FR2490832A1 - Detecteur a emission secondaire destine a l'analyse d'echantillons irradies pour microscopes electroniques a balayage et microsondes - Google Patents

Detecteur a emission secondaire destine a l'analyse d'echantillons irradies pour microscopes electroniques a balayage et microsondes Download PDF

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Publication number
FR2490832A1
FR2490832A1 FR8116159A FR8116159A FR2490832A1 FR 2490832 A1 FR2490832 A1 FR 2490832A1 FR 8116159 A FR8116159 A FR 8116159A FR 8116159 A FR8116159 A FR 8116159A FR 2490832 A1 FR2490832 A1 FR 2490832A1
Authority
FR
France
Prior art keywords
electron
microscopes
scintillator
secondary emission
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8116159A
Other languages
English (en)
French (fr)
Other versions
FR2490832B3 (OSRAM
Inventor
Giancarlo Giacchetti
Jurgen Ransch
Clive Thomas Walker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of FR2490832A1 publication Critical patent/FR2490832A1/fr
Application granted granted Critical
Publication of FR2490832B3 publication Critical patent/FR2490832B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR8116159A 1980-08-25 1981-08-24 Detecteur a emission secondaire destine a l'analyse d'echantillons irradies pour microscopes electroniques a balayage et microsondes Granted FR2490832A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803032013 DE3032013A1 (de) 1980-08-25 1980-08-25 Sekundaerelektronendetektor zur analyse bestrahlter proben fuer elektronenrastermikroskope und mikrosonden

Publications (2)

Publication Number Publication Date
FR2490832A1 true FR2490832A1 (fr) 1982-03-26
FR2490832B3 FR2490832B3 (OSRAM) 1983-06-17

Family

ID=6110350

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8116159A Granted FR2490832A1 (fr) 1980-08-25 1981-08-24 Detecteur a emission secondaire destine a l'analyse d'echantillons irradies pour microscopes electroniques a balayage et microsondes

Country Status (5)

Country Link
US (1) US4405861A (OSRAM)
JP (1) JPS5790859A (OSRAM)
DE (1) DE3032013A1 (OSRAM)
FR (1) FR2490832A1 (OSRAM)
GB (1) GB2082832B (OSRAM)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3206309A1 (de) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb
AT392857B (de) * 1987-07-13 1991-06-25 Ims Ionen Mikrofab Syst Vorrichtung und verfahren zur inspektion einer maske
JPH06338281A (ja) * 1993-05-27 1994-12-06 Hitachi Ltd 走査電子顕微鏡
US8633439B2 (en) * 2011-07-01 2014-01-21 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope
RU2552596C2 (ru) * 2012-10-16 2015-06-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский авиационный институт (национальный исследовательский университет)" (МАИ) Датчик вторичной электронной эмиссии
GB2570730B (en) 2018-02-06 2022-01-05 Lightpoint Medical Ltd Tethered laparoscopic probe
US12106932B2 (en) * 2019-06-13 2024-10-01 Dectris Ag Electron detector

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3585384A (en) * 1969-11-19 1971-06-15 Centre Nat Rech Scient Ionic microanalyzers
DE2331091C3 (de) * 1973-06-19 1980-03-20 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung zur Bestimmung der Energie geladener Teilchen
US4358680A (en) * 1979-11-30 1982-11-09 Kratos Limited Charged particle spectrometers

Also Published As

Publication number Publication date
DE3032013A1 (de) 1982-04-08
FR2490832B3 (OSRAM) 1983-06-17
GB2082832A (en) 1982-03-10
GB2082832B (en) 1984-04-11
JPS5790859A (en) 1982-06-05
US4405861A (en) 1983-09-20

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