FR2454602A1 - Procede et appareil de detection de la deformation d'une surface par rapport a la planeite - Google Patents

Procede et appareil de detection de la deformation d'une surface par rapport a la planeite

Info

Publication number
FR2454602A1
FR2454602A1 FR8013051A FR8013051A FR2454602A1 FR 2454602 A1 FR2454602 A1 FR 2454602A1 FR 8013051 A FR8013051 A FR 8013051A FR 8013051 A FR8013051 A FR 8013051A FR 2454602 A1 FR2454602 A1 FR 2454602A1
Authority
FR
France
Prior art keywords
deformation
relation
planeity
amplitude
planet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8013051A
Other languages
English (en)
French (fr)
Other versions
FR2454602B1 (cs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
National Research Development Corp UK
Original Assignee
NAT RES DEV
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAT RES DEV, National Research Development Corp UK filed Critical NAT RES DEV
Publication of FR2454602A1 publication Critical patent/FR2454602A1/fr
Application granted granted Critical
Publication of FR2454602B1 publication Critical patent/FR2454602B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
FR8013051A 1977-11-25 1980-06-10 Procede et appareil de detection de la deformation d'une surface par rapport a la planeite Granted FR2454602A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4917077 1977-11-25

Publications (2)

Publication Number Publication Date
FR2454602A1 true FR2454602A1 (fr) 1980-11-14
FR2454602B1 FR2454602B1 (cs) 1983-01-28

Family

ID=10451426

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8013051A Granted FR2454602A1 (fr) 1977-11-25 1980-06-10 Procede et appareil de detection de la deformation d'une surface par rapport a la planeite

Country Status (6)

Country Link
EP (1) EP0006945A1 (cs)
JP (1) JPS54500096A (cs)
CH (1) CH626992A5 (cs)
FR (1) FR2454602A1 (cs)
GB (1) GB2008791B (cs)
WO (1) WO1979000320A1 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504256A1 (fr) * 1981-04-16 1982-10-22 Euromask Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (nl) * 1980-09-22 1982-04-16 Philips Nv Interferometer.
US4474466A (en) * 1981-03-11 1984-10-02 National Research Development Corporation Measurement of deformation
GB2242518B (en) * 1990-03-12 1994-03-30 Univ Southampton Strain gauge
NL1011035C2 (nl) * 1999-01-15 2000-07-18 Kema Nv Werkwijze en inrichting voor het meten van in-vlak verplaatsingen.
CN103278268A (zh) * 2013-05-31 2013-09-04 哈尔滨工业大学 基于散斑干涉原理的应力测试装置及应力集中测试方法
US9459093B2 (en) * 2014-02-20 2016-10-04 Kabushiki Kaisha Toshiba Deflection measuring device and deflection measuring method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2127483A1 (de) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504256A1 (fr) * 1981-04-16 1982-10-22 Euromask Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche
EP0065429A1 (fr) * 1981-04-16 1982-11-24 Euromask Procédé et dispositif de mesure optique de déplacement et application aux photorépéteurs sur tranche

Also Published As

Publication number Publication date
CH626992A5 (cs) 1981-12-15
JPS54500096A (cs) 1979-12-20
WO1979000320A1 (en) 1979-06-14
GB2008791A (en) 1979-06-06
EP0006945A1 (en) 1980-01-23
GB2008791B (en) 1982-04-28
FR2454602B1 (cs) 1983-01-28

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Legal Events

Date Code Title Description
ST Notification of lapse