FR2490015A1 - Procede de realisation de couches minces photoresistantes - Google Patents
Procede de realisation de couches minces photoresistantes Download PDFInfo
- Publication number
- FR2490015A1 FR2490015A1 FR8019507A FR8019507A FR2490015A1 FR 2490015 A1 FR2490015 A1 FR 2490015A1 FR 8019507 A FR8019507 A FR 8019507A FR 8019507 A FR8019507 A FR 8019507A FR 2490015 A1 FR2490015 A1 FR 2490015A1
- Authority
- FR
- France
- Prior art keywords
- photoresistant
- thin
- copper
- layers
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008021 deposition Effects 0.000 title claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 5
- 229910052802 copper Inorganic materials 0.000 title claims description 5
- 239000010949 copper Substances 0.000 title claims description 5
- 239000012190 activator Substances 0.000 title 1
- JLATXDOZXBEBJX-UHFFFAOYSA-N cadmium(2+);selenium(2-);sulfide Chemical compound [S-2].[Se-2].[Cd+2].[Cd+2] JLATXDOZXBEBJX-UHFFFAOYSA-N 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 23
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 7
- 238000000137 annealing Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000011065 in-situ storage Methods 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 abstract description 3
- 238000005286 illumination Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 3
- 229910052793 cadmium Inorganic materials 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- AQCDIIAORKRFCD-UHFFFAOYSA-N cadmium selenide Chemical compound [Cd]=[Se] AQCDIIAORKRFCD-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/125—The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
- H10F71/1253—The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe comprising at least three elements, e.g. HgCdTe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/0256—Selenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8019507A FR2490015A1 (fr) | 1980-09-10 | 1980-09-10 | Procede de realisation de couches minces photoresistantes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8019507A FR2490015A1 (fr) | 1980-09-10 | 1980-09-10 | Procede de realisation de couches minces photoresistantes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2490015A1 true FR2490015A1 (fr) | 1982-03-12 |
| FR2490015B1 FR2490015B1 (enExample) | 1984-02-10 |
Family
ID=9245801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8019507A Granted FR2490015A1 (fr) | 1980-09-10 | 1980-09-10 | Procede de realisation de couches minces photoresistantes |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2490015A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2557730A1 (fr) * | 1983-12-29 | 1985-07-05 | Menn Roger | Couche photoresistante a variation de composition atomique et son procede de fabrication, cellule photoresistante munie d'une telle couche et d'un filtre de longueur d'onde et arrangement de telles cellules |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2420270A1 (fr) * | 1978-03-17 | 1979-10-12 | Abdalla Mohamed | Procede pour la realisation de couches minces electroluminescentes et appareillage pour la mise en oeuvre de ce procede |
-
1980
- 1980-09-10 FR FR8019507A patent/FR2490015A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2420270A1 (fr) * | 1978-03-17 | 1979-10-12 | Abdalla Mohamed | Procede pour la realisation de couches minces electroluminescentes et appareillage pour la mise en oeuvre de ce procede |
Non-Patent Citations (1)
| Title |
|---|
| EXBK/79 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2557730A1 (fr) * | 1983-12-29 | 1985-07-05 | Menn Roger | Couche photoresistante a variation de composition atomique et son procede de fabrication, cellule photoresistante munie d'une telle couche et d'un filtre de longueur d'onde et arrangement de telles cellules |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2490015B1 (enExample) | 1984-02-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |