FR2483377A1 - Procede et dispositif pour le transport automatique et pour la mise en position d'objets en forme de disque - Google Patents

Procede et dispositif pour le transport automatique et pour la mise en position d'objets en forme de disque Download PDF

Info

Publication number
FR2483377A1
FR2483377A1 FR8110821A FR8110821A FR2483377A1 FR 2483377 A1 FR2483377 A1 FR 2483377A1 FR 8110821 A FR8110821 A FR 8110821A FR 8110821 A FR8110821 A FR 8110821A FR 2483377 A1 FR2483377 A1 FR 2483377A1
Authority
FR
France
Prior art keywords
nozzles
transport
vacuum
positioning
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8110821A
Other languages
English (en)
French (fr)
Other versions
FR2483377B1 (enrdf_load_stackoverflow
Inventor
Erich Adler
Eberhard Weiland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2483377A1 publication Critical patent/FR2483377A1/fr
Application granted granted Critical
Publication of FR2483377B1 publication Critical patent/FR2483377B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR8110821A 1980-06-02 1981-06-01 Procede et dispositif pour le transport automatique et pour la mise en position d'objets en forme de disque Granted FR2483377A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22150480A DD151387A1 (de) 1980-06-02 1980-06-02 Verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte

Publications (2)

Publication Number Publication Date
FR2483377A1 true FR2483377A1 (fr) 1981-12-04
FR2483377B1 FR2483377B1 (enrdf_load_stackoverflow) 1984-12-14

Family

ID=5524464

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8110821A Granted FR2483377A1 (fr) 1980-06-02 1981-06-01 Procede et dispositif pour le transport automatique et pour la mise en position d'objets en forme de disque

Country Status (3)

Country Link
DD (1) DD151387A1 (enrdf_load_stackoverflow)
DE (1) DE3120696A1 (enrdf_load_stackoverflow)
FR (1) FR2483377A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0305260A1 (fr) * 1987-08-11 1989-03-01 Commissariat à l'Energie Atomique Transporteur de tranches empilables dans des cassettes
US5299890A (en) * 1990-05-11 1994-04-05 G. D Societa' Per Azioni Unit for supplying products to a manufacturing machine

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
KR960032667A (ko) * 1995-02-28 1996-09-17 김광호 리드프레임의 이송방법
DE102021117430A1 (de) 2021-07-06 2023-01-12 Homag Gmbh Vorrichtung und Verfahren zur Bewegung von Werkstücken

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3717381A (en) * 1969-07-25 1973-02-20 Texas Instruments Inc Transporting and positioning system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3797889A (en) 1971-12-30 1974-03-19 Texas Instruments Inc Workpiece alignment system
US3902615A (en) 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system
US3865254A (en) 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument
US3890508A (en) 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system
DD123848A1 (enrdf_load_stackoverflow) 1976-01-19 1977-01-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3717381A (en) * 1969-07-25 1973-02-20 Texas Instruments Inc Transporting and positioning system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0305260A1 (fr) * 1987-08-11 1989-03-01 Commissariat à l'Energie Atomique Transporteur de tranches empilables dans des cassettes
FR2620113A1 (fr) * 1987-08-11 1989-03-10 Commissariat Energie Atomique Transporteur de tranches empilables dans des cassettes
US5299890A (en) * 1990-05-11 1994-04-05 G. D Societa' Per Azioni Unit for supplying products to a manufacturing machine

Also Published As

Publication number Publication date
FR2483377B1 (enrdf_load_stackoverflow) 1984-12-14
DD151387A1 (de) 1981-10-14
DE3120696A1 (de) 1982-03-18

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Legal Events

Date Code Title Description
ST Notification of lapse