DD123848A1 - - Google Patents

Info

Publication number
DD123848A1
DD123848A1 DD19086176A DD19086176A DD123848A1 DD 123848 A1 DD123848 A1 DD 123848A1 DD 19086176 A DD19086176 A DD 19086176A DD 19086176 A DD19086176 A DD 19086176A DD 123848 A1 DD123848 A1 DD 123848A1
Authority
DD
German Democratic Republic
Application number
DD19086176A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD19086176A priority Critical patent/DD123848A1/xx
Priority to CS6677A priority patent/CS211450B1/cs
Priority to SU772439404A priority patent/SU750614A1/ru
Priority to DE19772701106 priority patent/DE2701106A1/de
Priority to GB161577A priority patent/GB1536978A/en
Priority to FR7701348A priority patent/FR2338509A1/fr
Publication of DD123848A1 publication Critical patent/DD123848A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DD19086176A 1976-01-19 1976-01-19 DD123848A1 (enrdf_load_stackoverflow)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DD19086176A DD123848A1 (enrdf_load_stackoverflow) 1976-01-19 1976-01-19
CS6677A CS211450B1 (en) 1976-01-19 1977-01-04 Method of planparalell evening the semiconductor plate in respect of the exposure mask and device for executing the same
SU772439404A SU750614A1 (ru) 1976-01-19 1977-01-12 Способ подготовки к контактному экспонированию и устройство дл его осуществлени
DE19772701106 DE2701106A1 (de) 1976-01-19 1977-01-12 Verfahren und vorrichtung zum planparallelen ausrichten einer halbleiterscheibe zu einer fotoschablone
GB161577A GB1536978A (en) 1976-01-19 1977-01-14 Positioning a semiconductor slice
FR7701348A FR2338509A1 (fr) 1976-01-19 1977-01-18 Procede et appareillage pour le positionnement a plans paralleles d'une plaque de semi-conducteur pour un cliche photographique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19086176A DD123848A1 (enrdf_load_stackoverflow) 1976-01-19 1976-01-19

Publications (1)

Publication Number Publication Date
DD123848A1 true DD123848A1 (enrdf_load_stackoverflow) 1977-01-19

Family

ID=5503310

Family Applications (1)

Application Number Title Priority Date Filing Date
DD19086176A DD123848A1 (enrdf_load_stackoverflow) 1976-01-19 1976-01-19

Country Status (6)

Country Link
CS (1) CS211450B1 (enrdf_load_stackoverflow)
DD (1) DD123848A1 (enrdf_load_stackoverflow)
DE (1) DE2701106A1 (enrdf_load_stackoverflow)
FR (1) FR2338509A1 (enrdf_load_stackoverflow)
GB (1) GB1536978A (enrdf_load_stackoverflow)
SU (1) SU750614A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3120696A1 (de) 1980-06-02 1982-03-18 Jenoptik Jena Gmbh, Ddr 6900 Jena "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte"

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109794427B (zh) * 2019-02-03 2024-06-04 东莞市粤蒙电子科技有限公司 一种分选设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3120696A1 (de) 1980-06-02 1982-03-18 Jenoptik Jena Gmbh, Ddr 6900 Jena "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte"

Also Published As

Publication number Publication date
GB1536978A (en) 1978-12-29
FR2338509B3 (enrdf_load_stackoverflow) 1980-12-26
FR2338509A1 (fr) 1977-08-12
CS211450B1 (en) 1982-02-26
SU750614A1 (ru) 1980-07-23
DE2701106A1 (de) 1977-07-28

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