FR2389922A1 - - Google Patents

Info

Publication number
FR2389922A1
FR2389922A1 FR7713344A FR7713344A FR2389922A1 FR 2389922 A1 FR2389922 A1 FR 2389922A1 FR 7713344 A FR7713344 A FR 7713344A FR 7713344 A FR7713344 A FR 7713344A FR 2389922 A1 FR2389922 A1 FR 2389922A1
Authority
FR
France
Prior art keywords
sensitive
electronic
irradiation
make
masking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7713344A
Other languages
English (en)
Other versions
FR2389922B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7713344A priority Critical patent/FR2389922B1/fr
Priority to US05/901,617 priority patent/US4195108A/en
Priority to JP5326978A priority patent/JPS53137671A/ja
Priority to GB17336/78A priority patent/GB1595886A/en
Priority to DE19782819482 priority patent/DE2819482A1/de
Publication of FR2389922A1 publication Critical patent/FR2389922A1/fr
Priority to FR7927216A priority patent/FR2468932A2/fr
Application granted granted Critical
Publication of FR2389922B1 publication Critical patent/FR2389922B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/38—Treatment before imagewise removal, e.g. prebaking
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Graft Or Block Polymers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Electron Beam Exposure (AREA)

Abstract

L'invention a pour but, soit de rendre plus sensibles certaines résines de masquage électronique, soit de rendre utilisables industriellement des polymères insuffisamment sensibles aux électrons. Le procédé comporte une irradiation électronique à faible dose, suffisante toutefois pour créer des radicaux libres, puis une diffusion d'un monomère approprié copolymérisant par greffage sur les chaînes du polymère initial ouvertes par l'irradiation. La solubilité du copolymère pour certains solvants est sélective, ce qui permet le développement du masque. Application au masquage électronique, notamment à celui comportant un balayage par un pinceau électronique très fin commandé par un calculateur.
FR7713344A 1977-05-03 1977-05-03 Expired FR2389922B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7713344A FR2389922B1 (fr) 1977-05-03 1977-05-03
US05/901,617 US4195108A (en) 1977-05-03 1978-05-01 Electrolithographic process which makes it possible to improve the sensitivity of masking resins, and a mask obtained by this kind of process
JP5326978A JPS53137671A (en) 1977-05-03 1978-05-02 Electron beam lithographic method capable of improving sensitivity of masking resin and mask obtained thereby
GB17336/78A GB1595886A (en) 1977-05-03 1978-05-02 Electrolithographic process which makes it possible to improve the sensitivity of masking resins and a mask obtained by this kind of process
DE19782819482 DE2819482A1 (de) 1977-05-03 1978-05-03 Elektrolithographisches verfahren
FR7927216A FR2468932A2 (fr) 1977-05-03 1979-11-05 Procede d'electrolithographie permettant d'ameliorer la sensibilite des resines de masquage et masque obtenu par un tel procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7713344A FR2389922B1 (fr) 1977-05-03 1977-05-03

Publications (2)

Publication Number Publication Date
FR2389922A1 true FR2389922A1 (fr) 1978-12-01
FR2389922B1 FR2389922B1 (fr) 1981-08-28

Family

ID=9190252

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7713344A Expired FR2389922B1 (fr) 1977-05-03 1977-05-03

Country Status (5)

Country Link
US (1) US4195108A (fr)
JP (1) JPS53137671A (fr)
DE (1) DE2819482A1 (fr)
FR (1) FR2389922B1 (fr)
GB (1) GB1595886A (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0017032A2 (fr) * 1979-03-12 1980-10-15 Western Electric Company, Incorporated Procédé de fabrication d'un dispositif à l'état solide par décapage différentiel par plasma des couches résistantes
EP0081334A2 (fr) * 1981-12-03 1983-06-15 Xerox Corporation Modification sélective en masse des propriétés de structures polymères
EP0192078A2 (fr) * 1985-02-19 1986-08-27 International Business Machines Corporation Procédé pour la fabrication d'images négatives en relief
EP0295457A2 (fr) * 1987-05-29 1988-12-21 Hitachi, Ltd. Méthode de formation d'un relief utilisant une copolymérisation greffée
US5719009A (en) * 1992-08-07 1998-02-17 E. I. Du Pont De Nemours And Company Laser ablatable photosensitive elements utilized to make flexographic printing plates
US6558876B1 (en) 1995-05-01 2003-05-06 E. I. Du Pont De Nemours And Company Process for making a flexographic printing plate
US6605410B2 (en) 1993-06-25 2003-08-12 Polyfibron Technologies, Inc. Laser imaged printing plates

