FR2374264A1 - Procede perfectionne pour la purification du silane - Google Patents
Procede perfectionne pour la purification du silaneInfo
- Publication number
- FR2374264A1 FR2374264A1 FR7737850A FR7737850A FR2374264A1 FR 2374264 A1 FR2374264 A1 FR 2374264A1 FR 7737850 A FR7737850 A FR 7737850A FR 7737850 A FR7737850 A FR 7737850A FR 2374264 A1 FR2374264 A1 FR 2374264A1
- Authority
- FR
- France
- Prior art keywords
- silane
- degrees
- sent
- temperature
- gaseous state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
Procédé perfectionné pour purifier du silane industriel par passage dans une série de zones dans un système fermé On fait passer le silane impur à l'état gazeux dans une zone contenant du charbon adsorbant à une température d'environ - 40 degrés C à - 80 degrés C; on envoie le mélange gazeux dans une zone contenant du silicate de magnésium adsorbant à une température d'environ - 40 à - 80 degrés C; on envoie ensuite le mélange gazeux dans une zone de distillation d'où l'on évacue en tête les impuretés à l'état gazeux et en pied de distillation liquide au moins 95 % en poids du silane contenu dans le produit de départ, qu'on recueille. Le silane purifie conformément à l'invention répond aux exigences de pureté fixées par les industries électroniques pour la préparation du silicium.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/751,197 US4099936A (en) | 1976-12-16 | 1976-12-16 | Process for the purification of silane |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2374264A1 true FR2374264A1 (fr) | 1978-07-13 |
FR2374264B1 FR2374264B1 (fr) | 1982-01-29 |
Family
ID=25020919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7737850A Granted FR2374264A1 (fr) | 1976-12-16 | 1977-12-15 | Procede perfectionne pour la purification du silane |
Country Status (8)
Country | Link |
---|---|
US (1) | US4099936A (fr) |
JP (1) | JPS5376200A (fr) |
BE (1) | BE861897A (fr) |
BR (1) | BR7708331A (fr) |
CA (1) | CA1085587A (fr) |
DE (1) | DE2755824C3 (fr) |
ES (1) | ES465108A1 (fr) |
FR (1) | FR2374264A1 (fr) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4653087A (en) * | 1980-02-11 | 1987-03-24 | Galich Victor J | Stereo interface telephone ring detector |
US4532120A (en) * | 1983-12-28 | 1985-07-30 | Ethyl Corporation | Silane purification process |
US4554141A (en) * | 1984-05-14 | 1985-11-19 | Ethyl Corporation | Gas stream purification |
DE3843313A1 (de) * | 1988-12-22 | 1990-06-28 | Wacker Chemitronic | Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen |
US5290342A (en) * | 1990-12-05 | 1994-03-01 | Ethyl Corporation | Silane compositions and process |
US5211931A (en) * | 1992-03-27 | 1993-05-18 | Ethyl Corporation | Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve |
US5232602A (en) * | 1992-07-01 | 1993-08-03 | Hemlock Semiconductor Corporation | Phosphorous removal from tetrachlorosilane |
US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
US5723644A (en) * | 1997-04-28 | 1998-03-03 | Dow Corning Corporation | Phosphorous removal from chlorosilane |
DE19860146A1 (de) * | 1998-12-24 | 2000-06-29 | Bayer Ag | Verfahren und Anlage zur Herstellung von Silan |
US6444013B1 (en) * | 2000-09-19 | 2002-09-03 | The Boc Group, Inc. | Purification of methylsilanes |
US7018448B2 (en) * | 2003-10-28 | 2006-03-28 | Advanced Technology Materials, Inc. | Gas cabinet including integrated effluent scrubber |
ITRM20040570A1 (it) * | 2004-11-19 | 2005-02-19 | Memc Electronic Materials | Procedimento e impianto di purificazione di triclorosilano e di tetracloruro di silicio. |
US8298490B2 (en) | 2009-11-06 | 2012-10-30 | Gtat Corporation | Systems and methods of producing trichlorosilane |
US8524044B2 (en) * | 2010-10-05 | 2013-09-03 | Memc Electronic Materials, Inc. | Systems for recovering silane from heavy-ends separation operations |
US8524045B2 (en) * | 2010-10-05 | 2013-09-03 | Memc Electronic Materials, Inc. | Systems for purifying silane |
US8524048B2 (en) * | 2010-10-05 | 2013-09-03 | Memc Electronic Materials, Inc. | Processes for recovering silane from heavy-ends separation operations |
US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
CN104159848B (zh) | 2011-12-30 | 2017-03-15 | Memc电子材料有限公司 | 用于提纯硅烷的方法和系统 |
US10011493B2 (en) | 2012-04-27 | 2018-07-03 | Corner Star Limited | Methods for purifying halosilane-containing streams |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2393625A (en) * | 1941-09-13 | 1946-01-29 | Floridin Company | Product and method of forming a precipitated magnesium silicate adsorbent agent |
BE561654A (fr) * | 1953-09-25 | 1900-01-01 | ||
US3041141A (en) * | 1955-09-06 | 1962-06-26 | Baker Chem Co J T | Process of purifying silane |
NL241272A (fr) * | 1958-07-14 | |||
BE582889A (fr) * | 1958-09-24 | |||
JPS4822918B1 (fr) * | 1967-10-31 | 1973-07-10 |
-
1976
- 1976-12-16 US US05/751,197 patent/US4099936A/en not_active Expired - Lifetime
-
1977
- 1977-11-14 CA CA290,831A patent/CA1085587A/fr not_active Expired
- 1977-12-15 BR BR7708331A patent/BR7708331A/pt unknown
- 1977-12-15 JP JP15000377A patent/JPS5376200A/ja active Granted
- 1977-12-15 FR FR7737850A patent/FR2374264A1/fr active Granted
- 1977-12-15 DE DE2755824A patent/DE2755824C3/de not_active Expired
- 1977-12-15 BE BE183496A patent/BE861897A/fr not_active IP Right Cessation
- 1977-12-15 ES ES465108A patent/ES465108A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
ES465108A1 (es) | 1978-10-01 |
DE2755824C3 (de) | 1980-07-10 |
CA1085587A (fr) | 1980-09-16 |
DE2755824A1 (de) | 1978-06-22 |
US4099936A (en) | 1978-07-11 |
JPS5376200A (en) | 1978-07-06 |
BR7708331A (pt) | 1978-08-08 |
BE861897A (fr) | 1978-06-15 |
FR2374264B1 (fr) | 1982-01-29 |
DE2755824B2 (de) | 1979-10-18 |
JPS613284B2 (fr) | 1986-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |