FR2515373B1 - - Google Patents

Info

Publication number
FR2515373B1
FR2515373B1 FR8216521A FR8216521A FR2515373B1 FR 2515373 B1 FR2515373 B1 FR 2515373B1 FR 8216521 A FR8216521 A FR 8216521A FR 8216521 A FR8216521 A FR 8216521A FR 2515373 B1 FR2515373 B1 FR 2515373B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8216521A
Other versions
FR2515373A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IDT Europe GmbH
Original Assignee
Zentrum Mikroelektronik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zentrum Mikroelektronik Dresden GmbH filed Critical Zentrum Mikroelektronik Dresden GmbH
Publication of FR2515373A1 publication Critical patent/FR2515373A1/fr
Application granted granted Critical
Publication of FR2515373B1 publication Critical patent/FR2515373B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR8216521A 1981-10-01 1982-10-01 Procede de fabrication d'un cache maintenu a distance non soutenu Granted FR2515373A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD81233773A DD206924A3 (de) 1981-10-01 1981-10-01 Verfahren zum herstellen einer freitragenden abstandsmaske

Publications (2)

Publication Number Publication Date
FR2515373A1 FR2515373A1 (fr) 1983-04-29
FR2515373B1 true FR2515373B1 (fr) 1985-04-12

Family

ID=5533888

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8216521A Granted FR2515373A1 (fr) 1981-10-01 1982-10-01 Procede de fabrication d'un cache maintenu a distance non soutenu

Country Status (8)

Country Link
US (1) US4497884A (fr)
JP (1) JPS5875837A (fr)
CS (1) CS245264B1 (fr)
DD (1) DD206924A3 (fr)
DE (1) DE3232174A1 (fr)
FR (1) FR2515373A1 (fr)
GB (1) GB2107618B (fr)
SU (1) SU1352445A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5310674A (en) * 1982-05-10 1994-05-10 Bar-Ilan University Apertured cell carrier
US5272081A (en) * 1982-05-10 1993-12-21 Bar-Ilan University System and methods for cell selection
US4772540A (en) * 1985-08-30 1988-09-20 Bar Ilan University Manufacture of microsieves and the resulting microsieves
ATA331285A (de) * 1985-11-13 1988-11-15 Ims Ionen Mikrofab Syst Verfahren zur herstellung einer transmissionsmaske
DE10137493A1 (de) * 2001-07-31 2003-04-10 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung einer selbsttragenden elektronenoptisch durchstrahlbaren Struktur und nach dem Verfahren hergestellte Struktur
FR2936361B1 (fr) * 2008-09-25 2011-04-01 Saint Gobain Procede de fabrication d'une grille submillimetrique electroconductrice, grille submillimetrique electroconductrice

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2047340A5 (fr) * 1969-05-05 1971-03-12 Gen Electric
DE2512086C3 (de) * 1975-03-19 1978-11-30 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung freitragender, dünner Metallstrukturen

Also Published As

Publication number Publication date
US4497884A (en) 1985-02-05
CS707682A1 (en) 1985-06-13
DE3232174A1 (de) 1983-04-21
GB2107618A (en) 1983-05-05
GB2107618B (en) 1985-07-10
SU1352445A1 (ru) 1987-11-15
JPS5875837A (ja) 1983-05-07
DD206924A3 (de) 1984-02-08
CS245264B1 (en) 1986-09-18
FR2515373A1 (fr) 1983-04-29

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Legal Events

Date Code Title Description
ST Notification of lapse