JPS5790859A - Scan type electron microscope and secondary electron detector for electron searching device - Google Patents

Scan type electron microscope and secondary electron detector for electron searching device

Info

Publication number
JPS5790859A
JPS5790859A JP56128855A JP12885581A JPS5790859A JP S5790859 A JPS5790859 A JP S5790859A JP 56128855 A JP56128855 A JP 56128855A JP 12885581 A JP12885581 A JP 12885581A JP S5790859 A JPS5790859 A JP S5790859A
Authority
JP
Japan
Prior art keywords
electron
scan type
searching device
detector
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56128855A
Other languages
English (en)
Japanese (ja)
Inventor
Jiyatsuchietsuchi Jiyankaruro
Raanshiyu Yurugen
Toomasu Uookaa Kuraibu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of JPS5790859A publication Critical patent/JPS5790859A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56128855A 1980-08-25 1981-08-19 Scan type electron microscope and secondary electron detector for electron searching device Pending JPS5790859A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803032013 DE3032013A1 (de) 1980-08-25 1980-08-25 Sekundaerelektronendetektor zur analyse bestrahlter proben fuer elektronenrastermikroskope und mikrosonden

Publications (1)

Publication Number Publication Date
JPS5790859A true JPS5790859A (en) 1982-06-05

Family

ID=6110350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56128855A Pending JPS5790859A (en) 1980-08-25 1981-08-19 Scan type electron microscope and secondary electron detector for electron searching device

Country Status (5)

Country Link
US (1) US4405861A (OSRAM)
JP (1) JPS5790859A (OSRAM)
DE (1) DE3032013A1 (OSRAM)
FR (1) FR2490832A1 (OSRAM)
GB (1) GB2082832B (OSRAM)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3206309A1 (de) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb
AT392857B (de) * 1987-07-13 1991-06-25 Ims Ionen Mikrofab Syst Vorrichtung und verfahren zur inspektion einer maske
JPH06338281A (ja) * 1993-05-27 1994-12-06 Hitachi Ltd 走査電子顕微鏡
US8633439B2 (en) * 2011-07-01 2014-01-21 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope
RU2552596C2 (ru) * 2012-10-16 2015-06-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский авиационный институт (национальный исследовательский университет)" (МАИ) Датчик вторичной электронной эмиссии
GB2570730B (en) 2018-02-06 2022-01-05 Lightpoint Medical Ltd Tethered laparoscopic probe
US12106932B2 (en) * 2019-06-13 2024-10-01 Dectris Ag Electron detector

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3585384A (en) * 1969-11-19 1971-06-15 Centre Nat Rech Scient Ionic microanalyzers
DE2331091C3 (de) * 1973-06-19 1980-03-20 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung zur Bestimmung der Energie geladener Teilchen
US4358680A (en) * 1979-11-30 1982-11-09 Kratos Limited Charged particle spectrometers

Also Published As

Publication number Publication date
DE3032013A1 (de) 1982-04-08
FR2490832B3 (OSRAM) 1983-06-17
GB2082832A (en) 1982-03-10
GB2082832B (en) 1984-04-11
FR2490832A1 (fr) 1982-03-26
US4405861A (en) 1983-09-20

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