FR2620531B1 - Detecteur thermique en reseau - Google Patents

Detecteur thermique en reseau

Info

Publication number
FR2620531B1
FR2620531B1 FR8704869A FR8704869A FR2620531B1 FR 2620531 B1 FR2620531 B1 FR 2620531B1 FR 8704869 A FR8704869 A FR 8704869A FR 8704869 A FR8704869 A FR 8704869A FR 2620531 B1 FR2620531 B1 FR 2620531B1
Authority
FR
France
Prior art keywords
thermal detector
network thermal
network
detector
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8704869A
Other languages
English (en)
French (fr)
Other versions
FR2620531A1 (fr
Inventor
John Pedder David
Watson Paul
Antony Charles Bache Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Overseas Ltd
Original Assignee
Plessey Overseas Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Overseas Ltd filed Critical Plessey Overseas Ltd
Publication of FR2620531A1 publication Critical patent/FR2620531A1/fr
Application granted granted Critical
Publication of FR2620531B1 publication Critical patent/FR2620531B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/148Charge coupled imagers
    • H01L27/14875Infrared CCD or CID imagers
    • H01L27/14881Infrared CCD or CID imagers of the hybrid type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202Arrays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/206Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices on foils

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
FR8704869A 1985-09-12 1987-04-07 Detecteur thermique en reseau Expired - Fee Related FR2620531B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8522638A GB2200246B (en) 1985-09-12 1985-09-12 Thermal detector array

Publications (2)

Publication Number Publication Date
FR2620531A1 FR2620531A1 (fr) 1989-03-17
FR2620531B1 true FR2620531B1 (fr) 1993-11-05

Family

ID=10585093

Family Applications (2)

Application Number Title Priority Date Filing Date
FR8704869A Expired - Fee Related FR2620531B1 (fr) 1985-09-12 1987-04-07 Detecteur thermique en reseau
FR878704868A Expired - Fee Related FR2624603B1 (fr) 1985-09-12 1987-04-07 Detecteur thermique

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR878704868A Expired - Fee Related FR2624603B1 (fr) 1985-09-12 1987-04-07 Detecteur thermique

Country Status (7)

Country Link
BE (1) BE102T1 (sv)
DE (1) DE3644882A1 (sv)
FR (2) FR2620531B1 (sv)
GB (1) GB2200246B (sv)
IT (1) IT1235675B (sv)
NL (1) NL8615006A (sv)
SE (1) SE466571B (sv)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621688D0 (en) * 1986-09-09 1986-10-15 Graviner Ltd Radiation detection arrangements
GB2206997A (en) * 1987-07-10 1989-01-18 Philips Electronic Associated Arrays of pyroelectric or ferroelectric infrared detector elements
US5047644A (en) * 1989-07-31 1991-09-10 Texas Instruments Incorporated Polyimide thermal isolation mesa for a thermal imaging system
US5306912A (en) * 1989-10-21 1994-04-26 Thorn Emi Plc Optically addressed thermal imaging device
FR2670325B1 (fr) * 1990-12-11 1993-01-22 Thomson Composants Militaires Detecteur infrarouge monolithique a materiau pyroelectrique.
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
CA2118597C (en) * 1991-11-04 2001-12-11 Paul W. Kruse, Jr. Thin film pyroelectric imaging array
GB2274543A (en) * 1993-01-21 1994-07-27 Central Research Lab Ltd Infrared detector
US5942791A (en) * 1996-03-06 1999-08-24 Gec-Marconi Limited Micromachined devices having microbridge structure
GB9604786D0 (en) * 1996-03-06 1996-09-25 Marconi Gec Ltd Micromachined devices
DE69702331T2 (de) * 1997-01-14 2000-12-14 Infrared Integrated Systems Ltd., Towcester Sensor mit einem Detektorfeld
GB2335077B (en) 1998-03-04 2003-05-28 Marconi Gec Ltd Radiation detectors
FR2788885B1 (fr) * 1999-01-21 2003-07-18 Commissariat Energie Atomique Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci
EP1178294A1 (fr) * 2000-08-04 2002-02-06 Ecole Polytechnique Federale De Lausanne Capteur pyroélectrique ayant entre ses pixels un couplage thermique parasite réduit
EP1402581A1 (fr) * 2001-06-08 2004-03-31 IR Microsystems S.A. Capteur infrarouge et procede de fabrication
FR2862160B1 (fr) * 2003-11-10 2006-05-12 Ulis Dispositif de detection de rayonnements infrarouges a detecteurs bolometriques
FR2875606B1 (fr) 2004-09-22 2006-11-10 Commissariat Energie Atomique Detecteur de rayonnement electromagnetique et de particules a nombre de connexions reduit
DE102005001966B4 (de) * 2005-01-15 2009-08-20 Infratec Gmbh Infrarotsensorik Und Messtechnik Mikrophoniereduzierter pyroelektrischer Detektor
JP5644121B2 (ja) * 2010-01-26 2014-12-24 セイコーエプソン株式会社 熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法
WO2011111309A1 (ja) * 2010-03-11 2011-09-15 パナソニック株式会社 焦電型温度センサを用いて温度を測定する方法
CN102437166B (zh) * 2011-10-09 2013-05-01 中国科学院苏州纳米技术与纳米仿生研究所 一种非制冷红外探测系统像素阵列的制作方法
FR3006438B1 (fr) 2013-06-04 2015-06-26 Commissariat Energie Atomique Capteur de temperature

