FR2463173A1 - Suspension de polissage de precision et son procede de preparation - Google Patents
Suspension de polissage de precision et son procede de preparation Download PDFInfo
- Publication number
- FR2463173A1 FR2463173A1 FR8017454A FR8017454A FR2463173A1 FR 2463173 A1 FR2463173 A1 FR 2463173A1 FR 8017454 A FR8017454 A FR 8017454A FR 8017454 A FR8017454 A FR 8017454A FR 2463173 A1 FR2463173 A1 FR 2463173A1
- Authority
- FR
- France
- Prior art keywords
- polishing
- glycerol
- mixture
- weight
- suspension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 90
- 239000000725 suspension Substances 0.000 title claims description 65
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims abstract description 185
- 239000000203 mixture Substances 0.000 claims abstract description 100
- 239000002245 particle Substances 0.000 claims abstract description 35
- 239000000843 powder Substances 0.000 claims abstract description 23
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 231100000252 nontoxic Toxicity 0.000 claims abstract description 14
- 230000003000 nontoxic effect Effects 0.000 claims abstract description 14
- 238000002360 preparation method Methods 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 47
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 34
- 229920000642 polymer Polymers 0.000 claims description 19
- 150000001412 amines Chemical class 0.000 claims description 13
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 238000002156 mixing Methods 0.000 claims description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical group OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 11
- 229940096529 carboxypolymethylene Drugs 0.000 claims description 11
- 230000003472 neutralizing effect Effects 0.000 claims description 11
- 239000002002 slurry Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical group OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 239000002562 thickening agent Substances 0.000 claims description 5
- -1 polymethylene Polymers 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 229920002959 polymer blend Polymers 0.000 claims 5
- 150000004676 glycans Chemical class 0.000 claims 3
- 229910001853 inorganic hydroxide Inorganic materials 0.000 claims 3
- 229920001282 polysaccharide Polymers 0.000 claims 3
- 239000005017 polysaccharide Substances 0.000 claims 3
- 235000002020 sage Nutrition 0.000 claims 1
- 229960004418 trolamine Drugs 0.000 claims 1
- 150000002314 glycerols Chemical class 0.000 abstract 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 48
- 229920002125 Sokalan® Polymers 0.000 description 23
- 239000000499 gel Substances 0.000 description 19
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 18
- 239000000243 solution Substances 0.000 description 10
- JVTIXNMXDLQEJE-UHFFFAOYSA-N 2-decanoyloxypropyl decanoate 2-octanoyloxypropyl octanoate Chemical compound C(CCCCCCC)(=O)OCC(C)OC(CCCCCCC)=O.C(=O)(CCCCCCCCC)OCC(C)OC(=O)CCCCCCCCC JVTIXNMXDLQEJE-UHFFFAOYSA-N 0.000 description 8
- 239000003082 abrasive agent Substances 0.000 description 5
- 235000010210 aluminium Nutrition 0.000 description 5
- 239000000872 buffer Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 238000007792 addition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000006386 neutralization reaction Methods 0.000 description 4
- 230000008719 thickening Effects 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 239000012153 distilled water Substances 0.000 description 3
- 150000002334 glycols Chemical class 0.000 description 3
- 230000009931 harmful effect Effects 0.000 description 3
- 150000007529 inorganic bases Chemical class 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 239000000306 component Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 2
- 229940043276 diisopropanolamine Drugs 0.000 description 2
- 239000010437 gem Substances 0.000 description 2
- 239000006194 liquid suspension Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000007530 organic bases Chemical class 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 241000237858 Gastropoda Species 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 229920000715 Mucilage Polymers 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 229940043279 diisopropylamine Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- CMDGQTVYVAKDNA-UHFFFAOYSA-N propane-1,2,3-triol;hydrate Chemical compound O.OCC(O)CO CMDGQTVYVAKDNA-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000007966 viscous suspension Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/065,005 US4242842A (en) | 1979-08-08 | 1979-08-08 | Precision polishing suspension and method for making same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2463173A1 true FR2463173A1 (fr) | 1981-02-20 |
| FR2463173B1 FR2463173B1 (https=) | 1985-05-10 |
Family
ID=22059707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8017454A Granted FR2463173A1 (fr) | 1979-08-08 | 1980-08-07 | Suspension de polissage de precision et son procede de preparation |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4242842A (https=) |
| JP (1) | JPS5626971A (https=) |
| DE (1) | DE3012332C2 (https=) |
| FR (1) | FR2463173A1 (https=) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4358295A (en) * | 1980-03-27 | 1982-11-09 | Matsushita Electric Industrial Co., Ltd. | Polishing method |
| US4670060A (en) * | 1981-04-20 | 1987-06-02 | Alcon Laboratories, Inc. | Cleaning agent for optical surfaces |
| US5037484A (en) * | 1981-04-20 | 1991-08-06 | Alcon Laboratories, Inc. | Cleaning agent for optical surfaces |
| US4792414A (en) * | 1981-04-20 | 1988-12-20 | Alcon Laboratories, Inc. | Cleaning agent for optical surfaces |
| US4493783A (en) * | 1981-04-20 | 1985-01-15 | Alcon Laboratories, Inc. | Cleaning agent for optical surfaces |
| JPS5831241U (ja) * | 1981-08-19 | 1983-03-01 | 名古屋エラスチツク製砥株式会社 | 研削砥石用の複合砥粒 |
| DE3314789A1 (de) * | 1983-04-23 | 1984-10-25 | Basf Ag, 6700 Ludwigshafen | Schleif-, laepp- und polierpasten |
| AT380897B (de) * | 1984-12-10 | 1986-07-25 | Koller Anton | Mischung zur pflege und reinigung von kontaktlinsen |
| US4775393A (en) * | 1985-04-11 | 1988-10-04 | The Standard Oil Company | Autogenous attrition grinding |
| US4613345A (en) * | 1985-08-12 | 1986-09-23 | International Business Machines Corporation | Fixed abrasive polishing media |
| US4932166A (en) * | 1986-05-30 | 1990-06-12 | The Carborundum Company | Inert autogenous attrition grinding |
| US5057152A (en) * | 1987-06-24 | 1991-10-15 | Uop | Surface cleaner/polish compositions and a process for the preparation thereof |
| US5149338A (en) * | 1991-07-22 | 1992-09-22 | Fulton Kenneth W | Superpolishing agent, process for polishing hard ceramic materials, and polished hard ceramics |
| US5266088A (en) * | 1992-09-23 | 1993-11-30 | Nicsand | Water-based polish |
| TW343961B (en) * | 1994-06-17 | 1998-11-01 | Nissan Chemical Ind Ltd | Aqueous zirconia sol and method of preparing same |
| US5855633A (en) * | 1997-06-06 | 1999-01-05 | Lockheed Martin Energy Systems, Inc. | Lapping slurry |
| US6149830A (en) * | 1998-09-17 | 2000-11-21 | Siemens Aktiengesellschaft | Composition and method for reducing dishing in patterned metal during CMP process |
| US6649682B1 (en) | 1998-12-22 | 2003-11-18 | Conforma Clad, Inc | Process for making wear-resistant coatings |
| US7262240B1 (en) | 1998-12-22 | 2007-08-28 | Kennametal Inc. | Process for making wear-resistant coatings |
| US20050159088A1 (en) * | 2004-01-15 | 2005-07-21 | Ecolab Inc. | Method for polishing hard surfaces |
| RU2287004C2 (ru) * | 2005-01-20 | 2006-11-10 | Учреждение образования "Гомельский государственный университет им. Франциска Скорины" | Стабилизирующая добавка к абразивной суспензии |
| EP2075106B1 (en) * | 2006-10-20 | 2013-05-01 | Mitsubishi Electric Corporation | Slurry for silicon ingot cutting and method of cutting silicon ingot therewith |
| US20100233640A1 (en) * | 2008-02-07 | 2010-09-16 | Radek Masin | Glycerin burning system |
| US20090202953A1 (en) * | 2008-02-07 | 2009-08-13 | Radek Masin | Glycerin burning system |
| US8281835B2 (en) * | 2008-03-24 | 2012-10-09 | Dynamic Runflats, Inc. | Run-flat support assembly for a pneumatic tired wheel and method for use of same |
| US8808870B2 (en) | 2011-11-28 | 2014-08-19 | Kennametal Inc. | Functionally graded coating |
| US9862029B2 (en) | 2013-03-15 | 2018-01-09 | Kennametal Inc | Methods of making metal matrix composite and alloy articles |
| US9346101B2 (en) | 2013-03-15 | 2016-05-24 | Kennametal Inc. | Cladded articles and methods of making the same |
| US10221702B2 (en) | 2015-02-23 | 2019-03-05 | Kennametal Inc. | Imparting high-temperature wear resistance to turbine blade Z-notches |
| US11117208B2 (en) | 2017-03-21 | 2021-09-14 | Kennametal Inc. | Imparting wear resistance to superalloy articles |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2176798A1 (https=) * | 1972-03-17 | 1973-11-02 | Union Carbide Corp |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4089943A (en) * | 1974-02-08 | 1978-05-16 | Colgate-Palmolive Company | Toothpaste formulations |
| CA1063357A (en) * | 1974-05-21 | 1979-10-02 | James J. Benedict | Abrasive composition |
| CA1074575A (en) * | 1974-11-08 | 1980-04-01 | Union Carbide Corporation | Abrasive polishing suspensions and method for making same |
| US4038048A (en) * | 1975-02-14 | 1977-07-26 | Thrower Jr Herbert T | Lapping composition containing a carboxy vinyl polymer |
| US4138228A (en) * | 1977-02-02 | 1979-02-06 | Ralf Hoehn | Abrasive of a microporous polymer matrix with inorganic particles thereon |
-
1979
- 1979-08-08 US US06/065,005 patent/US4242842A/en not_active Expired - Lifetime
-
1980
- 1980-02-20 JP JP2037980A patent/JPS5626971A/ja active Granted
- 1980-03-29 DE DE3012332A patent/DE3012332C2/de not_active Expired
- 1980-08-07 FR FR8017454A patent/FR2463173A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2176798A1 (https=) * | 1972-03-17 | 1973-11-02 | Union Carbide Corp |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3012332C2 (de) | 1983-05-05 |
| DE3012332A1 (de) | 1981-02-26 |
| JPS5757511B2 (https=) | 1982-12-04 |
| FR2463173B1 (https=) | 1985-05-10 |
| US4242842A (en) | 1981-01-06 |
| JPS5626971A (en) | 1981-03-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |