GB2226132A - Apparatus for detecting the position of a laser beam - Google Patents

Apparatus for detecting the position of a laser beam Download PDF

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Publication number
GB2226132A
GB2226132A GB8925114A GB8925114A GB2226132A GB 2226132 A GB2226132 A GB 2226132A GB 8925114 A GB8925114 A GB 8925114A GB 8925114 A GB8925114 A GB 8925114A GB 2226132 A GB2226132 A GB 2226132A
Authority
GB
United Kingdom
Prior art keywords
thermoelements
laser beam
array
axis
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8925114A
Other versions
GB2226132B (en
GB8925114D0 (en
Inventor
Horst-Ulf Schottelius
Rolf Mosandl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diehl Verwaltungs Stiftung
Original Assignee
Diehl GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diehl GmbH and Co filed Critical Diehl GmbH and Co
Publication of GB8925114D0 publication Critical patent/GB8925114D0/en
Publication of GB2226132A publication Critical patent/GB2226132A/en
Application granted granted Critical
Publication of GB2226132B publication Critical patent/GB2226132B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Laser Surgery Devices (AREA)
  • Laser Beam Processing (AREA)

Description

1 APPARATUS FOR DETECTING THE POSITION OF A LASER BEAM The invention
relates to an apparatus f or detecting the displacement of a high-energy laser beam from a desired beam direction.
An arrangement for adjusting a laser beam at a target is described in DEOS 34 22 232. This works with a 2-axis tilting mirror. Provided in the beam path in front of this is a compensation mirror which compensates for distortions which the departing beam experiences an the way to the target as a result of atmospherically occasioned disturbances.
An object of the invention is to propose apparatus, of the type mentioned at the beginning hereof, with which the displacement or drift of a laser beam relative to a desired beam direction is evaluable.
In accordance with the invention there is provided apparatus for detecting the displacement of a laser beam from a desired beam direction characterised in that:- (a) an array of several thermoelements is provided 25 around the desired position of the laser beam, (b) the cross-sectional profile of the array corresponds to the cross-sectional profile of the laser beam, and 2 (c) the thermoelements are connected to a control circuit, which evaluates the different electrical states, e. g. voltages, of the thermoelements which arise upon displacement of the laser beam, passing through the array, from the desired beam position.
If the actual beam position (or axis) of the laser beam coincides with the desired beam direction, then all of the thermoelements are struck or affected equally little or are not struck or affected by the laser beam so that the electrical states of the thermoelements are the same. For example, where the thermoelements are thermocouples, the initial voltages, standing at the control circuit, from the thermoelements are identical. The control circuit indicates that the laser beam has not drifted away from or relative to the desired beam direction.
If the laser beam deviates from the desired beam direction, then at least one thermoelement is acted upon more strongly by the radiation energy of the laser beam than at least one of the others. This asymmetry of the radiation impingement results in correspondingly different electrical states, e.g. thermoelectric voltages. The control circuit evaluates this.
The -thermoelements preferably extend towards the centre of the desired beam position, and are preferably 0 k 3 1 equally distributed in said array.
Also time-dependent deformation of the crosssectional profile e.g. in shape or size, of the laser beam can be detected with the described arrangement, and a beam profile correction device may be provided, in the beam path and may be controlled by the apparatus.
For the adjustment of the direction of the laser beam to the desired beam direction, a 2-axis tilting mirror is preferably provided in the beam path in front of the array, and the control circuit preferably controls the 2-axis tilting mirror until the position of the laser beam relative to the array again coincides with the desired beam direction. In this way an automatic stabilisation of the laser beam to the desired bee=. direction is achieved.
Further advantageous developments of the invention, will become apparent from the following description of an. exemplified embodiment shown in the diacrammatic drawina in accompanying which the single FIGURE shows apparatus for adjusting a laser beam to a desire-cl direction represented by a beam arrow A.
A laser-beam source 1 is directed at a 2-axis tilting mú=or 2. in the beam path of the laser beam 3, connected subsequently to the tilting mirror 2 is a ring- 4 shaped array 4. This is so fastened that its centre Z is intersected by the desired beam axis A of the laser beam 3. The cross-sectional profile, perpendicular to the desired beam axis A, of the array 4 in the exemplified instance is, like the cross-sectional profile of the laser beam 3, circular.
The ring-shaped array 4 has several, for example eight, equidistantly spaced thermoelements 5, which are of plate-shaped form and stand radially to the array 4. The thermoelements 5 are thermocouple devices which generate electrical voltages which are dependent upon their temperatures.
The thermoelements 5 are connected to a converter such as an analogue to digital converter 6, which is connected to a control circuit 7, for example a microcomputer. The control circuit 7 controls an adjusting unit 8, which is connected to the tilting mirror 2. Moreover, a recording instrument 9, for example a plotter, can be connected to the control circuit 7.
The mode of operation of the described apparatus is generally as follows:
So long as the axis of the laser beam 3 coincides with the desired beam axis A, the thermoelements 5 are 4 scarcely, but at least uniformly, heated by the laser beam 3. Accordingly from all the thermoelements 5 the same voltages occur at the control circuit 7. The adjusting member 8 and thus the tilting mirror 2 are not 5 adjusted.
If the laser beam 3 deviates, for example in the xdirection, from the desired beam axis A, then it heats the right-hand thermoelements 5 more than the left-hand, upper and lower thermoelements 5. Accordingly different voltages occur at the control circuit 7 from the thermoelements 5. The control circuit 7 now controls the adjusting member 8 in such a way that the tilting mirror is adjusted until the axis of the laser beam 3 again coincides with the desired beam axis A.
The same applies to displacements of the laser beam in the other directions.
0 6 I_

Claims (13)

  1. Apparatus f or detecting the displacement of a laser beam from a desired beam direction characterised in 5 that: - (a) an array of several thermoelements is provided around the desired position of the laser beam, (b) the cross-sectional profile of the array corresponds to the crosssectional prof ile of the laser beam, and the thermoelements are connected to a control circuit, which evaluates the different electrical states, e. g. voltages, of the thermoelements which arise upon displacement of the laser beam, passing through the array, from the desired beam position.
    (c)
  2. 2. Apparatus according to claim 1, characterised in that for the adjustment of the laser beam to the desired beam direction a 2-axis tilting mirror is provided in the beam path in front of the array, and in that the control circuit controls the 2-axis tilting mirror until the position of the laser beam again coincides with the desired beam direction.
    2ES
  3. 3. Apparatus according to claim 1 or 2, characterised in that the thermoelements are fastened in the array to extend perpendicular to the cross-section of the array.
    ( a- 7
  4. 4. Apparatus according to claim 1,2 or 3, characterised in that the thermoelements are f astened in the array to extend towards the centre of said desired beam position.
  5. 5. Apparatus according to any one of the preceding claims, characterised in that eight or more thermoelements are provided in the array.
  6. 6. Apparatus according to any one of the preceding claims, characterised in that the thermoelements are equally or equidistantly distributed in the array.
  7. 7. Apparatus according to any preceding claim wherein said array is of circular ring form; wherein said laser beam is circular in cross-section, and wherein the thermoelements extend radially towards a desired beam axis A.
  8. 8. Apparatus for detecting the displacement of a high- energy-rich laser beam from a desired beam axis, characterised in that a ring-shaped arrangement of several thermoelements is provided concentrically to the desired beam axis (A), in that the cross-sectional profile of the ring-shaped arrangement corresponds to the cross-sectional profile of the laser beam and in that the thermoelements are connected to a control circuit, which evaluates the different voltages of the thermoelements which arise upon displacement of the laser beam, 8 kI conducted through the ring-shaped arrangement, from the desired beam axis (A).
  9. 9. Apparatus according to Claim 8, characterised in that for the adjustment of the laser beam to the desired beam axis (A) a 2-axis tilting mirror is provided in the beam path in front of the ring-shaped that the control circuit controls mirror until the axis of the laser
  10. 10 with the desired beam axis (A).
    arrangement and in the 2-axis tilting beam acain coincides 10. Apparatus according to Claim 8 or 9, characterised in that the thermoelements are fastened to the ringshaped arrangement radially to the cross-section of the 15 arrangement.
  11. 11. Apparatus according to Claims 8,9 or 10, characterised in that eight or more thermoelements are provided on the ring-shaped arrangement.
  12. 12. Apparatus according to one of the preceding claims, characterised in that the thermoelements are e qually distributed on the ring-shaped arrangement.
  13. 13. Apparatus for detecting the displacement of a laser beam substantially as hereinbefore described with i-eference to the accompanying drawing.
    PublistedI990atThe Patent Office, State House, 66171 High Holborn. LondonWClR4TP. Further copies maybe obtainedfroin The Patent Office. Sales Branch, St Mary Cray, Orpington. Kent BR5 3RD. Printed by Multiplex tecbxAques ltd. St Mary Cray, Kent. Con V87 14
GB8925114A 1988-11-30 1989-11-07 Apparatus for detecting the position of a laser beam Expired - Fee Related GB2226132B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883840278 DE3840278A1 (en) 1988-11-30 1988-11-30 DEVICE FOR DETECTING A LASER BEAM

Publications (3)

Publication Number Publication Date
GB8925114D0 GB8925114D0 (en) 1989-12-28
GB2226132A true GB2226132A (en) 1990-06-20
GB2226132B GB2226132B (en) 1992-10-14

Family

ID=6368126

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8925114A Expired - Fee Related GB2226132B (en) 1988-11-30 1989-11-07 Apparatus for detecting the position of a laser beam

Country Status (3)

Country Link
DE (1) DE3840278A1 (en)
FR (1) FR2640775B1 (en)
GB (1) GB2226132B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015172816A1 (en) * 2014-05-13 2015-11-19 Trumpf Laser- Und Systemtechnik Gmbh Device for monitoring the orientation of a laser beam and euv radiation-generating device comprising same
WO2019162038A1 (en) * 2018-02-20 2019-08-29 Asml Netherlands B.V. Sensor system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4200505C2 (en) * 1992-01-11 2003-04-10 Diehl Stiftung & Co Devices for observing and controlling the geometry and / or the energy distribution of the beam spot generated by means of a laser beam on a workpiece to be machined
DE102011005775B4 (en) 2011-03-18 2012-11-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Detector and method for detecting alignment of a laser beam in a laser processing machine and laser processing machine

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2083217A (en) * 1980-09-02 1982-03-17 Amada Co Ltd Determining beam position
GB2117511A (en) * 1982-02-19 1983-10-12 Dr Paul Derek Cook Laser beam alignment detection
GB2161599A (en) * 1984-07-14 1986-01-15 Richard Ian Emmess Alignment device for tools
EP0304664A2 (en) * 1987-08-28 1989-03-01 Westinghouse Electric Corporation Detector for aligning high power lasers

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753150A (en) * 1972-09-06 1973-08-14 Avco Corp Laser mirror positioning apparatus
US4035654A (en) * 1976-01-12 1977-07-12 Elmer Frank J Optical alignment sensor
JPS59195890A (en) * 1983-04-20 1984-11-07 Mitsubishi Electric Corp Regulator for laser optical axis
FR2553910B1 (en) * 1983-10-24 1986-03-21 Commissariat Energie Atomique THERMOELECTRIC SENSOR FOR LASER BEAM ALIGNMENT AND SERVO DEVICE USING THE SAME, FOR AUTOMATIC ALIGNMENT OF A LASER BEAM
FR2616267A1 (en) * 1987-06-02 1988-12-09 Commissariat Energie Atomique LASER WITH MEANS OF ASSERVING IN FUNDAMENTAL MODE
DE3812091C1 (en) * 1988-04-12 1989-06-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2083217A (en) * 1980-09-02 1982-03-17 Amada Co Ltd Determining beam position
GB2117511A (en) * 1982-02-19 1983-10-12 Dr Paul Derek Cook Laser beam alignment detection
GB2161599A (en) * 1984-07-14 1986-01-15 Richard Ian Emmess Alignment device for tools
EP0304664A2 (en) * 1987-08-28 1989-03-01 Westinghouse Electric Corporation Detector for aligning high power lasers

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015172816A1 (en) * 2014-05-13 2015-11-19 Trumpf Laser- Und Systemtechnik Gmbh Device for monitoring the orientation of a laser beam and euv radiation-generating device comprising same
TWI593495B (en) * 2014-05-13 2017-08-01 創浦雷射與系統科技有限公司 Device for monitoring the alignment of a laser beam, and euv radiation generating apparatus having such a device
WO2019162038A1 (en) * 2018-02-20 2019-08-29 Asml Netherlands B.V. Sensor system
US11258224B2 (en) 2018-02-20 2022-02-22 Asml Netherlands B.V. Sensor system

Also Published As

Publication number Publication date
FR2640775A1 (en) 1990-06-22
GB2226132B (en) 1992-10-14
DE3840278C2 (en) 1991-04-18
FR2640775B1 (en) 1994-11-04
DE3840278A1 (en) 1990-05-31
GB8925114D0 (en) 1989-12-28

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Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19941107