FR2363183A1 - Dispositif servant a empecher des modifications du rayonnement primaire par des particules indesirables, en particulier dans des appareils a faisceaux d'electrons ou d'ions - Google Patents

Dispositif servant a empecher des modifications du rayonnement primaire par des particules indesirables, en particulier dans des appareils a faisceaux d'electrons ou d'ions

Info

Publication number
FR2363183A1
FR2363183A1 FR7726164A FR7726164A FR2363183A1 FR 2363183 A1 FR2363183 A1 FR 2363183A1 FR 7726164 A FR7726164 A FR 7726164A FR 7726164 A FR7726164 A FR 7726164A FR 2363183 A1 FR2363183 A1 FR 2363183A1
Authority
FR
France
Prior art keywords
primary radiation
electron
ion beam
device serving
unwanted particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7726164A
Other languages
English (en)
Other versions
FR2363183B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KERNENERGIEVERWERT GES fur
Original Assignee
KERNENERGIEVERWERT GES fur
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KERNENERGIEVERWERT GES fur filed Critical KERNENERGIEVERWERT GES fur
Publication of FR2363183A1 publication Critical patent/FR2363183A1/fr
Application granted granted Critical
Publication of FR2363183B1 publication Critical patent/FR2363183B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/40—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

L'invention concerne un perfectionnement aux appareils fonctionnant sous vide et comportant des faisceaux d'électrons ou d'ions, qui libèrent, par désorption et par des effets secondaires, des particules indésirables. L'invention prévoit, pour supprimer cet inconvénient, d'utiliser des métaux à faible taux de désorption, et une modification de la structure superficielle de toutes les surfaces des composants 1, 6, 13 de l'appareil, << vues >> par le rayonnement primaire 8. Cette modification consiste en de nombreux perçages, pratiqués sur la surface des parties 1, 6, 13, << vues >> par le rayonnement primaire 8; elle a pour effet une augmentation de la sensibilité par suppression des particules gênantes et amélioration locale du vide aux endroits déterminants de l'appareil. L'invention est applicable à tous les appareils à faisceau de particules chargées, telles que des électrons et des ions.
FR7726164A 1976-08-30 1977-08-29 Dispositif servant a empecher des modifications du rayonnement primaire par des particules indesirables, en particulier dans des appareils a faisceaux d'electrons ou d'ions Granted FR2363183A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2639033A DE2639033C3 (de) 1976-08-30 1976-08-30 Bauteil in mit Ladungsträgerstrahlen arbeitenden elektrischen Vakuumgeräten und Verfahren zu dessen Herstellung

Publications (2)

Publication Number Publication Date
FR2363183A1 true FR2363183A1 (fr) 1978-03-24
FR2363183B1 FR2363183B1 (fr) 1982-11-05

Family

ID=5986722

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7726164A Granted FR2363183A1 (fr) 1976-08-30 1977-08-29 Dispositif servant a empecher des modifications du rayonnement primaire par des particules indesirables, en particulier dans des appareils a faisceaux d'electrons ou d'ions

Country Status (7)

Country Link
US (1) US4123655A (fr)
JP (1) JPS5329793A (fr)
DE (1) DE2639033C3 (fr)
FR (1) FR2363183A1 (fr)
GB (1) GB1592573A (fr)
NL (1) NL186281C (fr)
SE (1) SE422510B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205232A (en) * 1977-08-24 1980-05-27 Gesellschaft Fur Kernenergieverwertung In Schiffbau Und Schiffahrt Mbh Arrangement for preventing the alteration of the primary beam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes
DE2831791C2 (de) * 1978-07-19 1982-09-09 Gkss - Forschungszentrum Geesthacht Gmbh, 2000 Hamburg Bauteil aus metallischem Werkstoff mit aufladungsgefährdeter Oberfläche und Verwendung hierfür
DE2848538C2 (de) * 1978-11-09 1986-10-09 Leybold-Heraeus GmbH, 5000 Köln Elektronen- oder ionenoptische Einrichtung
US20060196853A1 (en) * 2005-03-04 2006-09-07 The Regents Of The University Of California Micro-joining using electron beams
CN1988052B (zh) * 2006-12-14 2010-05-19 上海交通大学 粒子束流截面直径控制器件及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2617061A (en) * 1950-04-12 1952-11-04 Hartford Nat Bank & Trust Co Ion trap for cathodes
FR1087364A (fr) * 1953-07-24 1955-02-23 Radio Ind Perfectionnements aux tubes à vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7009601A (fr) * 1970-06-30 1972-01-03
FR2162065B1 (fr) * 1971-11-30 1977-08-26 Hitachi Ltd
IT1009545B (it) * 1974-01-07 1976-12-20 Getters Spa Struttura a trappola per intercet tare elettroni e particelle elet tricamente cariche

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2617061A (en) * 1950-04-12 1952-11-04 Hartford Nat Bank & Trust Co Ion trap for cathodes
FR1035278A (fr) * 1950-04-12 1953-08-20 Philips Nv Tube récepteur de télévision
FR1087364A (fr) * 1953-07-24 1955-02-23 Radio Ind Perfectionnements aux tubes à vide

Also Published As

Publication number Publication date
FR2363183B1 (fr) 1982-11-05
NL7708846A (nl) 1978-03-02
JPS5329793A (en) 1978-03-20
DE2639033B2 (de) 1980-10-16
DE2639033A1 (de) 1978-03-02
DE2639033C3 (de) 1981-07-23
JPS6342225B2 (fr) 1988-08-22
US4123655A (en) 1978-10-31
SE7709301L (sv) 1978-03-01
NL186281C (nl) 1990-10-16
GB1592573A (en) 1981-07-08
SE422510B (sv) 1982-03-08
NL186281B (nl) 1990-05-16

Similar Documents

Publication Publication Date Title
Ashcroft et al. Structure of binary liquid mixtures. II. Resistivity of alloys and the ion-ion interaction
FR2445621A1 (fr) Procede de fabrication d&#39;un dispositif par attaque par plasma, avec diminution de l&#39;effet de charge
Heimann et al. Observation of a d-like Surface-State Band on Cu (100) using Resolved Photoemission
AU7034391A (en) Methods and apparatus for dispersing a fluent material utilizing an electron beam
FR2363183A1 (fr) Dispositif servant a empecher des modifications du rayonnement primaire par des particules indesirables, en particulier dans des appareils a faisceaux d&#39;electrons ou d&#39;ions
Shimizu Scanning electron microscopic observation of metal surfaces eroded by Argon ions
JP2014066586A (ja) 分析試料調製方法及びその分析方法
Zafiu et al. Response to “Comment on ‘Measurement of the ion drag force on falling dust particles and its relation to the void formation in complex (dusty) plasmas’”[Phys. Plasmas 10, 4579 (2003)]
KR20160004383A (ko) X-레이 소스 및 이미징 시스템
FR2415365A1 (fr) Dispositif de reduction de la divergence du faisceau utile d&#39;un tube a rayons x, et tube ainsi equipe
Silberman et al. Initial stages of oxide formation on HgCdTe exposed to activated oxygen
JPH10312765A (ja) 荷電粒子線装置及び荷電粒子線を用いた試料の処理方法
US4857730A (en) Apparatus and method for local chemical analyses at the surface of solid materials by spectroscopy of X photoelectrons
GB918297A (en) Improvements in electron microscopes
Colby et al. Quantitative microprobe analysis by means of target current measurements
Thoraeus The amount of off-focus radiation in beams from various types of roentgen tubes
FR2482778A1 (fr) Canon a electrons pour faisceau convergent, et dispositif, tube vidicon notamment, muni d&#39;un tel canon
Bernatskii et al. Dependence of Field Desorption of Caesium From Tungsten on the Surface Concentration of Caesium
JPS59149644A (ja) 表面分析装置
RAYCHENKO et al. Computer calculations of diffusion from a solid inclusion in the surrounding liquid current-carrying metal under electric current action
Packard Grams New Pen & Old Ink: XRF Analysis of a Unique Archive from 1st c. BCE Tebtunis
JPS52142580A (en) Ion microanalyzer
Henke et al. The Secondary Electron Emission Photocathode Characteristics for Time Resolved X-Ray Spectroscopy
Babonneau et al. X ray emission experiments at 1.06 μm and 0.35 μm
JPS53129587A (en) Electron beam exposure unit

Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse