1998-02-05 2003-03-21 Nat Science Council Image capturing type optical wavefront measurement device
US6061133A (en) * 1999-01-26 2000-05-09 Phase Shift Technology Interferometer light source
US6606160B1 (en) 1999-11-12 2003-08-12 Yau Y. Hung Nondestructive testing of diffusely reflective objects
TW550377B (en) * 2000-02-23 2003-09-01 Zeiss Stiftung Apparatus for wave-front detection
DE10121516A1 (de) 2001-05-03 2002-11-07 Michael Kuechel Vorrichtung und Verfahren zur Verminderung der Wirkungen kohärenter Bildfehler in einem Interferometer
US6643024B2 (en) 2001-05-03 2003-11-04 Zygo Corporation Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
EP1384044B1 (fr) * 2001-05-03 2018-06-27 Michael Kuechel Reduction d'artefacts coherents dans un interferometre
DE10130902A1 (de) * 2001-06-27 2003-01-16 Zeiss Carl Interferometersystem, Verfahren zum Aufnehmen eines Interferogramms und Verfahren zum Bereitstellen und Herstellen eines Objekts mit einer Soll-Oberfläche
EP1552243A4 (fr) * 2002-06-24 2008-08-20 Lightgage Inc Interferometre a balayage de frequences et a trajectoire commune
DE102004008750B4 (de) * 2004-02-23 2006-08-24 Schott Ag Verfahren zur Qualitätskontrolle der optischen Eigenschaften eines optischen Materials mittels Bestimmung der Brechwerte
US7433057B2 (en) * 2005-04-05 2008-10-07 Qed Technologies International, Inc. Method for accurate high-resolution measurements of aspheric surfaces
US7508527B2 (en) * 2005-04-11 2009-03-24 Zetetic Institute Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
US7428058B2 (en) * 2005-05-18 2008-09-23 Zetetic Institute Apparatus and method for in situ and ex situ measurements of optical system flare
US20070121115A1 (en) * 2005-11-15 2007-05-31 Zetetic Institute Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
US20180149468A1 (en) * 2016-11-30 2018-05-31 Apre Instruments, Llc True heterodyne spectrally controlled interferometry
JP6984822B2 (ja) * 2018-01-16 2021-12-22 浜松ホトニクス株式会社 干渉画像取得装置および干渉画像取得方法
BR102019024946A2 (pt) * 2019-11-26 2021-06-08 Petróleo Brasileiro S.A. - Petrobras sensor de shearografia e interferometria com mudança de fase dinâmica multidirecional e método de inspeção e medição de modos de vibração
DE102020200628A1 (de) * 2020-01-21 2021-07-22 Carl Zeiss Smt Gmbh Messvorrichtung zur interferometrischen Formvermessung
CN113251943A (zh) * 2020-02-12 2021-08-13 三营超精密光电(晋城)有限公司 基于光干涉的测量系统及方法
WO2023051939A1 (fr) 2021-10-01 2023-04-06 Carl Zeiss Smt Gmbh Procédé de caractérisation de la forme de surface d'un élément optique et dispositif de test interférométrique

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2323931C3 (de) * 1972-05-20 1978-03-02 Centralne Laboratorium Optyki, Warschau Holographisches Mikroskop
US4643576A (en) * 1984-04-19 1987-02-17 Ricoh Company Ltd. Fringe scanning shearing interferometer
US4660978A (en) * 1984-12-19 1987-04-28 Hughes Aircraft Company Direct slope measurement shearing interferometer
US4639139A (en) * 1985-09-27 1987-01-27 Wyko Corporation Optical profiler using improved phase shifting interferometry
JPS6324115A (ja) * 1986-07-16 1988-02-01 Alps Electric Co Ltd 磁気ヘツドの浮上量測定方法及びその装置
DE3634724A1 (de) * 1986-10-11 1988-04-28 Wolfgang Brunk Verfahren und vorrichtung zum beruehrungslosen optischen messen von wegen, insbesondere im triangulationsverfahren
US4732483A (en) * 1987-03-19 1988-03-22 Zygo Corporation Interferometric surface profiler
US4768881A (en) * 1987-05-27 1988-09-06 Jueptner Werner P O Method and apparatus for processing holographic interference patterns using Fourier-transforms
US4948253A (en) * 1988-10-28 1990-08-14 Zygo Corporation Interferometric surface profiler for spherical surfaces
US5020901A (en) * 1990-01-30 1991-06-04 The Perkin-Elmer Corporation Multimode laser diode system for range measurement
US5112129A (en) * 1990-03-02 1992-05-12 Kla Instruments Corporation Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology
DE4013309A1 (de) * 1990-04-26 1991-10-31 Zeiss Carl Fa Verfahren und anordnung zur optischen untersuchung von prueflingen
DE4014019A1 (de) * 1990-05-02 1991-11-07 Zeiss Carl Fa Verfahren zur messung eines phasenmodulierten signals
US5210591A (en) * 1991-08-02 1993-05-11 Hughes Aircraft Company Interferometric ball bearing test station

Also Published As

Publication number Publication date
DE4124223C2 (de) 2001-07-26
JP3302406B2 (ja) 2002-07-15
JPH05203409A (ja) 1993-08-10
FR2679649A1 (fr) 1993-01-29
DE4124223A1 (de) 1993-01-28
US5357341A (en) 1994-10-18

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20100331