FR2359507A1 - Fabrication de composants semi-conducteurs a grande capacite de blocage - Google Patents
Fabrication de composants semi-conducteurs a grande capacite de blocageInfo
- Publication number
- FR2359507A1 FR2359507A1 FR7721860A FR7721860A FR2359507A1 FR 2359507 A1 FR2359507 A1 FR 2359507A1 FR 7721860 A FR7721860 A FR 7721860A FR 7721860 A FR7721860 A FR 7721860A FR 2359507 A1 FR2359507 A1 FR 2359507A1
- Authority
- FR
- France
- Prior art keywords
- semiconductor components
- manufacturing
- blocking capacity
- large blocking
- notches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000903 blocking effect Effects 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005194 fractionation Methods 0.000 abstract 1
- 239000008188 pellet Substances 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Thyristors (AREA)
- Bipolar Transistors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Fabrication de composants semi-conducteurs à grande capacité de blocage. On pratique des rainures 2 avant préparation des zones en forme de couche. Après une opération de diffusion on pratique des entailles 12 à travers chaque région marginale d'une des jonctions pn. On procède à la passivation de la surface dans les entailles, à la mise en place des contacts et aux vérifications électriques avant séparation des pastilles par fractionnement le long des rainures 2. Application notamment aux thyristors.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2633324A DE2633324C2 (de) | 1976-07-24 | 1976-07-24 | Verfahren zum Herstellen von Halbleiterbauelementen hoher Sperrspannungsbelastbarkeit |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2359507A1 true FR2359507A1 (fr) | 1978-02-17 |
Family
ID=5983823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7721860A Pending FR2359507A1 (fr) | 1976-07-24 | 1977-07-18 | Fabrication de composants semi-conducteurs a grande capacite de blocage |
Country Status (9)
Country | Link |
---|---|
US (1) | US4135291A (fr) |
JP (1) | JPS5315084A (fr) |
BR (1) | BR7704608A (fr) |
CH (1) | CH615046A5 (fr) |
DE (1) | DE2633324C2 (fr) |
FR (1) | FR2359507A1 (fr) |
GB (1) | GB1589733A (fr) |
IT (1) | IT1080969B (fr) |
SE (2) | SE424118B (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2410363A1 (fr) * | 1977-11-28 | 1979-06-22 | Silicium Semiconducteur Ssc | Procede de fabrication de caisson dans un dispositif a semi-conducteurs |
FR2508706A1 (fr) * | 1981-06-29 | 1982-12-31 | Westinghouse Electric Corp | Dispositifs a semi-conducteurs pour fortes puissances, passives avec du verre |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56103447A (en) * | 1980-01-22 | 1981-08-18 | Toshiba Corp | Dicing method of semiconductor wafer |
US4355457A (en) * | 1980-10-29 | 1982-10-26 | Rca Corporation | Method of forming a mesa in a semiconductor device with subsequent separation into individual devices |
FR2542148B1 (fr) * | 1983-03-01 | 1986-12-05 | Telemecanique Electrique | Circuit de commande d'un dispositif a semi-conducteur sensible du type thyristor ou triac, avec impedance d'assistance a l'auto-allumage et son application a la realisation d'un montage commutateur associant un thyristor sensible a un thyristor moins sensible |
US4814296A (en) * | 1987-08-28 | 1989-03-21 | Xerox Corporation | Method of fabricating image sensor dies for use in assembling arrays |
US4904609A (en) * | 1988-05-06 | 1990-02-27 | General Electric Company | Method of making symmetrical blocking high voltage breakdown semiconductor device |
JPH0750700B2 (ja) * | 1989-06-27 | 1995-05-31 | 三菱電機株式会社 | 半導体チップの製造方法 |
US5041896A (en) * | 1989-07-06 | 1991-08-20 | General Electric Company | Symmetrical blocking high voltage semiconductor device and method of fabrication |
KR940016546A (ko) * | 1992-12-23 | 1994-07-23 | 프레데릭 얀 스미트 | 반도체 장치 및 제조방법 |
DE102004063180B4 (de) * | 2004-12-29 | 2020-02-06 | Robert Bosch Gmbh | Verfahren zum Herstellen von Halbleiterchips aus einem Siliziumwafer und damit hergestellte Halbleiterbauelemente |
US8163624B2 (en) * | 2008-07-30 | 2012-04-24 | Bowman Ronald R | Discrete semiconductor device and method of forming sealed trench junction termination |
US20100025809A1 (en) | 2008-07-30 | 2010-02-04 | Trion Technology, Inc. | Integrated Circuit and Method of Forming Sealed Trench Junction Termination |
