FR2453392A1 - Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point - Google Patents

Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point

Info

Publication number
FR2453392A1
FR2453392A1 FR7908373A FR7908373A FR2453392A1 FR 2453392 A1 FR2453392 A1 FR 2453392A1 FR 7908373 A FR7908373 A FR 7908373A FR 7908373 A FR7908373 A FR 7908373A FR 2453392 A1 FR2453392 A1 FR 2453392A1
Authority
FR
France
Prior art keywords
point
semiconductor
image
optical surface
measuring technique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7908373A
Other languages
French (fr)
Other versions
FR2453392B1 (en
Inventor
Gerald Roullet
Alain Bodere
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7908373A priority Critical patent/FR2453392A1/en
Publication of FR2453392A1 publication Critical patent/FR2453392A1/en
Application granted granted Critical
Publication of FR2453392B1 publication Critical patent/FR2453392B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The surface (E) to be studied is situated at right angles to the optical axis of an objective lens (1). A point light source (S0) situated on the axis forms an illuminated area which is a function of the distance (h) between a reference plane passing through a point (S1) and the surface (E). The surface is at least partially reflecting and returns through the objective a fraction of the radiation forming an image (S3) of the point (S2) on the test surface. The distance between the source and final image (S0-S3) is a function of the magnification of the objective (1) and the thickness (h) of the relief of the surface, measured relative to the reference plane (SO-S3=2RG squared).
FR7908373A 1979-04-03 1979-04-03 Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point Granted FR2453392A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7908373A FR2453392A1 (en) 1979-04-03 1979-04-03 Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7908373A FR2453392A1 (en) 1979-04-03 1979-04-03 Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point

Publications (2)

Publication Number Publication Date
FR2453392A1 true FR2453392A1 (en) 1980-10-31
FR2453392B1 FR2453392B1 (en) 1981-11-20

Family

ID=9223893

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7908373A Granted FR2453392A1 (en) 1979-04-03 1979-04-03 Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point

Country Status (1)

Country Link
FR (1) FR2453392A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798469A (en) * 1985-10-02 1989-01-17 Burke Victor B Noncontact gage system utilizing reflected light
EP0342864A2 (en) * 1988-05-20 1989-11-23 Fujitsu Limited Wiring pattern detection method and apparatus
CN116952148B (en) * 2023-09-18 2023-12-01 无锡华天燃气轮机有限公司 Surface adhesion layer thickness measuring method and sample block

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2048750A5 (en) * 1969-05-23 1971-03-19 Morvue Inc
US4023033A (en) * 1974-01-15 1977-05-10 Thomson-Brandt Optical focussing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2048750A5 (en) * 1969-05-23 1971-03-19 Morvue Inc
US3671726A (en) * 1969-05-23 1972-06-20 Morvue Inc Electro-optical apparatus for precise on-line measurement of the thickness of moving strip material
US3671726B1 (en) * 1969-05-23 1984-02-21
US4023033A (en) * 1974-01-15 1977-05-10 Thomson-Brandt Optical focussing device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798469A (en) * 1985-10-02 1989-01-17 Burke Victor B Noncontact gage system utilizing reflected light
EP0342864A2 (en) * 1988-05-20 1989-11-23 Fujitsu Limited Wiring pattern detection method and apparatus
EP0342864A3 (en) * 1988-05-20 1989-12-27 Fujitsu Limited Wiring pattern detection method and apparatus
US5011960A (en) * 1988-05-20 1991-04-30 Fujitsu Limited Wiring pattern detection method and apparatus
CN116952148B (en) * 2023-09-18 2023-12-01 无锡华天燃气轮机有限公司 Surface adhesion layer thickness measuring method and sample block

Also Published As

Publication number Publication date
FR2453392B1 (en) 1981-11-20

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Legal Events

Date Code Title Description
ST Notification of lapse