FR2565701B1 - Procede de fabrication de guides d'ondes optiques integres et guide d'onde optique produit par sa mise en oeuvre - Google Patents
Procede de fabrication de guides d'ondes optiques integres et guide d'onde optique produit par sa mise en oeuvreInfo
- Publication number
- FR2565701B1 FR2565701B1 FR858508749A FR8508749A FR2565701B1 FR 2565701 B1 FR2565701 B1 FR 2565701B1 FR 858508749 A FR858508749 A FR 858508749A FR 8508749 A FR8508749 A FR 8508749A FR 2565701 B1 FR2565701 B1 FR 2565701B1
- Authority
- FR
- France
- Prior art keywords
- implementation
- manufacturing integrated
- optical waveguide
- waveguide produced
- optical waveguides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB848414878A GB8414878D0 (en) | 1984-06-11 | 1984-06-11 | Integrated optical waveguides |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2565701A1 FR2565701A1 (fr) | 1985-12-13 |
FR2565701B1 true FR2565701B1 (fr) | 1990-10-26 |
Family
ID=10562260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR858508749A Expired - Fee Related FR2565701B1 (fr) | 1984-06-11 | 1985-06-10 | Procede de fabrication de guides d'ondes optiques integres et guide d'onde optique produit par sa mise en oeuvre |
Country Status (4)
Country | Link |
---|---|
US (1) | US4619680A (fr) |
DE (1) | DE3520813C2 (fr) |
FR (1) | FR2565701B1 (fr) |
GB (2) | GB8414878D0 (fr) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3619379A1 (de) * | 1986-06-09 | 1986-12-18 | Martin Prof. Dr.-Ing. 4630 Bochum Fiebig | Verfahren und vorrichtungen zur herstellung von optischen glasgegenstaenden |
GB8620273D0 (en) * | 1986-08-20 | 1986-10-01 | Gen Electric Co Plc | Deposition of thin films |
US6138478A (en) * | 1992-09-21 | 2000-10-31 | Ceramoptec Industries, Inc. | Method of forming an optical fiber preform using an E020 plasma field configuration |
US5613995A (en) * | 1993-04-23 | 1997-03-25 | Lucent Technologies Inc. | Method for making planar optical waveguides |
US6952504B2 (en) * | 2001-12-21 | 2005-10-04 | Neophotonics Corporation | Three dimensional engineering of planar optical structures |
US6377732B1 (en) * | 1999-01-22 | 2002-04-23 | The Whitaker Corporation | Planar waveguide devices and fiber attachment |
AU2002239458A1 (en) * | 2000-10-26 | 2002-06-11 | Nanogram Corporation | Multilayered optical structures |
US7087179B2 (en) * | 2000-12-11 | 2006-08-08 | Applied Materials, Inc. | Optical integrated circuits (ICs) |
US7000434B2 (en) * | 2000-12-19 | 2006-02-21 | Intel Corporation | Method of creating an angled waveguide using lithographic techniques |
KR20020073748A (ko) * | 2001-03-16 | 2002-09-28 | (주)옵토네스트 | 수정된 화학기상증착법에 의한 광섬유모재 제조방법 및이를 이용하여 제조된 비선형광섬유 |
US7469558B2 (en) * | 2001-07-10 | 2008-12-30 | Springworks, Llc | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture |
NL1019076C2 (nl) * | 2001-10-01 | 2003-04-02 | Draka Fibre Technology Bv | Werkwijze voor het aanbrengen van een of meer glaslagen op het uitwendig oppervlak van een uit glas samengesteld staafvormig vormdeel, alsmede een daarvoor geschikte inrichting. |
US7404877B2 (en) | 2001-11-09 | 2008-07-29 | Springworks, Llc | Low temperature zirconia based thermal barrier layer by PVD |
US20030113085A1 (en) * | 2001-12-14 | 2003-06-19 | Applied Materials, Inc., A Delaware Corporation | HDP-CVD film for uppercladding application in optical waveguides |
US20030110808A1 (en) * | 2001-12-14 | 2003-06-19 | Applied Materials Inc., A Delaware Corporation | Method of manufacturing an optical core |
US7290407B1 (en) * | 2001-12-19 | 2007-11-06 | Jesse Chienhua Shan | Triangle-shaped planar optical waveguide having reduced scattering loss |
US7378356B2 (en) | 2002-03-16 | 2008-05-27 | Springworks, Llc | Biased pulse DC reactive sputtering of oxide films |
US6884327B2 (en) | 2002-03-16 | 2005-04-26 | Tao Pan | Mode size converter for a planar waveguide |
US8236443B2 (en) | 2002-08-09 | 2012-08-07 | Infinite Power Solutions, Inc. | Metal film encapsulation |
US8021778B2 (en) | 2002-08-09 | 2011-09-20 | Infinite Power Solutions, Inc. | Electrochemical apparatus with barrier layer protected substrate |
US8431264B2 (en) | 2002-08-09 | 2013-04-30 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
US7993773B2 (en) | 2002-08-09 | 2011-08-09 | Infinite Power Solutions, Inc. | Electrochemical apparatus with barrier layer protected substrate |
US8394522B2 (en) | 2002-08-09 | 2013-03-12 | Infinite Power Solutions, Inc. | Robust metal film encapsulation |
US8445130B2 (en) | 2002-08-09 | 2013-05-21 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
US8404376B2 (en) | 2002-08-09 | 2013-03-26 | Infinite Power Solutions, Inc. | Metal film encapsulation |
US20070264564A1 (en) | 2006-03-16 | 2007-11-15 | Infinite Power Solutions, Inc. | Thin film battery on an integrated circuit or circuit board and method thereof |
AU2003261463A1 (en) | 2002-08-27 | 2004-03-19 | Symmorphix, Inc. | Optically coupling into highly uniform waveguides |
US7080528B2 (en) * | 2002-10-23 | 2006-07-25 | Applied Materials, Inc. | Method of forming a phosphorus doped optical core using a PECVD process |
CN1756856B (zh) | 2003-02-27 | 2011-10-12 | 希莫菲克斯公司 | 电介质阻挡层膜 |
US7238628B2 (en) | 2003-05-23 | 2007-07-03 | Symmorphix, Inc. | Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides |
US8728285B2 (en) | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
US7079740B2 (en) * | 2004-03-12 | 2006-07-18 | Applied Materials, Inc. | Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides |
JP2006119379A (ja) * | 2004-10-21 | 2006-05-11 | Sumitomo Electric Ind Ltd | 光導波路デバイスの製造方法、および光導波路デバイス |
DE602005017512D1 (de) | 2004-12-08 | 2009-12-17 | Symmorphix Inc | Abscheidung von licoo2 |
US7959769B2 (en) | 2004-12-08 | 2011-06-14 | Infinite Power Solutions, Inc. | Deposition of LiCoO2 |
US7838133B2 (en) | 2005-09-02 | 2010-11-23 | Springworks, Llc | Deposition of perovskite and other compound ceramic films for dielectric applications |
US8062708B2 (en) | 2006-09-29 | 2011-11-22 | Infinite Power Solutions, Inc. | Masking of and material constraint for depositing battery layers on flexible substrates |
US8197781B2 (en) | 2006-11-07 | 2012-06-12 | Infinite Power Solutions, Inc. | Sputtering target of Li3PO4 and method for producing same |
US8268488B2 (en) | 2007-12-21 | 2012-09-18 | Infinite Power Solutions, Inc. | Thin film electrolyte for thin film batteries |
TWI441937B (zh) | 2007-12-21 | 2014-06-21 | Infinite Power Solutions Inc | 形成用於電解質薄膜之濺鍍靶材的方法 |
US8518581B2 (en) | 2008-01-11 | 2013-08-27 | Inifinite Power Solutions, Inc. | Thin film encapsulation for thin film batteries and other devices |
CN101983469B (zh) | 2008-04-02 | 2014-06-04 | 无穷动力解决方案股份有限公司 | 与能量采集关联的储能装置的无源过电压/欠电压控制和保护 |
US8906523B2 (en) | 2008-08-11 | 2014-12-09 | Infinite Power Solutions, Inc. | Energy device with integral collector surface for electromagnetic energy harvesting and method thereof |
WO2010030743A1 (fr) | 2008-09-12 | 2010-03-18 | Infinite Power Solutions, Inc. | Dispositif d'énergie ayant une surface conductrice intégrée pour une communication de données par l'intermédiaire d'une énergie électromagnétique et procédé associé |
US8508193B2 (en) | 2008-10-08 | 2013-08-13 | Infinite Power Solutions, Inc. | Environmentally-powered wireless sensor module |
US8599572B2 (en) | 2009-09-01 | 2013-12-03 | Infinite Power Solutions, Inc. | Printed circuit board with integrated thin film battery |
CN102947976B (zh) | 2010-06-07 | 2018-03-16 | 萨普拉斯特研究有限责任公司 | 可充电、高密度的电化学设备 |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3934061A (en) * | 1972-03-30 | 1976-01-20 | Corning Glass Works | Method of forming planar optical waveguides |
DE2444100C3 (de) * | 1974-09-14 | 1979-04-12 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern |
US4196232A (en) * | 1975-12-18 | 1980-04-01 | Rca Corporation | Method of chemically vapor-depositing a low-stress glass layer |
DE2642949C3 (de) * | 1976-09-24 | 1980-11-20 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern |
GB1559978A (en) * | 1976-12-01 | 1980-01-30 | Gen Electric Co Ltd | Chemical vapour deposition processes |
US4328646A (en) * | 1978-11-27 | 1982-05-11 | Rca Corporation | Method for preparing an abrasive coating |
US4268711A (en) * | 1979-04-26 | 1981-05-19 | Optical Coating Laboratory, Inc. | Method and apparatus for forming films from vapors using a contained plasma source |
US4341541A (en) * | 1979-07-13 | 1982-07-27 | Times Fiber Communications, Inc. | Process for the production of optical fiber |
US4345928A (en) * | 1979-10-09 | 1982-08-24 | Nippon Telegraph & Telephone Public Corporation | Fabrication method of single-mode optical fiber preforms |
US4425146A (en) * | 1979-12-17 | 1984-01-10 | Nippon Telegraph & Telephone Public Corporation | Method of making glass waveguide for optical circuit |
US4367085A (en) * | 1980-01-07 | 1983-01-04 | Nippon Telegraph & Telephone Public Corporation | Method of fabricating multi-mode optical fiber preforms |
DE3015880A1 (de) * | 1980-04-24 | 1981-10-29 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung einer lichtwellenleiter verwendenden optischen einrichtung |
JPS5781213A (en) * | 1980-11-11 | 1982-05-21 | Nippon Telegr & Teleph Corp <Ntt> | Production of thin film for optical waveguide |
JPS57104106A (en) * | 1980-12-22 | 1982-06-29 | Nippon Sheet Glass Co Ltd | Production of optical circuit |
JPS58100801A (ja) * | 1981-12-12 | 1983-06-15 | Nippon Telegr & Teleph Corp <Ntt> | 石英光導波路の製造方法 |
JPS592008A (ja) * | 1982-06-28 | 1984-01-07 | Nippon Telegr & Teleph Corp <Ntt> | 埋め込み型石英光導波路の製造方法 |
GB2134099B (en) * | 1983-01-24 | 1986-10-22 | Ass Elect Ind | Tube manufacture |
US4494968A (en) * | 1983-10-03 | 1985-01-22 | Corning Glass Works | Method of forming laminated single polarization fiber |
-
1984
- 1984-06-11 GB GB848414878A patent/GB8414878D0/en active Pending
-
1985
- 1985-06-07 US US06/742,207 patent/US4619680A/en not_active Expired - Lifetime
- 1985-06-10 GB GB08514618A patent/GB2160226B/en not_active Expired
- 1985-06-10 FR FR858508749A patent/FR2565701B1/fr not_active Expired - Fee Related
- 1985-06-11 DE DE3520813A patent/DE3520813C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2160226A (en) | 1985-12-18 |
FR2565701A1 (fr) | 1985-12-13 |
DE3520813A1 (de) | 1985-12-12 |
US4619680A (en) | 1986-10-28 |
GB8514618D0 (en) | 1985-07-10 |
DE3520813C2 (de) | 1996-09-19 |
GB8414878D0 (en) | 1984-07-18 |
GB2160226B (en) | 1988-01-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
ST | Notification of lapse |