FR2374738A1 - Procede et appareil pour controler la dose d'ions implantes dans une cible en comptant les rayons x emis - Google Patents

Procede et appareil pour controler la dose d'ions implantes dans une cible en comptant les rayons x emis

Info

Publication number
FR2374738A1
FR2374738A1 FR7733129A FR7733129A FR2374738A1 FR 2374738 A1 FR2374738 A1 FR 2374738A1 FR 7733129 A FR7733129 A FR 7733129A FR 7733129 A FR7733129 A FR 7733129A FR 2374738 A1 FR2374738 A1 FR 2374738A1
Authority
FR
France
Prior art keywords
target
dose
rays emitted
counting
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7733129A
Other languages
English (en)
French (fr)
Other versions
FR2374738B1 (enExample
Inventor
James A Cairns
Allen Lurio
James F Ziegler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2374738A1 publication Critical patent/FR2374738A1/fr
Application granted granted Critical
Publication of FR2374738B1 publication Critical patent/FR2374738B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2444—Electron Multiplier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
FR7733129A 1976-12-20 1977-10-27 Procede et appareil pour controler la dose d'ions implantes dans une cible en comptant les rayons x emis Granted FR2374738A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/752,779 US4110625A (en) 1976-12-20 1976-12-20 Method and apparatus for monitoring the dose of ion implanted into a target by counting emitted X-rays

Publications (2)

Publication Number Publication Date
FR2374738A1 true FR2374738A1 (fr) 1978-07-13
FR2374738B1 FR2374738B1 (enExample) 1980-12-19

Family

ID=25027807

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7733129A Granted FR2374738A1 (fr) 1976-12-20 1977-10-27 Procede et appareil pour controler la dose d'ions implantes dans une cible en comptant les rayons x emis

Country Status (5)

Country Link
US (1) US4110625A (enExample)
JP (1) JPS5376759A (enExample)
DE (1) DE2749593A1 (enExample)
FR (1) FR2374738A1 (enExample)
GB (1) GB1544008A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0136610A3 (de) * 1983-09-30 1986-08-13 Siemens Aktiengesellschaft Probenhalterung für Sekundärionen-Massenspektrometrie und andere empfindliche Teilchenstrahl-Analysenmethoden und Verfahren zu ihrem Betrieb

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4367411A (en) * 1979-06-04 1983-01-04 Varian Associates, Inc. Unitary electromagnet for double deflection scanning of charged particle beam
US4575922A (en) * 1984-11-05 1986-03-18 Burroughs Corporation Method of fabricating integrated circuits incorporating steps to detect presence of gettering sites
US4812663A (en) * 1986-07-25 1989-03-14 Eaton Corporation Calorimetric dose monitor for ion implantation equipment
US4849641A (en) * 1987-06-22 1989-07-18 Berkowitz Edward H Real time non-destructive dose monitor
US4929840A (en) * 1989-02-28 1990-05-29 Eaton Corporation Wafer rotation control for an ion implanter
JPH05326437A (ja) * 1992-05-22 1993-12-10 Nec Yamagata Ltd イオン注入装置の注入量カウント方法
JP2748869B2 (ja) * 1994-11-22 1998-05-13 日本電気株式会社 イオン注入装置
JP2000338299A (ja) * 1999-05-28 2000-12-08 Mitsubishi Electric Corp Ｘ線露光装置、ｘ線露光方法、ｘ線マスク、ｘ線ミラー、シンクロトロン放射装置、シンクロトロン放射方法および半導体装置
JP2002093684A (ja) 2000-09-18 2002-03-29 Canon Inc Ｘ線露光装置、ｘ線露光方法、半導体製造装置および微細構造体
CN114496828B (zh) * 2022-01-24 2025-12-09 上海华力集成电路制造有限公司 一种在线辅助监控离子注入的方法
CN115753840B (zh) * 2022-10-20 2025-05-02 中国原子能科学研究院 一种利用特征x射线鉴别重离子种类的实验方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3573454A (en) * 1968-04-22 1971-04-06 Applied Res Lab Method and apparatus for ion bombardment using negative ions
US3563809A (en) * 1968-08-05 1971-02-16 Hughes Aircraft Co Method of making semiconductor devices with ion beams
US3699334A (en) * 1969-06-16 1972-10-17 Kollsman Instr Corp Apparatus using a beam of positive ions for controlled erosion of surfaces
JPS5418082B2 (enExample) * 1971-08-11 1979-07-05

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
NV2107/75 *
NV2318/75 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0136610A3 (de) * 1983-09-30 1986-08-13 Siemens Aktiengesellschaft Probenhalterung für Sekundärionen-Massenspektrometrie und andere empfindliche Teilchenstrahl-Analysenmethoden und Verfahren zu ihrem Betrieb

Also Published As

Publication number Publication date
DE2749593A1 (de) 1978-06-22
US4110625A (en) 1978-08-29
JPS5376759A (en) 1978-07-07
FR2374738B1 (enExample) 1980-12-19
GB1544008A (en) 1979-04-11

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Legal Events

Date Code Title Description
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