FR2421957A1 - DEVICE FOR THE APPLICATION USING IONS-PLASMA OF COATINGS ON ARTICLES - Google Patents

DEVICE FOR THE APPLICATION USING IONS-PLASMA OF COATINGS ON ARTICLES

Info

Publication number
FR2421957A1
FR2421957A1 FR7800955A FR7800955A FR2421957A1 FR 2421957 A1 FR2421957 A1 FR 2421957A1 FR 7800955 A FR7800955 A FR 7800955A FR 7800955 A FR7800955 A FR 7800955A FR 2421957 A1 FR2421957 A1 FR 2421957A1
Authority
FR
France
Prior art keywords
slit
shaped opening
cathode
discharge chamber
incandescent cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7800955A
Other languages
French (fr)
Other versions
FR2421957B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOVALSKY GEORGY
Original Assignee
KOVALSKY GEORGY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CH9478A priority Critical patent/CH633729A5/en
Application filed by KOVALSKY GEORGY filed Critical KOVALSKY GEORGY
Priority to FR7800955A priority patent/FR2421957A1/en
Publication of FR2421957A1 publication Critical patent/FR2421957A1/en
Application granted granted Critical
Publication of FR2421957B1 publication Critical patent/FR2421957B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

The device can be used for applying thin layers of metals, semiconductors and dielectrics to the surface of various products. The device contains a vacuum chamber (1) in which a discharge chamber (5) having at least one slit-shaped opening (6) in one of its walls is arranged. The plasma flow is generated by an electrical field between an anode (15) and an incandescent cathode (9) which are accommodated in the discharge chamber (5) in such a way that the incandescent cathode (9) is positioned opposite the slit-shaped opening (6) of the discharge chamber (5). The magnet system (21) generates a magnetic field which is directed across the incandescent cathode (9) and the slit-shaped opening (6) perpendicular to the electrical field between the anode (15) and the incandescent cathode (9). A target (19) and a holder (20) for the products to be coated are arranged at different sides of the plasma flow which emerges from the slit-shaped opening (6). In a device of this type the discharge zone is spatially separated from the sputtering zone. This extends the service life of the cathode.
FR7800955A 1978-01-04 1978-01-13 DEVICE FOR THE APPLICATION USING IONS-PLASMA OF COATINGS ON ARTICLES Granted FR2421957A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CH9478A CH633729A5 (en) 1978-01-04 1978-01-04 Device for coating products
FR7800955A FR2421957A1 (en) 1978-01-04 1978-01-13 DEVICE FOR THE APPLICATION USING IONS-PLASMA OF COATINGS ON ARTICLES

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH9478A CH633729A5 (en) 1978-01-04 1978-01-04 Device for coating products
FR7800955A FR2421957A1 (en) 1978-01-04 1978-01-13 DEVICE FOR THE APPLICATION USING IONS-PLASMA OF COATINGS ON ARTICLES

Publications (2)

Publication Number Publication Date
FR2421957A1 true FR2421957A1 (en) 1979-11-02
FR2421957B1 FR2421957B1 (en) 1980-10-10

Family

ID=25683497

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7800955A Granted FR2421957A1 (en) 1978-01-04 1978-01-13 DEVICE FOR THE APPLICATION USING IONS-PLASMA OF COATINGS ON ARTICLES

Country Status (2)

Country Link
CH (1) CH633729A5 (en)
FR (1) FR2421957A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3615361A1 (en) * 1986-05-06 1987-11-12 Santos Pereira Ribeiro Car Dos DEVICE FOR THE SURFACE TREATMENT OF WORKPIECES

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1561068A (en) * 1965-09-22 1969-03-28
DE1515316A1 (en) * 1964-03-21 1969-08-14 Telefunken Patent Process carried out in a vacuum space to produce a pattern on an insulating support
US3583899A (en) * 1968-12-18 1971-06-08 Norton Co Sputtering apparatus
FR2198000A1 (en) * 1972-08-31 1974-03-29 Cit Alcatel
FR2221536A1 (en) * 1972-08-31 1974-10-11 Cit Alcatel Vacuum depositing thin layers - using appts. which improves homogeneity of deposited layers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1515316A1 (en) * 1964-03-21 1969-08-14 Telefunken Patent Process carried out in a vacuum space to produce a pattern on an insulating support
FR1561068A (en) * 1965-09-22 1969-03-28
US3583899A (en) * 1968-12-18 1971-06-08 Norton Co Sputtering apparatus
FR2198000A1 (en) * 1972-08-31 1974-03-29 Cit Alcatel
FR2221536A1 (en) * 1972-08-31 1974-10-11 Cit Alcatel Vacuum depositing thin layers - using appts. which improves homogeneity of deposited layers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3615361A1 (en) * 1986-05-06 1987-11-12 Santos Pereira Ribeiro Car Dos DEVICE FOR THE SURFACE TREATMENT OF WORKPIECES
US4769101A (en) * 1986-05-06 1988-09-06 Dos Santos Pereiro Ribeiro C A Apparatus for surface-treating workpieces

Also Published As

Publication number Publication date
FR2421957B1 (en) 1980-10-10
CH633729A5 (en) 1982-12-31

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Legal Events

Date Code Title Description
ST Notification of lapse