FR2544344B1 - Tiroir pour creuset de depot multicouches, notamment sur substrat semi-conducteur - Google Patents

Tiroir pour creuset de depot multicouches, notamment sur substrat semi-conducteur

Info

Publication number
FR2544344B1
FR2544344B1 FR8218759A FR8218759A FR2544344B1 FR 2544344 B1 FR2544344 B1 FR 2544344B1 FR 8218759 A FR8218759 A FR 8218759A FR 8218759 A FR8218759 A FR 8218759A FR 2544344 B1 FR2544344 B1 FR 2544344B1
Authority
FR
France
Prior art keywords
drawer
semiconductor substrate
deposition crucible
multilayered
multilayered deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8218759A
Other languages
English (en)
Other versions
FR2544344A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Priority to FR8218759A priority Critical patent/FR2544344B1/fr
Publication of FR2544344A1 publication Critical patent/FR2544344A1/fr
Application granted granted Critical
Publication of FR2544344B1 publication Critical patent/FR2544344B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system
FR8218759A 1982-11-09 1982-11-09 Tiroir pour creuset de depot multicouches, notamment sur substrat semi-conducteur Expired FR2544344B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8218759A FR2544344B1 (fr) 1982-11-09 1982-11-09 Tiroir pour creuset de depot multicouches, notamment sur substrat semi-conducteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8218759A FR2544344B1 (fr) 1982-11-09 1982-11-09 Tiroir pour creuset de depot multicouches, notamment sur substrat semi-conducteur

Publications (2)

Publication Number Publication Date
FR2544344A1 FR2544344A1 (fr) 1984-10-19
FR2544344B1 true FR2544344B1 (fr) 1985-10-11

Family

ID=9279019

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8218759A Expired FR2544344B1 (fr) 1982-11-09 1982-11-09 Tiroir pour creuset de depot multicouches, notamment sur substrat semi-conducteur

Country Status (1)

Country Link
FR (1) FR2544344B1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE28140E (en) * 1971-11-29 1974-08-27 Bergh ctal
JPS57106599A (en) * 1980-12-18 1982-07-02 Sharp Corp Liquid phase growth device

Also Published As

Publication number Publication date
FR2544344A1 (fr) 1984-10-19

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Legal Events

Date Code Title Description
ST Notification of lapse