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3801949A (en) * 1973-03-08 1974-04-02 Rca Corp Thermal detector and method of making the same
US4039833A (en) * 1976-08-17 1977-08-02 The United States Of America As Represented By The Secretary Of The Navy High density infrared detector array
GB1523347A (en) * 1976-11-16 1978-08-31 Secr Defence Pyroelectric tragets
GB1532293A (en) * 1977-06-14 1978-11-15 Secr Defence Pyroelectric vidicon targets and a method and machine for reticulating them
GB1592500A (en) * 1977-12-01 1981-07-08 Roundy C B Pyroelectric infrared detection system
GB2030023B (en) * 1977-12-19 1982-08-04 Texas Instruments Inc Ferroelectric imaging system
GB2028579B (en) * 1978-08-22 1982-12-22 English Electric Valve Co Ltd Target for a pyroelectric camera
US4317063A (en) * 1978-10-28 1982-02-23 Plessey Handel Und Investments Ag Pyroelectric detectors
GB2035685B (en) * 1978-10-28 1983-05-05 Plessey Co Ltd Pyroelectric detectors
US4532434A (en) * 1978-10-30 1985-07-30 Phillips Petroleum Company Waveform generator
US4354109A (en) * 1979-12-31 1982-10-12 Honeywell Inc. Mounting for pyroelectric detecctor arrays
DE3045118C2 (de) * 1980-11-29 1983-10-13 Georg Dipl.-Ing. 7500 Karlsruhe Richter Infrarotdetektor und Verfahren zur Herstellung
GB2095905B (en) * 1981-03-27 1985-01-16 Philips Electronic Associated Infra-red radiation imaging devices and methods for their manufacture
GB2100058B (en) * 1981-06-05 1985-03-20 Philips Electronic Associated Pyroelectric detector
US4532424A (en) * 1983-04-25 1985-07-30 Rockwell International Corporation Pyroelectric thermal detector array
GB2163596B (en) * 1984-08-24 1988-02-03 Philips Electronic Associated A thermal imaging device and a method of manufacturing a thermal imaging device

Also Published As

Publication number Publication date
DE3644882A1 (de) 1988-11-17
FR2624603B1 (fr) 1993-04-30
GB2200246A (en) 1988-07-27
GB8522638D0 (en) 1988-05-25
BE102T1 (fr) 1988-08-10
SE466571B (sv) 1992-03-02
SE8702531L (sv) 1988-08-06
SE8702531D0 (sv) 1987-06-17
GB2200246B (en) 1989-11-01
IT1235675B (it) 1992-09-21
FR2620531A1 (fr) 1989-03-17
NL8615006A (nl) 1988-08-01
FR2624603A1 (fr) 1989-06-16

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TP Transmission of property
ST Notification of lapse