FR2454602A1 - METHOD AND APPARATUS FOR DETECTING THE DEFORMATION OF A SURFACE IN RELATION TO THE PLANET - Google Patents

METHOD AND APPARATUS FOR DETECTING THE DEFORMATION OF A SURFACE IN RELATION TO THE PLANET

Info

Publication number
FR2454602A1
FR2454602A1 FR8013051A FR8013051A FR2454602A1 FR 2454602 A1 FR2454602 A1 FR 2454602A1 FR 8013051 A FR8013051 A FR 8013051A FR 8013051 A FR8013051 A FR 8013051A FR 2454602 A1 FR2454602 A1 FR 2454602A1
Authority
FR
France
Prior art keywords
deformation
relation
planeity
amplitude
planet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8013051A
Other languages
French (fr)
Other versions
FR2454602B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Publication of FR2454602A1 publication Critical patent/FR2454602A1/en
Application granted granted Critical
Publication of FR2454602B1 publication Critical patent/FR2454602B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

UNE SURFACE SUR LAQUELLE EST DISPOSE UN DESSIN PERIODIQUE REGULIER, SOUVENT UN DESSIN EN RELIEF 12, EST DEFORMEE ET LA DEFORMATION PAR RAPPORT A LA PLANEITE EST DETECTEE PAR ECLAIREMENT DU DESSIN DEFORME AVEC UN FAISCEAU 14 DE LUMIERE COHERENTE SI BIEN QUELA LUMIERE EST REFLECHIE SOUS FORME D'UN FAISCEAU D'ORDRE ZERO ET DE PLUSIEURS FAISCEAUX 16, 18 DE SORTE QU'ILS INTERFERENT D'UNE MANIERE QUI DEPEND DE LA DEFORMATION SUIVANT LA DIRECTION DE L'INTERSECTION DU PLAN DE LA SURFACE AVEC LE PLAN QUI CONTIENT LES DEUX FAISCEAUX QUI INTERFERENT. L'AMPLITUDE ET LE SENS DE LA DEFORMATION PAR RAPPORT A LA PLANEITE DANS UNE OU PLUSIEURS DIRECTIONS ET L'AMPLITUDE ET LE SENS DE LA CONTRAINTE OU DEFORMATION MECANIQUE MAXIMALE PAR RAPPORT AU PLAN DE LA SURFACE PEUVENT ETRE DETERMINES AUTOMATIQUEMENT.A SURFACE ON WHICH IS AVAILABLE A REGULAR PERIODIC DRAWING, OFTEN A DRAWING IN RELIEF 12, IS DEFORMED AND THE DEFORMATION IN RELATION TO THE PLANEITY IS DETECTED BY ILLUMINATION OF THE DEFORMED DRAWING WITH A BEAM 14 OF CONSISTENT LIGHT IF THE LIGHT IS FORCED OF A ZERO-ORDER BEAM AND SEVERAL BEAMS 16, 18 SO THAT THEY INTERFERATE IN A MANNER WHICH DEPENDS ON THE DEFORMATION FOLLOWING THE DIRECTION OF INTERSECTION OF THE SURFACE PLANE WITH THE PLANE CONTAINING THE TWO BEAMS THAT INTERFER. THE AMPLITUDE AND SENSE OF DEFORMATION IN RELATION TO PLANEITY IN ONE OR MORE DIRECTIONS AND THE AMPLITUDE AND SENSE OF MAXIMUM MECHANICAL STRAIN OR DEFORMATION IN RELATION TO THE SURFACE PLANE MAY BE AUTOMATICALLY DETERMINED.

FR8013051A 1977-11-25 1980-06-10 METHOD AND APPARATUS FOR DETECTING THE DEFORMATION OF A SURFACE IN RELATION TO THE PLANET Granted FR2454602A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4917077 1977-11-25

Publications (2)

Publication Number Publication Date
FR2454602A1 true FR2454602A1 (en) 1980-11-14
FR2454602B1 FR2454602B1 (en) 1983-01-28

Family

ID=10451426

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8013051A Granted FR2454602A1 (en) 1977-11-25 1980-06-10 METHOD AND APPARATUS FOR DETECTING THE DEFORMATION OF A SURFACE IN RELATION TO THE PLANET

Country Status (6)

Country Link
EP (1) EP0006945A1 (en)
JP (1) JPS54500096A (en)
CH (1) CH626992A5 (en)
FR (1) FR2454602A1 (en)
GB (1) GB2008791B (en)
WO (1) WO1979000320A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504256A1 (en) * 1981-04-16 1982-10-22 Euromask METHOD AND DEVICE FOR OPTICAL MEASUREMENT OF DISPLACEMENT AND APPLICATION TO WAFER PHOTOREPETORS

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (en) * 1980-09-22 1982-04-16 Philips Nv INTERFEROMETER.
US4474466A (en) * 1981-03-11 1984-10-02 National Research Development Corporation Measurement of deformation
GB2242518B (en) * 1990-03-12 1994-03-30 Univ Southampton Strain gauge
NL1011035C2 (en) * 1999-01-15 2000-07-18 Kema Nv Method and device for measuring in-plane displacements.
CN103278268A (en) * 2013-05-31 2013-09-04 哈尔滨工业大学 Stress testing device and stress concentration testing method based on speckle interference principle
US9459093B2 (en) * 2014-02-20 2016-10-04 Kabushiki Kaisha Toshiba Deflection measuring device and deflection measuring method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2127483A1 (en) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Procedure for the interferential measurement of lengths, angles, differences in gait or speeds

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504256A1 (en) * 1981-04-16 1982-10-22 Euromask METHOD AND DEVICE FOR OPTICAL MEASUREMENT OF DISPLACEMENT AND APPLICATION TO WAFER PHOTOREPETORS
EP0065429A1 (en) * 1981-04-16 1982-11-24 Euromask Method and apparatus for the optical measurement of displacement, and its application to step and repeat photoreproduction

Also Published As

Publication number Publication date
JPS54500096A (en) 1979-12-20
FR2454602B1 (en) 1983-01-28
GB2008791A (en) 1979-06-06
EP0006945A1 (en) 1980-01-23
CH626992A5 (en) 1981-12-15
WO1979000320A1 (en) 1979-06-14
GB2008791B (en) 1982-04-28

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Legal Events

Date Code Title Description
ST Notification of lapse