FR2595505B3 - Circuit de commande de faisceaux d'electrons pour des evaporateurs a faisceaux d'electrons - Google Patents

Circuit de commande de faisceaux d'electrons pour des evaporateurs a faisceaux d'electrons

Info

Publication number
FR2595505B3
FR2595505B3 FR8703100A FR8703100A FR2595505B3 FR 2595505 B3 FR2595505 B3 FR 2595505B3 FR 8703100 A FR8703100 A FR 8703100A FR 8703100 A FR8703100 A FR 8703100A FR 2595505 B3 FR2595505 B3 FR 2595505B3
Authority
FR
France
Prior art keywords
electron beam
drive circuit
evaporators
beam drive
beam evaporators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8703100A
Other languages
English (en)
French (fr)
Other versions
FR2595505A1 (fr
Inventor
Vassil Bonev Pentchev
Venzislav Ivanov Vulkov
Venzislav Gavrilov Dimitrov
Vladimir Stefanov Eterski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VTU Angel Kantchev
Original Assignee
VTU Angel Kantchev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTU Angel Kantchev filed Critical VTU Angel Kantchev
Publication of FR2595505A1 publication Critical patent/FR2595505A1/fr
Application granted granted Critical
Publication of FR2595505B3 publication Critical patent/FR2595505B3/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Physical Vapour Deposition (AREA)
FR8703100A 1986-03-06 1987-03-06 Circuit de commande de faisceaux d'electrons pour des evaporateurs a faisceaux d'electrons Expired FR2595505B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG8673938A BG45024A1 (enExample) 1986-03-06 1986-03-06

Publications (2)

Publication Number Publication Date
FR2595505A1 FR2595505A1 (fr) 1987-09-11
FR2595505B3 true FR2595505B3 (fr) 1988-08-26

Family

ID=3916884

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8703100A Expired FR2595505B3 (fr) 1986-03-06 1987-03-06 Circuit de commande de faisceaux d'electrons pour des evaporateurs a faisceaux d'electrons

Country Status (7)

Country Link
US (1) US4980615A (enExample)
JP (1) JPS62219444A (enExample)
BG (1) BG45024A1 (enExample)
DD (1) DD274347A7 (enExample)
DE (1) DE3706269A1 (enExample)
FR (1) FR2595505B3 (enExample)
HU (1) HUT43910A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3706495A1 (de) * 1987-04-29 1988-09-15 Vtu Angel Kancev Stromversorgungsschaltung fuer elektronenstrahl-verdampfer
US6707429B1 (en) * 2002-12-09 2004-03-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Self-contained sub-millimeter wave rectifying antenna integrated circuit
CN115464246B (zh) * 2022-09-26 2023-12-22 河北众航高能科技有限公司 一种电子束聚焦磁透镜驱动电路及其电子束焊接设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371185A (en) * 1964-10-05 1968-02-27 United Aircraft Corp Electron beam maintenance device
DE1639010A1 (de) * 1967-09-04 1971-01-21 Elektromat Veb Verfahren zur Regelung eines magnetisch fokussierten und ablenkbaren Ladungstraegerstrahles,insbesondere groesserer Leistung
US3714505A (en) * 1970-12-01 1973-01-30 Bell Telephone Labor Inc Dynamic focus correction apparatus for a rectilinearly raster scanned electron beam
US3952228A (en) * 1974-11-18 1976-04-20 Ion Tech, Inc. Electron-bombardment ion source including alternating potential means for cyclically varying the focussing of ion beamlets
US4039899A (en) * 1976-05-03 1977-08-02 Tektronix, Inc. Geometry and focus correction circuit
SU1050011A1 (ru) * 1982-07-16 1983-10-23 Институт Проблем Литья Усср Устройство стабилизации фокусировки электронного луча в электронно-лучевой установке

Also Published As

Publication number Publication date
BG45024A1 (enExample) 1989-03-15
US4980615A (en) 1990-12-25
FR2595505A1 (fr) 1987-09-11
HUT43910A (en) 1987-12-28
DE3706269A1 (de) 1987-09-17
JPS62219444A (ja) 1987-09-26
DD274347A7 (de) 1989-12-20

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