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3377597D1 (en) * 1982-04-12 1988-09-08 Nippon Telegraph & Telephone Method for forming micropattern
US5215867A (en) * 1983-09-16 1993-06-01 At&T Bell Laboratories Method with gas functionalized plasma developed layer
US4596761A (en) * 1983-11-02 1986-06-24 Hughes Aircraft Company Graft polymerized SiO2 lithographic masks
JPS61114243A (ja) * 1984-11-09 1986-05-31 Fuji Photo Film Co Ltd 超微細パタ−ンの形成方法
US4612270A (en) * 1985-03-14 1986-09-16 Rca Corporation Two-layer negative resist
JP2641452B2 (ja) * 1987-07-27 1997-08-13 株式会社日立製作所 パターン形成方法
JPH01123232A (ja) * 1987-11-09 1989-05-16 Mitsubishi Electric Corp パターン形成方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE549387A (fr) * 1955-07-08
BE561742A (fr) * 1956-10-18
US3088791A (en) * 1959-02-06 1963-05-07 Du Pont Graft polymerization of a vinyl monomer to a polymeric substrate by low temperature irradiation
US4041192A (en) * 1975-04-15 1977-08-09 Veb Textilkombinat Method of enhancing high polymers, particularly textiles

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0017032A2 (fr) * 1979-03-12 1980-10-15 Western Electric Company, Incorporated Procédé de fabrication d'un dispositif à l'état solide par décapage différentiel par plasma des couches résistantes
EP0017032B1 (fr) * 1979-03-12 1984-02-15 Western Electric Company, Incorporated Procédé de fabrication d'un dispositif à l'état solide par décapage différentiel par plasma des couches résistantes
EP0081334A2 (fr) * 1981-12-03 1983-06-15 Xerox Corporation Modification sélective en masse des propriétés de structures polymères
EP0081334A3 (en) * 1981-12-03 1983-07-20 Xerox Corporation Selectively altering the bulk properties of polymer structures
EP0192078A2 (fr) * 1985-02-19 1986-08-27 International Business Machines Corporation Procédé pour la fabrication d'images négatives en relief
EP0192078A3 (en) * 1985-02-19 1988-07-13 International Business Machines Corporation Process for preparing negative relief images
EP0295457A2 (fr) * 1987-05-29 1988-12-21 Hitachi, Ltd. Méthode de formation d'un relief utilisant une copolymérisation greffée
EP0295457A3 (fr) * 1987-05-29 1990-06-13 Hitachi, Ltd. Méthode de formation d'un relief utilisant une copolymérisation greffée
US5719009A (en) * 1992-08-07 1998-02-17 E. I. Du Pont De Nemours And Company Laser ablatable photosensitive elements utilized to make flexographic printing plates
US6605410B2 (en) 1993-06-25 2003-08-12 Polyfibron Technologies, Inc. Laser imaged printing plates
US6558876B1 (en) 1995-05-01 2003-05-06 E. I. Du Pont De Nemours And Company Process for making a flexographic printing plate
US6929898B2 (en) 1995-05-01 2005-08-16 E. I. Du Pont De Nemours And Company Flexographic element having an infrared ablatable layer

Also Published As

Publication number Publication date
US4195108A (en) 1980-03-25
GB1595886A (en) 1981-08-19
JPS53137671A (en) 1978-12-01
DE2819482A1 (de) 1978-11-09
FR2389922B1 (fr) 1981-08-28

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Legal Events

Date Code Title Description
ST Notification of lapse