FR2394071A1 - Dispositif de mesure de la reflexion d'une surface plane reflechissante - Google Patents

Dispositif de mesure de la reflexion d'une surface plane reflechissante

Info

Publication number
FR2394071A1
FR2394071A1 FR787816725A FR7816725A FR2394071A1 FR 2394071 A1 FR2394071 A1 FR 2394071A1 FR 787816725 A FR787816725 A FR 787816725A FR 7816725 A FR7816725 A FR 7816725A FR 2394071 A1 FR2394071 A1 FR 2394071A1
Authority
FR
France
Prior art keywords
measuring
reflection
radiation
reflecting surface
flat reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR787816725A
Other languages
English (en)
French (fr)
Inventor
Marcel A Lardon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2394071A1 publication Critical patent/FR2394071A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR787816725A 1977-06-06 1978-06-05 Dispositif de mesure de la reflexion d'une surface plane reflechissante Withdrawn FR2394071A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH693377A CH615757A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-06-06 1977-06-06

Publications (1)

Publication Number Publication Date
FR2394071A1 true FR2394071A1 (fr) 1979-01-05

Family

ID=4317321

Family Applications (1)

Application Number Title Priority Date Filing Date
FR787816725A Withdrawn FR2394071A1 (fr) 1977-06-06 1978-06-05 Dispositif de mesure de la reflexion d'une surface plane reflechissante

Country Status (5)

Country Link
US (1) US4201479A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH615757A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2823912A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2394071A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL7707660A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3305284A1 (de) * 1983-02-16 1984-08-23 Siemens AG, 1000 Berlin und 8000 München Beruehrungslose glanzmessung von oberflaechen und beschichtungen
GB8415128D0 (en) * 1984-06-14 1984-07-18 Chaimowicz J C A Optical displacement sensors
DE3604624A1 (de) * 1986-02-14 1987-08-20 Leybold Heraeus Gmbh & Co Kg Testglaswechsler zur optischen messung von schichteigenschaften in vakuumbeschichtungsanlagen
US5699164A (en) * 1996-04-04 1997-12-16 The Boc Group, Inc. Telecentric reflection head for optical monitor
EP1060368A1 (en) * 1998-02-12 2000-12-20 Hamilton Thorne Research Colorimeter and assay device
US6342707B1 (en) 2000-06-20 2002-01-29 Katsina Optics, Inc. Laser scatterometer with adjustable beam block

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229564A (en) * 1961-05-12 1966-01-18 Bausch & Lomb Reflectometer
DE1548263C3 (de) * 1966-11-10 1975-05-22 Ernst Leitz Gmbh, 6330 Wetzlar Verfahren zur Bestimmung der Größe geometrischer Veränderungen oder Abweichungen einer reflektierenden Oberfläche von einer Solloberfläche mittels optischer Mittel
DE1959612A1 (de) * 1969-11-27 1971-06-03 Eppendorf Geraetebau Netheler Vorrichtung zur fotometrischen Messung

Also Published As

Publication number Publication date
DE2823912A1 (de) 1979-01-18
CH615757A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-02-15
US4201479A (en) 1980-05-06
NL7707660A (nl) 1978-12-08

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Legal Events

Date Code Title Description
ST Notification of lapse