FR2540191B1 - Turbopompe moleculaire comportant un moteur a courant continu presentant une faible inductance et un dispositif de freinage et procede pour son fonctionnement - Google Patents

Turbopompe moleculaire comportant un moteur a courant continu presentant une faible inductance et un dispositif de freinage et procede pour son fonctionnement

Info

Publication number
FR2540191B1
FR2540191B1 FR8400299A FR8400299A FR2540191B1 FR 2540191 B1 FR2540191 B1 FR 2540191B1 FR 8400299 A FR8400299 A FR 8400299A FR 8400299 A FR8400299 A FR 8400299A FR 2540191 B1 FR2540191 B1 FR 2540191B1
Authority
FR
France
Prior art keywords
turboppume
molecular
direct current
braking device
current motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8400299A
Other languages
English (en)
Other versions
FR2540191A1 (fr
Inventor
Willi Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Original Assignee
PFEIFFER VAKUUMTECHNIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PFEIFFER VAKUUMTECHNIK filed Critical PFEIFFER VAKUUMTECHNIK
Publication of FR2540191A1 publication Critical patent/FR2540191A1/fr
Application granted granted Critical
Publication of FR2540191B1 publication Critical patent/FR2540191B1/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/106—Structural association with clutches, brakes, gears, pulleys or mechanical starters with dynamo-electric brakes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P3/00—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters
    • H02P3/06—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter
    • H02P3/18—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an ac motor
    • H02P3/22—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an ac motor by short-circuit or resistive braking
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Brushless Motors (AREA)
FR8400299A 1983-01-28 1984-01-10 Turbopompe moleculaire comportant un moteur a courant continu presentant une faible inductance et un dispositif de freinage et procede pour son fonctionnement Expired FR2540191B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833302839 DE3302839A1 (de) 1983-01-28 1983-01-28 Turbomolekularpumpe mit induktivitaetsarmem gleichstrommotor, bremseinrichtung und verfahren zum betrieb derselben

Publications (2)

Publication Number Publication Date
FR2540191A1 FR2540191A1 (fr) 1984-08-03
FR2540191B1 true FR2540191B1 (fr) 1986-05-02

Family

ID=6189439

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8400299A Expired FR2540191B1 (fr) 1983-01-28 1984-01-10 Turbopompe moleculaire comportant un moteur a courant continu presentant une faible inductance et un dispositif de freinage et procede pour son fonctionnement

Country Status (6)

Country Link
JP (1) JPS59144333A (fr)
CH (1) CH663066A5 (fr)
DE (1) DE3302839A1 (fr)
FR (1) FR2540191B1 (fr)
GB (1) GB2134326B (fr)
IT (1) IT1172962B (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3432946C2 (de) * 1984-09-07 1994-08-04 Pfeiffer Vakuumtechnik Kollektorloser Gleichstrommotor mit eisenloser Statorwicklung
JPS6248173U (fr) * 1985-09-13 1987-03-25
JPS62218692A (ja) * 1986-03-18 1987-09-26 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JPS63242153A (ja) * 1987-03-27 1988-10-07 Nippon Seiko Kk 磁気軸受モ−タ
DE3740295A1 (de) * 1987-11-27 1989-06-08 Asea Brown Boveri Axiales magnetlager
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
WO1991009230A1 (fr) * 1989-12-20 1991-06-27 Allied-Signal Inc. Turbopompe a vide a vitesse variable
DE4318214A1 (de) * 1993-06-01 1994-12-08 Leybold Ag Verfahren zum Betrieb einer Reibungsvakuumpumpe sowie für dieses Betriebsverfahren geeignete Reibungsvakuumpumpe
FR2747431B1 (fr) * 1996-04-15 1998-07-03 Soc D Mecanique Magnetique Pompe turbomoleculaire a paliers magnetiques actifs
DE19806077A1 (de) * 1997-11-27 1999-06-02 Itt Mfg Enterprises Inc Rotorlagerung für ein Motorpumpenaggregat
ITTO980453A1 (it) * 1998-05-27 1999-11-29 Varian Spa Pompa da vuoto compatta
DE102006041183A1 (de) * 2006-09-01 2008-03-06 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102007044690A1 (de) * 2007-09-19 2009-04-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
CN106704366B (zh) * 2016-12-08 2019-02-15 广东工业大学 一种基于自适应调整动平衡的电磁主轴

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2039428C3 (de) * 1970-08-07 1975-10-02 Standard Elektrik Lorenz Ag, 7000 Stuttgart Langsamlaufender Gleichstrommotor in Flachbauweise
FR2159753A6 (fr) * 1971-11-10 1973-06-22 Socrem
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
IT1034733B (it) * 1974-04-11 1979-10-10 Teldix Gmbh Macchina elettrica
DE2417818C2 (de) * 1974-04-11 1983-03-31 Teldix Gmbh, 6900 Heidelberg Elektrische Maschine
CH583856A5 (fr) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
LU71477A1 (fr) * 1974-12-13 1975-06-17
US4086503A (en) * 1976-06-21 1978-04-25 Westinghouse Electric Corporation Control circuit initiating conduction of an opto-isolator unit
JPS6127257Y2 (fr) * 1976-07-07 1986-08-14
FR2377549A1 (fr) * 1977-01-12 1978-08-11 Europ Propulsion Montage de rotor court de grand diametre
US4164691A (en) * 1977-03-03 1979-08-14 Victor Company Of Japan, Limited Multiphase brushless DC motor using two Hall-effect generators
DE2727534A1 (de) * 1977-06-18 1979-01-04 Papst Motoren Kg Steuerschaltung fuer einen elektronisch kommutierten gleichstrommotor
JPS5444707A (en) * 1977-09-14 1979-04-09 Sony Corp Dc brushless motor
JPS5565261A (en) * 1978-11-10 1980-05-16 Houtoku Kogyo Kk Preparation of carbon black utilizing waste tire
DE2935013A1 (de) * 1979-08-30 1981-04-02 Teldix Gmbh, 6900 Heidelberg Kollektorloser gleichstrommotor
US4365187A (en) * 1980-05-15 1982-12-21 Rotron Incorporated Brushless D.C. motor
DE8034883U1 (de) * 1980-12-31 1981-08-13 Papst-Motoren Kg, 7742 St Georgen Elektronisch kommutierter gleichstrommotor
DE3113532A1 (de) * 1981-04-01 1982-11-04 Jai-Chun Dipl.-Ing. 1000 Berlin Chang "elektrische maschine"

Also Published As

Publication number Publication date
IT1172962B (it) 1987-06-18
IT8419024A0 (it) 1984-01-05
DE3302839A1 (de) 1984-08-02
FR2540191A1 (fr) 1984-08-03
GB2134326A (en) 1984-08-08
JPS59144333A (ja) 1984-08-18
GB8401043D0 (en) 1984-02-15
CH663066A5 (de) 1987-11-13
GB2134326B (en) 1986-10-15

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Legal Events

Date Code Title Description
ST Notification of lapse