FR2487124B1 - Procede de fabrication de plusieurs composants sur un seul corps semi-conducteur et objets manufactures formes par sa mise en oeuvre - Google Patents

Procede de fabrication de plusieurs composants sur un seul corps semi-conducteur et objets manufactures formes par sa mise en oeuvre

Info

Publication number
FR2487124B1
FR2487124B1 FR8114108A FR8114108A FR2487124B1 FR 2487124 B1 FR2487124 B1 FR 2487124B1 FR 8114108 A FR8114108 A FR 8114108A FR 8114108 A FR8114108 A FR 8114108A FR 2487124 B1 FR2487124 B1 FR 2487124B1
Authority
FR
France
Prior art keywords
semiconductor body
multiple components
single semiconductor
objects formed
manufacturing multiple
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8114108A
Other languages
English (en)
Other versions
FR2487124A1 (fr
Inventor
Dale Thomas Trenary
Allen Harland Frederick
Robert Michael Whelton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMC Corp
Original Assignee
Data General Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Data General Corp filed Critical Data General Corp
Publication of FR2487124A1 publication Critical patent/FR2487124A1/fr
Application granted granted Critical
Publication of FR2487124B1 publication Critical patent/FR2487124B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
FR8114108A 1980-07-21 1981-07-20 Procede de fabrication de plusieurs composants sur un seul corps semi-conducteur et objets manufactures formes par sa mise en oeuvre Expired FR2487124B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17090780A 1980-07-21 1980-07-21

Publications (2)

Publication Number Publication Date
FR2487124A1 FR2487124A1 (fr) 1982-01-22
FR2487124B1 true FR2487124B1 (fr) 1986-01-10

Family

ID=22621766

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8114108A Expired FR2487124B1 (fr) 1980-07-21 1981-07-20 Procede de fabrication de plusieurs composants sur un seul corps semi-conducteur et objets manufactures formes par sa mise en oeuvre

Country Status (4)

Country Link
JP (1) JPS5787152A (fr)
DE (1) DE3128621A1 (fr)
FR (1) FR2487124B1 (fr)
GB (1) GB2081506B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943545A (ja) * 1982-09-06 1984-03-10 Hitachi Ltd 半導体集積回路装置
JPH073858B2 (ja) * 1984-04-11 1995-01-18 株式会社日立製作所 半導体装置の製造方法
US4541168A (en) * 1984-10-29 1985-09-17 International Business Machines Corporation Method for making metal contact studs between first level metal and regions of a semiconductor device compatible with polyimide-filled deep trench isolation schemes
JPH10256394A (ja) 1997-03-12 1998-09-25 Internatl Business Mach Corp <Ibm> 半導体構造体およびデバイス
WO2001048814A1 (fr) * 1999-12-24 2001-07-05 Koninklijke Philips Electronics N.V. Procede de fabrication d'un dispositif a semi-conducteurs comprenant des elements de semi-conducteur formes sur une couche superieure d'une tranche de silicium situee sur une couche d'isolation enterree
US8809942B2 (en) * 2011-09-21 2014-08-19 Kabushiki Kaisha Toshiba Semiconductor device having trench structure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139281A (en) * 1975-05-28 1976-12-01 Hitachi Ltd Semi-conductor device
JPS5423388A (en) * 1977-07-22 1979-02-21 Hitachi Ltd Semiconductor integrated-circuit device and its manufacture

Also Published As

Publication number Publication date
GB2081506A (en) 1982-02-17
FR2487124A1 (fr) 1982-01-22
JPS5787152A (en) 1982-05-31
DE3128621A1 (de) 1982-05-06
GB2081506B (en) 1984-06-06

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Legal Events

Date Code Title Description
ST Notification of lapse