FR2363887A1 - Nouveau procede pour l'attaque chimique de copolymeres polyimide-silicone deposes sur un corps semi-conducteur - Google Patents

Nouveau procede pour l'attaque chimique de copolymeres polyimide-silicone deposes sur un corps semi-conducteur

Info

Publication number
FR2363887A1
FR2363887A1 FR7727050A FR7727050A FR2363887A1 FR 2363887 A1 FR2363887 A1 FR 2363887A1 FR 7727050 A FR7727050 A FR 7727050A FR 7727050 A FR7727050 A FR 7727050A FR 2363887 A1 FR2363887 A1 FR 2363887A1
Authority
FR
France
Prior art keywords
layer
polyimide
semiconductor body
chemical attack
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7727050A
Other languages
English (en)
Other versions
FR2363887B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of FR2363887A1 publication Critical patent/FR2363887A1/fr
Application granted granted Critical
Publication of FR2363887B1 publication Critical patent/FR2363887B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/312—Organic layers, e.g. photoresist
    • H01L21/3121—Layers comprising organo-silicon compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32131—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by physical means only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/945—Special, e.g. metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist
    • Y10S438/95—Multilayer mask including nonradiation sensitive layer

Abstract

L'invention concerne un procédé d'attaque chimique sélective de copolymère polyimide-silicone déposé en couche de revêtement sur un corps semi-conducteur. On dépose, sur la couche de copolymère 28, une couche de titane métal 30 puis une couche de matériau photorésistant 32. On applique sur le tout un cache convenable et fixe les parties non cachées de la couche 32 en les exposant aux UV, puis les développe ce qui élimine les zones non fixées de cette couche 32. On attaque les parties ainsi mises à nu de la couche 30 à l'acide fluoroborique, découvrant alors les parties correspondantes de la couche 28, qui sont, à leur tour, attaquées à laide d'une solution à base de phénol.
FR7727050A 1976-09-07 1977-09-07 Nouveau procede pour l'attaque chimique de copolymeres polyimide-silicone deposes sur un corps semi-conducteur Granted FR2363887A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/720,584 US4140572A (en) 1976-09-07 1976-09-07 Process for selective etching of polymeric materials embodying silicones therein

Publications (2)

Publication Number Publication Date
FR2363887A1 true FR2363887A1 (fr) 1978-03-31
FR2363887B1 FR2363887B1 (fr) 1982-05-14

Family

ID=24894544

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7727050A Granted FR2363887A1 (fr) 1976-09-07 1977-09-07 Nouveau procede pour l'attaque chimique de copolymeres polyimide-silicone deposes sur un corps semi-conducteur

Country Status (5)

