FR2617969B1 - Appareil d'evaluation de contraintes - Google Patents

Appareil d'evaluation de contraintes

Info

Publication number
FR2617969B1
FR2617969B1 FR888809166A FR8809166A FR2617969B1 FR 2617969 B1 FR2617969 B1 FR 2617969B1 FR 888809166 A FR888809166 A FR 888809166A FR 8809166 A FR8809166 A FR 8809166A FR 2617969 B1 FR2617969 B1 FR 2617969B1
Authority
FR
France
Prior art keywords
constraines
assessment apparatus
assessment
constraines assessment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR888809166A
Other languages
English (en)
Other versions
FR2617969A1 (fr
Inventor
Yasuo Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of FR2617969A1 publication Critical patent/FR2617969A1/fr
Application granted granted Critical
Publication of FR2617969B1 publication Critical patent/FR2617969B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
FR888809166A 1987-07-08 1988-07-06 Appareil d'evaluation de contraintes Expired - Fee Related FR2617969B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171606A JPH0682098B2 (ja) 1987-07-08 1987-07-08 応力評価装置

Publications (2)

Publication Number Publication Date
FR2617969A1 FR2617969A1 (fr) 1989-01-13
FR2617969B1 true FR2617969B1 (fr) 1992-08-14

Family

ID=15926282

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888809166A Expired - Fee Related FR2617969B1 (fr) 1987-07-08 1988-07-06 Appareil d'evaluation de contraintes

Country Status (4)

Country Link
US (1) US4812036A (fr)
JP (1) JPH0682098B2 (fr)
FR (1) FR2617969B1 (fr)
GB (1) GB2206688B (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999810A (en) * 1989-10-19 1991-03-12 Martin Marietta Energy Systems, Inc. Surface-enhanced raman optical data storage system
GB9001845D0 (en) * 1990-01-26 1990-03-28 Univ Manchester Measurement of deformation
US5139334A (en) * 1990-09-17 1992-08-18 Boston Advanced Technologies, Inc. Hydrocarbon analysis based on low resolution raman spectral analysis
US5325342A (en) * 1992-04-08 1994-06-28 Martin Marietta Energy Systems, Inc. Surface-enhanced raman optical data storage system
US5394752A (en) * 1993-03-16 1995-03-07 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method for determing shear direction using liquid crystal coatings
US5546811A (en) * 1995-01-24 1996-08-20 Massachusetts Instittue Of Technology Optical measurements of stress in thin film materials
JP3995745B2 (ja) * 1996-12-27 2007-10-24 奥多摩工業株式会社 軽質炭酸カルシウム・重質炭酸カルシウム混合水性スラリーの製造方法
US6052185A (en) * 1997-06-30 2000-04-18 Active Impulse Systems Inc. Method and apparatus for measuring the concentration of ions implanted in semiconductor materials
US6016202A (en) * 1997-06-30 2000-01-18 U.S. Philips Corporation Method and apparatus for measuring material properties using transient-grating spectroscopy
US6256100B1 (en) 1998-04-27 2001-07-03 Active Impulse Systems, Inc. Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
US6069703A (en) * 1998-05-28 2000-05-30 Active Impulse Systems, Inc. Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structure
US6795198B1 (en) 1998-05-28 2004-09-21 Martin Fuchs Method and device for measuring thin films and semiconductor substrates using reflection mode geometry
US6826491B2 (en) * 2000-07-17 2004-11-30 Wisconsin Alumni Research Foundation Method and apparatus for providing film stress measurements based on substrate displacement
DE10146826B4 (de) * 2001-09-19 2004-11-25 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Analyse von Silizium-Germanium-Legierungen und Vorrichtung zur Herstellung von Halbleiterschichtstrukturen mit Silizium-Germanium-Legierungsschichten
JP2006073866A (ja) * 2004-09-03 2006-03-16 Horiba Ltd 半導体材料の応力測定方法及びその装置
DE102004045175A1 (de) * 2004-09-17 2006-03-23 Friedrich-Alexander-Universität Erlangen-Nürnberg Messung von mechanischen inneren Spannungen in multikristallinen Materialien mittels Mikro-Ramanspektroskopie
JP4383302B2 (ja) * 2004-09-29 2009-12-16 富士通株式会社 評価結果出力プログラム
US7418353B2 (en) * 2004-10-12 2008-08-26 Wisconsin Alumni Research Foundation Determining film stress from substrate shape using finite element procedures
JP5108447B2 (ja) * 2007-10-17 2012-12-26 学校法人明治大学 半導体表面歪測定装置、方法及びプログラム
US10186163B1 (en) 2009-11-25 2019-01-22 Peter D. Letterese System and method for reducing stress and/or pain
JP5656894B2 (ja) * 2012-02-03 2015-01-21 株式会社アドバンテスト 接触圧力検出装置および接点圧力測定装置
WO2015184162A1 (fr) 2014-05-29 2015-12-03 Brown University Système optique et procédés de détermination de contraintes dans un substrat
KR20170114994A (ko) * 2016-04-06 2017-10-16 정명재 수동형 센서를 이용한 응력 측정 시스템 및 그 응력 측정 방법
JP2022118522A (ja) 2021-02-02 2022-08-15 住友ゴム工業株式会社 評価方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2563337B1 (fr) * 1984-04-19 1986-06-27 Saint Gobain Rech Mesure des contraintes dans le verre flotte
GB8422873D0 (en) * 1984-09-11 1984-10-17 Secr Defence Static stress measurement in object
JPS61256663A (ja) * 1985-05-09 1986-11-14 Agency Of Ind Science & Technol 半導体装置

Also Published As

Publication number Publication date
US4812036A (en) 1989-03-14
GB8723204D0 (en) 1987-11-04
JPH0682098B2 (ja) 1994-10-19
JPS6415640A (en) 1989-01-19
GB2206688B (en) 1991-01-23
GB2206688A (en) 1989-01-11
FR2617969A1 (fr) 1989-01-13

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Legal Events

Date Code Title Description
D6 Patent endorsed licences of rights
ST Notification of lapse

Effective date: 20060331