FR2640775B1 - Dispositif pour la detection d'un faisceau laser - Google Patents

Dispositif pour la detection d'un faisceau laser

Info

Publication number
FR2640775B1
FR2640775B1 FR8915701A FR8915701A FR2640775B1 FR 2640775 B1 FR2640775 B1 FR 2640775B1 FR 8915701 A FR8915701 A FR 8915701A FR 8915701 A FR8915701 A FR 8915701A FR 2640775 B1 FR2640775 B1 FR 2640775B1
Authority
FR
France
Prior art keywords
detecting
laser beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8915701A
Other languages
English (en)
French (fr)
Other versions
FR2640775A1 (fr
Inventor
Schottelius Horst-Ulf
Mosandl Rolf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diehl Verwaltungs Stiftung
Original Assignee
Diehl GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diehl GmbH and Co filed Critical Diehl GmbH and Co
Publication of FR2640775A1 publication Critical patent/FR2640775A1/fr
Application granted granted Critical
Publication of FR2640775B1 publication Critical patent/FR2640775B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
FR8915701A 1988-11-30 1989-11-29 Dispositif pour la detection d'un faisceau laser Expired - Fee Related FR2640775B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883840278 DE3840278A1 (de) 1988-11-30 1988-11-30 Einrichtung zur erfassung eines laserstrahls

Publications (2)

Publication Number Publication Date
FR2640775A1 FR2640775A1 (fr) 1990-06-22
FR2640775B1 true FR2640775B1 (fr) 1994-11-04

Family

ID=6368126

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8915701A Expired - Fee Related FR2640775B1 (fr) 1988-11-30 1989-11-29 Dispositif pour la detection d'un faisceau laser

Country Status (3)

Country Link
DE (1) DE3840278A1 (no)
FR (1) FR2640775B1 (no)
GB (1) GB2226132B (no)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4200505C2 (de) * 1992-01-11 2003-04-10 Diehl Stiftung & Co Vorrichtungen zur Beobachtung und Regelung der Geometrie und/oder der Energieverteilung des mittels eines Laserstrahles auf einem zu bearbeitenden Werkstück erzeugten Strahlflecks
DE102011005775B4 (de) 2011-03-18 2012-11-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Detektor und Verfahren zum Erfassen einer Ausrichtung eines Laserstrahls in einer Laserbearbeitungsmaschine sowie Laserbearbeitungsmaschine
WO2015172816A1 (de) * 2014-05-13 2015-11-19 Trumpf Laser- Und Systemtechnik Gmbh Einrichtung zur überwachung der ausrichtung eines laserstrahls und euv-strahlungserzeugungsvorrichtung damit
KR102628236B1 (ko) 2018-02-20 2024-01-23 에이에스엠엘 네델란즈 비.브이. 센서 시스템

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753150A (en) * 1972-09-06 1973-08-14 Avco Corp Laser mirror positioning apparatus
US4035654A (en) * 1976-01-12 1977-07-12 Elmer Frank J Optical alignment sensor
JPS6121192Y2 (no) * 1980-09-02 1986-06-25
GB2117511A (en) * 1982-02-19 1983-10-12 Dr Paul Derek Cook Laser beam alignment detection
JPS59195890A (ja) * 1983-04-20 1984-11-07 Mitsubishi Electric Corp レ−ザ光軸調整器
FR2553910B1 (fr) * 1983-10-24 1986-03-21 Commissariat Energie Atomique Detecteur thermoelectrique d'alignement d'un faisceau laser et dispositif d'asservissement utilisant ce detecteur, pour l'alignement automatique d'un faisceau laser
GB2161599A (en) * 1984-07-14 1986-01-15 Richard Ian Emmess Alignment device for tools
FR2616267A1 (fr) * 1987-06-02 1988-12-09 Commissariat Energie Atomique Laser a moyens d'asservissement en mode fondamental
US4793715A (en) * 1987-08-28 1988-12-27 Westinghouse Electric Corp. Detector for aligning high power lasers
DE3812091C1 (no) * 1988-04-12 1989-06-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De

Also Published As

Publication number Publication date
FR2640775A1 (fr) 1990-06-22
GB8925114D0 (en) 1989-12-28
DE3840278C2 (no) 1991-04-18
DE3840278A1 (de) 1990-05-31
GB2226132B (en) 1992-10-14
GB2226132A (en) 1990-06-20

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Legal Events

Date Code Title Description
ST Notification of lapse