Country Link
US (1) US4140572A (fr)
JP (1) JPS5937495B2 (fr)
DE (1) DE2739847C2 (fr)
FR (1) FR2363887A1 (fr)
GB (1) GB1534475A (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209356A (en) * 1978-10-18 1980-06-24 General Electric Company Selective etching of polymeric materials embodying silicones via reactor plasmas
US4515887A (en) * 1983-08-29 1985-05-07 General Electric Company Photopatternable dielectric compositions, method for making and use
JP2516897B2 (ja) * 1983-10-21 1996-07-24 信越化学工業株式会社 感光性組成物
US4487652A (en) * 1984-03-30 1984-12-11 Motorola, Inc. Slope etch of polyimide
US4670497A (en) * 1984-10-19 1987-06-02 General Electric Company Soluble silicone-imide copolymers
US4586997A (en) * 1984-10-19 1986-05-06 General Electric Company Soluble silicone-imide copolymers
US4701511A (en) * 1984-10-19 1987-10-20 General Electric Company Method of making diglyme soluble siloxane-imide copolymers
US4968757A (en) * 1984-10-19 1990-11-06 Microsi, Inc. Soluble silicone-imide copolymers
JPH0727217B2 (ja) * 1985-09-30 1995-03-29 松下電子工業株式会社 基板上へのレジストパタ−ン形成方法
US4692205A (en) * 1986-01-31 1987-09-08 International Business Machines Corporation Silicon-containing polyimides as oxygen etch stop and dual dielectric coatings
GB2215087B (en) * 1988-02-03 1992-04-01 Plessey Co Plc A method of processing substrates for mounting optical elements and components
US5094919A (en) * 1988-06-30 1992-03-10 Nippon Steel Chemical Co., Ltd. Polyimide copolymers and process for preparing the same
JPH02117041U (fr) * 1989-03-01 1990-09-19
US5045159A (en) * 1989-07-18 1991-09-03 International Business Machines Corporation Derivatives of compounds containing a carbonyl group conjugated to an aromatic moiety and electrophilic methods of fabrication thereof
CN1061058C (zh) * 1996-01-09 2001-01-24 河北工业大学 耐热光敏聚酰亚胺
CN100375310C (zh) * 1999-12-21 2008-03-12 造型逻辑有限公司 喷墨制作的集成电路
EP1243035B1 (fr) * 1999-12-21 2016-03-02 Flexenable Limited Formation d'interconnexions
GB0130485D0 (en) * 2001-12-21 2002-02-06 Plastic Logic Ltd Self-aligned printing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1580665A (fr) * 1967-09-15 1969-09-05
US3597269A (en) * 1969-09-30 1971-08-03 Westinghouse Electric Corp Surfce stabilization of semiconductor power devices and article
FR2088333A7 (fr) * 1970-05-05 1972-01-07 Licentia Gmbh
US3846166A (en) * 1971-09-25 1974-11-05 Hitachi Ltd Method of producing multilayer wiring structure of integrated circuit

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3024138A (en) * 1959-09-30 1962-03-06 Curtiss Wright Corp Method of cleaning
US3416962A (en) * 1964-08-05 1968-12-17 Sperry Rand Corp Preparing etched substances for vacuum deposition of a metal thereon
US3817844A (en) * 1968-10-04 1974-06-18 Rohr Corp Method of electrolitic descaling activating and brightening and plating titanium and its alloys
US3615913A (en) * 1968-11-08 1971-10-26 Westinghouse Electric Corp Polyimide and polyamide-polyimide as a semiconductor surface passivator and protectant coating
US3657029A (en) * 1968-12-31 1972-04-18 Texas Instruments Inc Platinum thin-film metallization method
US3640778A (en) * 1969-03-27 1972-02-08 United Aircraft Corp Coating of titanium alloys
US3890177A (en) * 1971-08-27 1975-06-17 Bell Telephone Labor Inc Technique for the fabrication of air-isolated crossovers
US3770560A (en) * 1971-10-21 1973-11-06 American Cyanamid Co Composite laminate with a thin, perforated outer layer and cavitated bonded backing member
US3926911A (en) * 1973-06-07 1975-12-16 Ciba Geigy Corp Crosslinked polymers containing siloxane groups
US3871929A (en) * 1974-01-30 1975-03-18 Allied Chem Polymeric etch resist strippers and method of using same
US3978578A (en) * 1974-08-29 1976-09-07 Fairchild Camera And Instrument Corporation Method for packaging semiconductor devices
US3962004A (en) * 1974-11-29 1976-06-08 Rca Corporation Pattern definition in an organic layer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1580665A (fr) * 1967-09-15 1969-09-05
US3597269A (en) * 1969-09-30 1971-08-03 Westinghouse Electric Corp Surfce stabilization of semiconductor power devices and article
FR2088333A7 (fr) * 1970-05-05 1972-01-07 Licentia Gmbh
US3846166A (en) * 1971-09-25 1974-11-05 Hitachi Ltd Method of producing multilayer wiring structure of integrated circuit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/76 *

Also Published As

Publication number Publication date
FR2363887B1 (fr) 1982-05-14
JPS5937495B2 (ja) 1984-09-10
US4140572A (en) 1979-02-20
DE2739847A1 (de) 1978-03-09
JPS5344012A (en) 1978-04-20
GB1534475A (en) 1978-12-06
DE2739847C2 (de) 1985-09-26

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