FR2554223B1 - Jauge de hauteur a capacite et procede et appareil d'etalonnage de cette jauge - Google Patents

Jauge de hauteur a capacite et procede et appareil d'etalonnage de cette jauge

Info

Publication number
FR2554223B1
FR2554223B1 FR8416437A FR8416437A FR2554223B1 FR 2554223 B1 FR2554223 B1 FR 2554223B1 FR 8416437 A FR8416437 A FR 8416437A FR 8416437 A FR8416437 A FR 8416437A FR 2554223 B1 FR2554223 B1 FR 2554223B1
Authority
FR
France
Prior art keywords
gauge
calibrating
capacity
height
height gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8416437A
Other languages
English (en)
Other versions
FR2554223A1 (fr
Inventor
John Richard Shambroom
Alan Paul Sliski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Control Data Corp
Original Assignee
Control Data Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/546,760 external-priority patent/US4538069A/en
Application filed by Control Data Corp filed Critical Control Data Corp
Publication of FR2554223A1 publication Critical patent/FR2554223A1/fr
Application granted granted Critical
Publication of FR2554223B1 publication Critical patent/FR2554223B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/082—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR8416437A 1983-10-28 1984-10-26 Jauge de hauteur a capacite et procede et appareil d'etalonnage de cette jauge Expired FR2554223B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/546,760 US4538069A (en) 1983-10-28 1983-10-28 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US06/589,902 US4539835A (en) 1983-10-28 1984-03-14 Calibration apparatus for capacitance height gauges

Publications (2)

Publication Number Publication Date
FR2554223A1 FR2554223A1 (fr) 1985-05-03
FR2554223B1 true FR2554223B1 (fr) 1987-05-22

Family

ID=27068348

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8416437A Expired FR2554223B1 (fr) 1983-10-28 1984-10-26 Jauge de hauteur a capacite et procede et appareil d'etalonnage de cette jauge

Country Status (5)

Country Link
US (1) US4539835A (fr)
AU (3) AU566214B2 (fr)
DE (1) DE3435339A1 (fr)
FR (1) FR2554223B1 (fr)
GB (3) GB2149119B (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5049878A (en) * 1981-05-13 1991-09-17 Drexelbrook Engineering Company Two-wire compensated level measuring instrument
US4851831A (en) * 1981-05-13 1989-07-25 Drexelbrook Engineering Co. Two-wire level measuring instrument
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
DE3608884A1 (de) * 1986-03-17 1987-09-24 Mitec Moderne Ind Gmbh Messanordnung
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US4841224A (en) * 1987-11-10 1989-06-20 Washington Technology Center Gap width probe and method
FR2640373B1 (fr) * 1988-12-09 1992-12-11 Onera (Off Nat Aerospatiale) Chaines de mesure dimensionnelle capacitive a sortie lineaire
GB9021447D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
JP3175261B2 (ja) * 1992-02-05 2001-06-11 株式会社日立製作所 電磁流量計
SI9600141B (sl) * 1996-04-30 2002-12-31 Fakulteta Za Elektroniko Integriran kapacitivni merilnik nanometrijskih razdalj
ATE461426T1 (de) * 2006-11-17 2010-04-15 Amo Automatisierung Messtechni Positionsmesseinrichtung
US8513959B2 (en) * 2009-12-31 2013-08-20 Mapper Lithography Ip B.V. Integrated sensor system
US20170266744A1 (en) * 2015-10-30 2017-09-21 Mitsubishi Electric Corporation Wire electric discharge machine, control method of control device of wire electric discharge machine, and positioning method
JP2019005323A (ja) * 2017-06-27 2019-01-17 ルネサスエレクトロニクス株式会社 身長測定装置、ヘルスケア機器および回転ゲート
US10871409B2 (en) * 2017-12-15 2020-12-22 G.E. Avio S.r.l. SMD-coil-based torque-sensor for tangential field measurement
FR3084473B1 (fr) * 2018-07-24 2021-06-18 Cgg Services Sas Procede et dispositif de surveillance du sous-sol terrestre sous une zone cible
US11493407B2 (en) 2018-09-28 2022-11-08 Ge Avio S.R.L. Torque measurement system
US10809048B2 (en) * 2019-01-08 2020-10-20 Formfactor Beaverton, Inc. Probe systems and methods for calibrating capacitive height sensing measurements

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1032215A (en) * 1962-10-08 1966-06-08 Ass Elect Ind Improvements relating to capacitive clearance measurements
US3409774A (en) * 1966-05-25 1968-11-05 United States Steel Corp Method of determining the thickness of a coating on a metal base and method of calibrating the thickness gauge
US3523735A (en) * 1966-10-07 1970-08-11 Gen Dynamics Corp Interferometer system for distance measurement
US3533286A (en) * 1969-01-28 1970-10-13 Trans Sonics Inc Tank quantity gage
US3706919A (en) * 1970-08-17 1972-12-19 Ade Corp Capacitive gauge
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3986109A (en) * 1975-01-29 1976-10-12 Ade Corporation Self-calibrating dimension gauge
GB1577135A (en) * 1977-03-08 1980-10-22 Rca Corp Capacitance distance sensor
US4190797A (en) * 1978-03-31 1980-02-26 Gould Inc. Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means
GB2034051A (en) * 1978-10-12 1980-05-29 Smiths Industries Ltd Fluid Gauging System
NL7905562A (nl) * 1979-07-17 1981-01-20 Heerens Willem Christiaan Capacitieve meter.
JPS5651826A (en) * 1979-10-05 1981-05-09 Hitachi Ltd Image drawing apparatus by electron beam
JPS5664434A (en) * 1979-10-31 1981-06-01 Hitachi Ltd Electron beam drawing apparatus
JPS56125831A (en) * 1980-03-07 1981-10-02 Hitachi Ltd Z-sensor in electron beam patterning device
GB2094004B (en) * 1980-08-23 1984-05-02 Smiths Industries Ltd Fluid-gauging systems
US4461569A (en) * 1982-01-07 1984-07-24 The Electron Machine Corporation Concentricity gage
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus

Also Published As

Publication number Publication date
AU584816B2 (en) 1989-06-01
GB2178171A (en) 1987-02-04
GB2149119B (en) 1987-07-15
GB8621083D0 (en) 1986-10-08
AU566214B2 (en) 1987-10-15
US4539835A (en) 1985-09-10
AU7736587A (en) 1987-12-03
FR2554223A1 (fr) 1985-05-03
GB8424163D0 (en) 1984-10-31
AU3378884A (en) 1985-05-02
AU7736687A (en) 1987-12-03
DE3435339A1 (de) 1985-05-23
GB2149119A (en) 1985-06-05
GB2178172B (en) 1987-07-15
GB8621084D0 (en) 1986-10-08
AU596208B2 (en) 1990-04-26
GB2178172A (en) 1987-02-04
GB2178171B (en) 1987-07-15

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Legal Events

Date Code Title Description
ST Notification of lapse