FR2640775B1 - DEVICE FOR DETECTING A LASER BEAM - Google Patents
DEVICE FOR DETECTING A LASER BEAMInfo
- Publication number
- FR2640775B1 FR2640775B1 FR8915701A FR8915701A FR2640775B1 FR 2640775 B1 FR2640775 B1 FR 2640775B1 FR 8915701 A FR8915701 A FR 8915701A FR 8915701 A FR8915701 A FR 8915701A FR 2640775 B1 FR2640775 B1 FR 2640775B1
- Authority
- FR
- France
- Prior art keywords
- detecting
- laser beam
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883840278 DE3840278A1 (en) | 1988-11-30 | 1988-11-30 | DEVICE FOR DETECTING A LASER BEAM |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2640775A1 FR2640775A1 (en) | 1990-06-22 |
FR2640775B1 true FR2640775B1 (en) | 1994-11-04 |
Family
ID=6368126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8915701A Expired - Fee Related FR2640775B1 (en) | 1988-11-30 | 1989-11-29 | DEVICE FOR DETECTING A LASER BEAM |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE3840278A1 (en) |
FR (1) | FR2640775B1 (en) |
GB (1) | GB2226132B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4200505C2 (en) * | 1992-01-11 | 2003-04-10 | Diehl Stiftung & Co | Devices for observing and controlling the geometry and / or the energy distribution of the beam spot generated by means of a laser beam on a workpiece to be machined |
DE102011005775B4 (en) | 2011-03-18 | 2012-11-15 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Detector and method for detecting alignment of a laser beam in a laser processing machine and laser processing machine |
WO2015172816A1 (en) * | 2014-05-13 | 2015-11-19 | Trumpf Laser- Und Systemtechnik Gmbh | Device for monitoring the orientation of a laser beam and euv radiation-generating device comprising same |
KR102628236B1 (en) * | 2018-02-20 | 2024-01-23 | 에이에스엠엘 네델란즈 비.브이. | sensor system |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3753150A (en) * | 1972-09-06 | 1973-08-14 | Avco Corp | Laser mirror positioning apparatus |
US4035654A (en) * | 1976-01-12 | 1977-07-12 | Elmer Frank J | Optical alignment sensor |
JPS6121192Y2 (en) * | 1980-09-02 | 1986-06-25 | ||
GB2117511A (en) * | 1982-02-19 | 1983-10-12 | Dr Paul Derek Cook | Laser beam alignment detection |
JPS59195890A (en) * | 1983-04-20 | 1984-11-07 | Mitsubishi Electric Corp | Regulator for laser optical axis |
FR2553910B1 (en) * | 1983-10-24 | 1986-03-21 | Commissariat Energie Atomique | THERMOELECTRIC SENSOR FOR LASER BEAM ALIGNMENT AND SERVO DEVICE USING THE SAME, FOR AUTOMATIC ALIGNMENT OF A LASER BEAM |
GB2161599A (en) * | 1984-07-14 | 1986-01-15 | Richard Ian Emmess | Alignment device for tools |
FR2616267A1 (en) * | 1987-06-02 | 1988-12-09 | Commissariat Energie Atomique | LASER WITH MEANS OF ASSERVING IN FUNDAMENTAL MODE |
US4793715A (en) * | 1987-08-28 | 1988-12-27 | Westinghouse Electric Corp. | Detector for aligning high power lasers |
DE3812091C1 (en) * | 1988-04-12 | 1989-06-01 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De |
-
1988
- 1988-11-30 DE DE19883840278 patent/DE3840278A1/en active Granted
-
1989
- 1989-11-07 GB GB8925114A patent/GB2226132B/en not_active Expired - Fee Related
- 1989-11-29 FR FR8915701A patent/FR2640775B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2640775A1 (en) | 1990-06-22 |
GB2226132A (en) | 1990-06-20 |
GB2226132B (en) | 1992-10-14 |
DE3840278C2 (en) | 1991-04-18 |
DE3840278A1 (en) | 1990-05-31 |
GB8925114D0 (en) | 1989-12-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |