FR2553205B1 - Procede de correction de defauts de masques de photo-lithographie et masque obtenu par ce procede - Google Patents
Procede de correction de defauts de masques de photo-lithographie et masque obtenu par ce procedeInfo
- Publication number
- FR2553205B1 FR2553205B1 FR8316027A FR8316027A FR2553205B1 FR 2553205 B1 FR2553205 B1 FR 2553205B1 FR 8316027 A FR8316027 A FR 8316027A FR 8316027 A FR8316027 A FR 8316027A FR 2553205 B1 FR2553205 B1 FR 2553205B1
- Authority
- FR
- France
- Prior art keywords
- photo
- mask obtained
- correcting defects
- lithography masks
- lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/72—Repair or correction of mask defects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8316027A FR2553205B1 (fr) | 1983-10-07 | 1983-10-07 | Procede de correction de defauts de masques de photo-lithographie et masque obtenu par ce procede |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8316027A FR2553205B1 (fr) | 1983-10-07 | 1983-10-07 | Procede de correction de defauts de masques de photo-lithographie et masque obtenu par ce procede |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2553205A1 FR2553205A1 (fr) | 1985-04-12 |
FR2553205B1 true FR2553205B1 (fr) | 1985-12-27 |
Family
ID=9292943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8316027A Expired FR2553205B1 (fr) | 1983-10-07 | 1983-10-07 | Procede de correction de defauts de masques de photo-lithographie et masque obtenu par ce procede |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2553205B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4548883A (en) * | 1983-05-31 | 1985-10-22 | At&T Bell Laboratories | Correction of lithographic masks |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2946235C3 (de) * | 1979-11-16 | 1982-04-08 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verfahren zur Erzeugung einer Belichtungsmaske zur Herstellung von mattstreuenden Strukturen neben opaken und/oder transparenten Strukturen |
JPS56162750A (en) * | 1980-05-20 | 1981-12-14 | Nec Corp | Defect correcting method for photomask |
-
1983
- 1983-10-07 FR FR8316027A patent/FR2553205B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2553205A1 (fr) | 1985-04-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
CD | Change of name or company name |