FR2484468B1 - - Google Patents

Info

Publication number
FR2484468B1
FR2484468B1 FR8111536A FR8111536A FR2484468B1 FR 2484468 B1 FR2484468 B1 FR 2484468B1 FR 8111536 A FR8111536 A FR 8111536A FR 8111536 A FR8111536 A FR 8111536A FR 2484468 B1 FR2484468 B1 FR 2484468B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8111536A
Other versions
FR2484468A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2484468A1 publication Critical patent/FR2484468A1/fr
Application granted granted Critical
Publication of FR2484468B1 publication Critical patent/FR2484468B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR8111536A 1980-06-14 1981-06-11 Dispositif de tirage d'un monocristal hors du creuset, permettant une variation de vitesse sans a-coups sur une tres large plage de vitesse Granted FR2484468A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3022412 1980-06-14

Publications (2)

Publication Number Publication Date
FR2484468A1 FR2484468A1 (fr) 1981-12-18
FR2484468B1 true FR2484468B1 (fr) 1984-09-14

Family

ID=6104662

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8111536A Granted FR2484468A1 (fr) 1980-06-14 1981-06-11 Dispositif de tirage d'un monocristal hors du creuset, permettant une variation de vitesse sans a-coups sur une tres large plage de vitesse

Country Status (7)

Country Link
US (1) US4367199A (fr)
JP (1) JPS5727997A (fr)
BE (1) BE889111A (fr)
FR (1) FR2484468A1 (fr)
GB (1) GB2078188B (fr)
IT (1) IT1136727B (fr)
NL (1) NL8102566A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3414290A1 (de) * 1984-04-14 1985-10-24 Leybold-Heraeus GmbH, 5000 Köln Kristallhalter
US4663128A (en) * 1985-03-06 1987-05-05 Ferrofluidics Corporation Pulling head for a crystal growing furnace
EP0437775B1 (fr) * 1989-12-22 1995-03-08 Shin-Etsu Handotai Company Limited Appareillage pour la production de monocristaux selon le procédé Czochralski
DE4329283C2 (de) * 1993-08-31 1997-02-13 Leybold Ag Drehkopf für Kristallziehanlagen für die Durchführung des Czochralski-Prozesses
US5766348A (en) * 1993-08-31 1998-06-16 Leybold Aktiengesellschaft Rotating head for crystal pulling systems for carrying out the czochralski process
DE4332323C2 (de) * 1993-09-23 1995-11-30 Leybold Ag Getriebemotor mit einem eine Hohlwelle aufweisenden Elektromotor
JP3606623B2 (ja) * 1995-01-10 2005-01-05 コマツ電子金属株式会社 半導体単結晶製造装置
US5879452A (en) * 1996-01-25 1999-03-09 Ferrofluidics Corporation Czochralski crystal growth system with an independently supported pull head
DE19628316B4 (de) * 1996-07-13 2006-07-13 Crystal Growing Systems Gmbh Vorrichtung zum Heben, Schwenken und Drehen des Deckels eines Vakuumkessels einer Kristallziehanlage
JP3438492B2 (ja) * 1996-10-18 2003-08-18 信越半導体株式会社 単結晶の引上げ方法
JPH10279386A (ja) * 1997-03-31 1998-10-20 Super Silicon Kenkyusho:Kk 単結晶引上げ装置及び単結晶支持機構並びに単結晶引上げ方法
US5935328A (en) * 1997-11-25 1999-08-10 Memc Electronic Materials, Inc. Apparatus for use in crystal pulling
DE102004011901A1 (de) * 2004-03-11 2005-12-01 Crystal Growing Systems Gmbh Seildrehkopf für eine Kristallziehanlage
US11255024B2 (en) 2019-06-18 2022-02-22 Linton Crystal Technologies Corp. Seed lifting and rotating system for use in crystal growth
US11891721B2 (en) 2020-12-09 2024-02-06 Linton Kayex Technology Co., Ltd Spool-balanced seed lift

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2935385A (en) * 1955-03-25 1960-05-03 Texas Instruments Inc Apparatus for manufacturing semiconductor materials
NL128651C (fr) * 1966-01-26
FR1568023A (fr) * 1968-01-10 1969-05-23
US3639718A (en) * 1970-06-15 1972-02-01 Little Inc A Pressure- and temperature-controlled crystal growing apparatus
US3865554A (en) * 1971-09-23 1975-02-11 Little Inc A Pressure-and temperature-controlled apparatus for large-scale production of crystals by the czochralski technique

Also Published As

Publication number Publication date
JPH0157080B2 (fr) 1989-12-04
BE889111A (fr) 1981-10-01
NL8102566A (nl) 1982-01-04
IT1136727B (it) 1986-09-03
GB2078188B (en) 1983-06-02
GB2078188A (en) 1982-01-06
IT8122269A0 (it) 1981-06-11
JPS5727997A (en) 1982-02-15
FR2484468A1 (fr) 1981-12-18
US4367199A (en) 1983-01-04

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Legal Events

Date Code Title Description
ST Notification of lapse