FR2623621B1 - Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre - Google Patents

Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre

Info

Publication number
FR2623621B1
FR2623621B1 FR8716093A FR8716093A FR2623621B1 FR 2623621 B1 FR2623621 B1 FR 2623621B1 FR 8716093 A FR8716093 A FR 8716093A FR 8716093 A FR8716093 A FR 8716093A FR 2623621 B1 FR2623621 B1 FR 2623621B1
Authority
FR
France
Prior art keywords
pyrometer
detector
image
forming
application
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8716093A
Other languages
English (en)
Other versions
FR2623621A1 (fr
Inventor
Jean-Pierre Gueguen
Paul Jouy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8716093A priority Critical patent/FR2623621B1/fr
Publication of FR2623621A1 publication Critical patent/FR2623621A1/fr
Application granted granted Critical
Publication of FR2623621B1 publication Critical patent/FR2623621B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q35/00—Control systems or devices for copying directly from a pattern or a master model; Devices for use in copying manually
    • B23Q35/04—Control systems or devices for copying directly from a pattern or a master model; Devices for use in copying manually using a feeler or the like travelling along the outline of the pattern, model or drawing; Feelers, patterns, or models therefor
    • B23Q35/08—Means for transforming movement of the feeler or the like into feed movement of tool or work
    • B23Q35/12—Means for transforming movement of the feeler or the like into feed movement of tool or work involving electrical means
    • B23Q35/127—Means for transforming movement of the feeler or the like into feed movement of tool or work involving electrical means using non-mechanical sensing
    • B23Q35/128—Sensing by using optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/07—Arrangements for adjusting the solid angle of collected radiation, e.g. adjusting or orienting field of view, tracking position or encoding angular position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0808—Convex mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/084—Adjustable or slidable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0865—Optical arrangements having means for replacing an element of the arrangement by another of the same type, e.g. an optical filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/48—Thermography; Techniques using wholly visual means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G01J2005/062—Peltier
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/047—Mobile mounting; Scanning arrangements
FR8716093A 1987-11-20 1987-11-20 Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre Expired - Lifetime FR2623621B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8716093A FR2623621B1 (fr) 1987-11-20 1987-11-20 Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8716093A FR2623621B1 (fr) 1987-11-20 1987-11-20 Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre

Publications (2)

Publication Number Publication Date
FR2623621A1 FR2623621A1 (fr) 1989-05-26
FR2623621B1 true FR2623621B1 (fr) 1991-12-27

Family

ID=9357001

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8716093A Expired - Lifetime FR2623621B1 (fr) 1987-11-20 1987-11-20 Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre

Country Status (1)

Country Link
FR (1) FR2623621B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5635000A (en) * 1999-06-23 2001-01-09 Etec Systems, Inc. Pyrometric dose correction for proximity heating of resists during electron beamlithography
JP6849405B2 (ja) * 2016-11-14 2021-03-24 浜松ホトニクス株式会社 分光計測装置及び分光計測システム
JP6867785B2 (ja) * 2016-11-14 2021-05-12 浜松ホトニクス株式会社 分光計測装置及び分光計測システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1144318B (de) * 1959-01-26 1963-02-28 Siemens Ag Einrichtung bei ortsfesten Geraeten zum Feststellen heissgelaufener Achslagergehaeuse
US3234844A (en) * 1961-06-14 1966-02-15 Infrared Ind Inc Torsionally driven scanning mirror
US3887263A (en) * 1967-09-07 1975-06-03 Texas Instruments Inc High resolution wide field scan system
US3782835A (en) * 1972-04-10 1974-01-01 Nasa Optical instruments
US4015476A (en) * 1974-11-08 1977-04-05 Bethlehem Steel Corporation Scanning pyrometer system
DE3117360A1 (de) * 1981-05-02 1982-11-18 Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg Vorrichtung zur pruefung von walzgut fuer die fehlererfassung
JPS59173748A (ja) * 1983-03-23 1984-10-01 Mitsubishi Electric Corp 溶接位置検出方法

Also Published As

Publication number Publication date
FR2623621A1 (fr) 1989-05-26

Similar Documents

Publication Publication Date Title
FR2530049B1 (fr) Dispositif d'exploration optique d'un document
FR2621398B1 (fr) Dispositif optoelectrique de detection et de localisation d'une source rayonnante
FR2537733B1 (fr) Dispositif guide d'ondes optique
FR2637975B1 (fr) Dispositif pour eliminer par filtrage un rayonnement parasite d'un guide d'ondes optiques et interferometre gyroscopique de sagnac
EP0459489A3 (en) Method of reading optical image of inspected surface and image reading system employable therein
FR2501385B1 (fr) Dispositif optique compact d'exploration
FR2509556B1 (fr) Dispositif de balayage et d'enregistrement d'image
FR2602344B1 (fr) Conducteur a fibre optique et appareil de formation d'image
FR2499257B1 (fr) Capteur de lumiere destine a transmettre la lumiere d'une torche electronique a des fibres optiques, pour la photographie d'objets de faibles dimensions et dispositif incorporant ce capteur
FR2605167B1 (fr) Capteur d'images electrostatique
FR2581251B1 (fr) Dispositif d'aboutement optique de detecteurs photosensibles
FR2578974B1 (fr) Dispositif optique de detection analogique d'une force
FR2562697B1 (fr) Dispositif d'affichage optique
FR2489179B1 (fr) Dispositif d'exploration optique d'objets
FR2623621B1 (fr) Dispositif optique de formation et de balayage lineaire d'une image sur un detecteur et son application a un pyrometre
FR2563636B1 (fr) Dispositif optique de balayage
FR2718232B1 (fr) Procédé et dispositif pour mesurer la qualité optique de la surface d'un objet transparent.
FR2437751B1 (fr) Dispositif pour le balayage optique ou la projection d'un film
FR2577371B1 (fr) Dispositif de projection d'image de television sur grand ecran
FR2524751B1 (fr) Dispositif transistorise de formation d'images a haute sensibillite
FR2615963B1 (fr) Dispositif de commande du deplacement d'un objectif optique
FR2595149B1 (fr) Dispositif d'etancheite longitudinale pour l'ame d'un cable optique
ES2076339T3 (es) Videodensitometro.
FR2618909B1 (fr) Dispositif optoelectrique de detection et de localisation d'une source rayonnante
FR2628199B1 (fr) Procede et dispositif de determination de la precision dimensionnelle de creations graphiques formees sur un substrat par un systeme d'imagerie optique directe

Legal Events

Date Code Title Description
ST Notification of lapse