FR2371772B1 - - Google Patents

Info

Publication number
FR2371772B1
FR2371772B1 FR7733365A FR7733365A FR2371772B1 FR 2371772 B1 FR2371772 B1 FR 2371772B1 FR 7733365 A FR7733365 A FR 7733365A FR 7733365 A FR7733365 A FR 7733365A FR 2371772 B1 FR2371772 B1 FR 2371772B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7733365A
Other versions
FR2371772A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2371772A1 publication Critical patent/FR2371772A1/fr
Application granted granted Critical
Publication of FR2371772B1 publication Critical patent/FR2371772B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Tubes For Measurement (AREA)
FR7733365A 1976-11-19 1977-11-07 Dispositif a faisceau ionique Granted FR2371772A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51138328A JPS5812978B2 (ja) 1976-11-19 1976-11-19 イオン線装置

Publications (2)

Publication Number Publication Date
FR2371772A1 FR2371772A1 (fr) 1978-06-16
FR2371772B1 true FR2371772B1 (fr) 1981-01-30

Family

ID=15219324

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7733365A Granted FR2371772A1 (fr) 1976-11-19 1977-11-07 Dispositif a faisceau ionique

Country Status (3)

Country Link
US (1) US4163153A (fr)
JP (1) JPS5812978B2 (fr)
FR (1) FR2371772A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4251725A (en) * 1979-08-06 1981-02-17 Honeywell Inc. Programmed sample pyrolysis for mass spectrometer
JPS58158837A (ja) * 1982-03-16 1983-09-21 Jeol Ltd イオン源
JPS58158844A (ja) * 1982-03-17 1983-09-21 Jeol Ltd イオン銃
JPS60249318A (ja) * 1984-05-25 1985-12-10 Hitachi Ltd イオンマイクロビ−ム注入法
JPS6197557A (ja) * 1984-10-19 1986-05-16 Kawasaki Steel Corp 二次イオン質量分析装置
JPS617556A (ja) * 1985-05-30 1986-01-14 Hitachi Ltd 二次イオン質量分析計
US4968888A (en) * 1989-07-05 1990-11-06 The United States Of America As Represented By The United States Department Of Energy Pulsed field sample neutralization
JPH03245447A (ja) * 1990-02-23 1991-11-01 Hitachi Ltd セシウム集束イオンビーム形成方法
EP2272547B1 (fr) * 2009-06-23 2017-01-11 Biotronik VI Patent AG Appareil de formation d'images et procédé de commande de sa faible puissance

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3508045A (en) * 1968-07-12 1970-04-21 Applied Res Lab Analysis by bombardment with chemically reactive ions
BE758925A (fr) * 1969-11-14 1971-04-16 Bayer Ag Procede pour l'analyse des surfaces de corps solides par spectrometrie de masse
US3973121A (en) * 1972-12-29 1976-08-03 Fite Wade L Detector for heavy ions following mass analysis

Also Published As

Publication number Publication date
JPS5812978B2 (ja) 1983-03-11
JPS5364089A (en) 1978-06-08
FR2371772A1 (fr) 1978-06-16
US4163153A (en) 1979-07-31

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Legal Events

Date Code Title Description
ST Notification of lapse