FR2374264A1 - Procede perfectionne pour la purification du silane - Google Patents

Procede perfectionne pour la purification du silane

Info

Publication number
FR2374264A1
FR2374264A1 FR7737850A FR7737850A FR2374264A1 FR 2374264 A1 FR2374264 A1 FR 2374264A1 FR 7737850 A FR7737850 A FR 7737850A FR 7737850 A FR7737850 A FR 7737850A FR 2374264 A1 FR2374264 A1 FR 2374264A1
Authority
FR
France
Prior art keywords
silane
degrees
sent
temperature
gaseous state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7737850A
Other languages
English (en)
Other versions
FR2374264B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of FR2374264A1 publication Critical patent/FR2374264A1/fr
Application granted granted Critical
Publication of FR2374264B1 publication Critical patent/FR2374264B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

Procédé perfectionné pour purifier du silane industriel par passage dans une série de zones dans un système fermé On fait passer le silane impur à l'état gazeux dans une zone contenant du charbon adsorbant à une température d'environ - 40 degrés C à - 80 degrés C; on envoie le mélange gazeux dans une zone contenant du silicate de magnésium adsorbant à une température d'environ - 40 à - 80 degrés C; on envoie ensuite le mélange gazeux dans une zone de distillation d'où l'on évacue en tête les impuretés à l'état gazeux et en pied de distillation liquide au moins 95 % en poids du silane contenu dans le produit de départ, qu'on recueille. Le silane purifie conformément à l'invention répond aux exigences de pureté fixées par les industries électroniques pour la préparation du silicium.
FR7737850A 1976-12-16 1977-12-15 Procede perfectionne pour la purification du silane Granted FR2374264A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/751,197 US4099936A (en) 1976-12-16 1976-12-16 Process for the purification of silane

Publications (2)

Publication Number Publication Date
FR2374264A1 true FR2374264A1 (fr) 1978-07-13
FR2374264B1 FR2374264B1 (fr) 1982-01-29

Family

ID=25020919

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7737850A Granted FR2374264A1 (fr) 1976-12-16 1977-12-15 Procede perfectionne pour la purification du silane

Country Status (8)

Country Link
US (1) US4099936A (fr)
JP (1) JPS5376200A (fr)
BE (1) BE861897A (fr)
BR (1) BR7708331A (fr)
CA (1) CA1085587A (fr)
DE (1) DE2755824C3 (fr)
ES (1) ES465108A1 (fr)
FR (1) FR2374264A1 (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653087A (en) * 1980-02-11 1987-03-24 Galich Victor J Stereo interface telephone ring detector
US4532120A (en) * 1983-12-28 1985-07-30 Ethyl Corporation Silane purification process
US4554141A (en) * 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
DE3843313A1 (de) * 1988-12-22 1990-06-28 Wacker Chemitronic Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen
US5290342A (en) * 1990-12-05 1994-03-01 Ethyl Corporation Silane compositions and process
US5211931A (en) * 1992-03-27 1993-05-18 Ethyl Corporation Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve
US5232602A (en) * 1992-07-01 1993-08-03 Hemlock Semiconductor Corporation Phosphorous removal from tetrachlorosilane
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5723644A (en) * 1997-04-28 1998-03-03 Dow Corning Corporation Phosphorous removal from chlorosilane
DE19860146A1 (de) * 1998-12-24 2000-06-29 Bayer Ag Verfahren und Anlage zur Herstellung von Silan
US6444013B1 (en) * 2000-09-19 2002-09-03 The Boc Group, Inc. Purification of methylsilanes
US7018448B2 (en) * 2003-10-28 2006-03-28 Advanced Technology Materials, Inc. Gas cabinet including integrated effluent scrubber
ITRM20040570A1 (it) * 2004-11-19 2005-02-19 Memc Electronic Materials Procedimento e impianto di purificazione di triclorosilano e di tetracloruro di silicio.
US8298490B2 (en) 2009-11-06 2012-10-30 Gtat Corporation Systems and methods of producing trichlorosilane
US8524044B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Systems for recovering silane from heavy-ends separation operations
US8524048B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Processes for recovering silane from heavy-ends separation operations
US8524045B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Systems for purifying silane
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
WO2013101431A1 (fr) 2011-12-30 2013-07-04 Memc Electronic Materials, Inc. Procédés et systèmes pour l'épuration de silane
US10011493B2 (en) * 2012-04-27 2018-07-03 Corner Star Limited Methods for purifying halosilane-containing streams

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2393625A (en) * 1941-09-13 1946-01-29 Floridin Company Product and method of forming a precipitated magnesium silicate adsorbent agent
BE561654A (fr) * 1953-09-25 1900-01-01
US3041141A (en) * 1955-09-06 1962-06-26 Baker Chem Co J T Process of purifying silane
NL241272A (fr) * 1958-07-14
NL243675A (fr) * 1958-09-24
JPS4822918B1 (fr) * 1967-10-31 1973-07-10

Also Published As

Publication number Publication date
US4099936A (en) 1978-07-11
ES465108A1 (es) 1978-10-01
JPS613284B2 (fr) 1986-01-31
BR7708331A (pt) 1978-08-08
FR2374264B1 (fr) 1982-01-29
BE861897A (fr) 1978-06-15
DE2755824B2 (de) 1979-10-18
JPS5376200A (en) 1978-07-06
DE2755824A1 (de) 1978-06-22
CA1085587A (fr) 1980-09-16
DE2755824C3 (de) 1980-07-10

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Legal Events

Date Code Title Description
ST Notification of lapse