FR2600416B1 - Detecteur d'ions a galette de microcanaux - Google Patents

Detecteur d'ions a galette de microcanaux

Info

Publication number
FR2600416B1
FR2600416B1 FR878708616A FR8708616A FR2600416B1 FR 2600416 B1 FR2600416 B1 FR 2600416B1 FR 878708616 A FR878708616 A FR 878708616A FR 8708616 A FR8708616 A FR 8708616A FR 2600416 B1 FR2600416 B1 FR 2600416B1
Authority
FR
France
Prior art keywords
ion detector
microchannel wafer
microchannel
wafer
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR878708616A
Other languages
English (en)
Other versions
FR2600416A1 (fr
Inventor
John Walter Gray
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Netoptix Inc
Original Assignee
Corning Netoptix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Netoptix Inc filed Critical Corning Netoptix Inc
Publication of FR2600416A1 publication Critical patent/FR2600416A1/fr
Application granted granted Critical
Publication of FR2600416B1 publication Critical patent/FR2600416B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H01J43/246—Microchannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24405—Faraday cages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
FR878708616A 1986-06-20 1987-06-19 Detecteur d'ions a galette de microcanaux Expired FR2600416B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/876,696 US4731538A (en) 1986-06-20 1986-06-20 Microchannel plate ion detector

Publications (2)

Publication Number Publication Date
FR2600416A1 FR2600416A1 (fr) 1987-12-24
FR2600416B1 true FR2600416B1 (fr) 1989-12-01

Family

ID=25368383

Family Applications (1)

Application Number Title Priority Date Filing Date
FR878708616A Expired FR2600416B1 (fr) 1986-06-20 1987-06-19 Detecteur d'ions a galette de microcanaux

Country Status (8)

Country Link
US (1) US4731538A (fr)
JP (1) JPS6340893A (fr)
BE (1) BE1000686A4 (fr)
DE (1) DE3720161A1 (fr)
FR (1) FR2600416B1 (fr)
GB (1) GB2193374B (fr)
IT (1) IT1210821B (fr)
NL (1) NL8701387A (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4850371A (en) * 1988-06-13 1989-07-25 Broadhurst John H Novel endotracheal tube and mass spectrometer
US4988868A (en) * 1989-05-15 1991-01-29 Galileo Electro-Optics Corp. Ion detector
US5120968A (en) * 1990-07-05 1992-06-09 The United States Of America As Represented By The Secretary Of The Navy Emittance measuring device for charged particle beams
DE19502439B4 (de) * 1994-02-11 2007-08-16 Oc Oerlikon Balzers Ag Verfahren und Messanordnung zum Messen der pro Zeiteinheit einen Vakuumvolumenbereich in gegebener Richtung durchströmenden elektrischen Ladungsmenge und deren Verwendung für Massenspektrometer
US5451784A (en) * 1994-10-31 1995-09-19 Applied Materials, Inc. Composite diagnostic wafer for semiconductor wafer processing systems
US6265812B1 (en) 1996-11-06 2001-07-24 Hamamatsu Photonics K.K. Electron multiplier
US5770858A (en) * 1997-02-28 1998-06-23 Galileo Corporation Microchannel plate-based detector for time-of-flight mass spectrometer
EP0932184B1 (fr) * 1998-01-22 2011-05-25 Leybold Inficon, Inc. Dispositif de détection d' ions
US6091068A (en) * 1998-05-04 2000-07-18 Leybold Inficon, Inc. Ion collector assembly
DE60112427T2 (de) * 2000-05-12 2006-04-06 The Johns Hopkins University Gitterlose fokussierungsvorrichtung zur extraktion von ionen für einen flugzeitmassenspektrometer
US6943344B2 (en) * 2000-05-26 2005-09-13 The Johns Hopkins University Microchannel plate detector assembly for a time-of-flight mass spectrometer
GB0327241D0 (en) * 2003-11-21 2003-12-24 Gv Instr Ion detector
DE102008011972B4 (de) * 2008-02-29 2010-05-12 Bayer Technology Services Gmbh Vorrichtung zur selbstjustierenden Montage und Halterung von Mikrokanalplatten in Mikrosystemen
JP5350679B2 (ja) * 2008-05-29 2013-11-27 浜松ホトニクス株式会社 イオン検出器
CN104701130B (zh) * 2015-01-26 2017-01-11 中国地质科学院地质研究所 应用于tof质谱仪的离子检测器、质量分析器及离子检测的控制方法
CN107450094B (zh) * 2017-06-22 2019-08-20 山东航天电子技术研究所 一种带电粒子束诊断装置及诊断测量方法
WO2020121167A1 (fr) * 2018-12-13 2020-06-18 Dh Technologies Development Pte. Ltd. Piège à ions linéaire électrostatique à transformée de fourier et spectromètre de masse à temps de vol à réflectron
CN111487483B (zh) * 2020-05-22 2022-05-24 北京卫星环境工程研究所 基于微通道板的紧凑型空间带电粒子探测器结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477023A (en) * 1968-01-16 1969-11-04 Commerce Usa Apparatus for measuring the energy and current of an accelerator electron beam including apertured incident and exit electrodes
GB1447983A (en) * 1973-01-10 1976-09-02 Nat Res Dev Detector for electron microscopes
US4227087A (en) * 1979-05-18 1980-10-07 Galileo Electro-Optics Corp. Beam detector
US4357536A (en) * 1981-01-16 1982-11-02 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for monitoring the intensities of charged particle beams
US4455532A (en) * 1982-01-26 1984-06-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus for measuring charged particle beam
FR2560434B1 (fr) * 1984-02-29 1987-09-11 Centre Nat Rech Scient Spectrometre de masse a temps de vol

Also Published As

Publication number Publication date
JPS6340893A (ja) 1988-02-22
DE3720161A1 (de) 1988-01-21
US4731538A (en) 1988-03-15
GB2193374A (en) 1988-02-03
NL8701387A (nl) 1988-01-18
BE1000686A4 (fr) 1989-03-14
IT8767532A0 (it) 1987-06-19
IT1210821B (it) 1989-09-29
GB8714424D0 (en) 1987-07-22
GB2193374B (en) 1990-05-30
FR2600416A1 (fr) 1987-12-24
JPH0535998B2 (fr) 1993-05-27

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Legal Events

Date Code Title Description
ST Notification of lapse