US8174131B2 (en) * | 2009-05-27 | 2012-05-08 | Globalfoundries Inc. | Semiconductor device having a filled trench structure and methods for fabricating the same |
WO2015019540A1 (fr) * | 2013-08-08 | 2015-02-12 | シャープ株式会社 | Substrat d'élément semi-conducteur et son procédé de production |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2021819A1 (de) * | 1969-05-05 | 1970-11-19 | Gen Electric | Halbleiterbauelement mit Glaspassivierung |
FR2100997A1 (fr) * | 1970-08-04 | 1972-03-31 | Silec Semi Conducteurs | |
DE2306842A1 (de) * | 1973-02-12 | 1974-08-15 | Siemens Ag | Verfahren zum herstellen einer vielzahl von halbleiterelementen aus einer einzigen halbleiterscheibe |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3121279A (en) * | 1957-12-31 | 1964-02-18 | Philips Corp | Method of fastening connecting wires to electrical component parts |
US3414780A (en) * | 1966-01-06 | 1968-12-03 | Int Rectifier Corp | High voltage semiconductor device with electrical gradient-reducing groove |
US3608186A (en) * | 1969-10-30 | 1971-09-28 | Jearld L Hutson | Semiconductor device manufacture with junction passivation |
JPS5137467Y2 (fr) * | 1971-08-07 | 1976-09-14 | ||
JPS5235500B2 (fr) * | 1972-06-29 | 1977-09-09 | ||
US3879839A (en) * | 1973-06-04 | 1975-04-29 | Ibm | Method of manufacturing multi-function LSI wafers |
JPS5631898B2 (fr) * | 1974-01-11 | 1981-07-24 | ||
JPS5719869B2 (fr) * | 1974-09-18 | 1982-04-24 |
-
1976
- 1976-07-24 DE DE2633324A patent/DE2633324C2/de not_active Expired
-
1977
- 1977-06-08 SE SE7706667A patent/SE424118B/xx not_active IP Right Cessation
- 1977-06-08 SE SE7706678A patent/SE7706678L/ unknown
- 1977-06-27 IT IT25090/77A patent/IT1080969B/it active
- 1977-06-30 CH CH805577A patent/CH615046A5/xx not_active IP Right Cessation
- 1977-07-14 BR BR7704608A patent/BR7704608A/pt unknown
- 1977-07-18 FR FR7721860A patent/FR2359507A1/fr active Pending
- 1977-07-23 JP JP8791077A patent/JPS5315084A/ja active Pending
- 1977-07-25 GB GB31097/77A patent/GB1589733A/en not_active Expired
- 1977-07-25 US US05/818,964 patent/US4135291A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2021819A1 (de) * | 1969-05-05 | 1970-11-19 | Gen Electric | Halbleiterbauelement mit Glaspassivierung |
FR2100997A1 (fr) * | 1970-08-04 | 1972-03-31 | Silec Semi Conducteurs | |
DE2306842A1 (de) * | 1973-02-12 | 1974-08-15 | Siemens Ag | Verfahren zum herstellen einer vielzahl von halbleiterelementen aus einer einzigen halbleiterscheibe |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2410363A1 (fr) * | 1977-11-28 | 1979-06-22 | Silicium Semiconducteur Ssc | Procede de fabrication de caisson dans un dispositif a semi-conducteurs |
FR2508706A1 (fr) * | 1981-06-29 | 1982-12-31 | Westinghouse Electric Corp | Dispositifs a semi-conducteurs pour fortes puissances, passives avec du verre |
Also Published As
Publication number | Publication date |
---|---|
DE2633324C2 (de) | 1983-09-15 |
DE2633324A1 (de) | 1978-01-26 |
CH615046A5 (fr) | 1979-12-28 |
US4135291A (en) | 1979-01-23 |
BR7704608A (pt) | 1978-04-04 |
JPS5315084A (en) | 1978-02-10 |
GB1589733A (en) | 1981-05-20 |
SE424118B (sv) | 1982-06-28 |
SE7706678L (sv) | 1978-01-25 |
IT1080969B (it) | 1985-05-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2359507A1 (fr) | Fabrication de composants semi-conducteurs a grande capacite de blocage | |
US4412242A (en) | Planar structure for high voltage semiconductor devices with gaps in glassy layer over high field regions | |
US2748041A (en) | Semiconductor devices and their manufacture | |
US4259682A (en) | Semiconductor device | |
GB1161049A (en) | Field-effect semiconductor devices. | |
US3171068A (en) | Semiconductor diodes | |
GB959667A (en) | Improvements in or relating to methods of manufacturing unitary solid state electronic circuit complexes and to said complexes | |
DE3874184D1 (de) | Solarzelle. | |
IE34446B1 (en) | Processes for forming semiconductor devices and individual semiconductor bodies from a single wafer | |
GB721671A (en) | Signal translating devices utilizing semiconductive bodies and methods of making them | |
US3961354A (en) | Mesa type thyristor and its making method | |
IE34131L (en) | Semiconductor wafers and pellets | |
US3381188A (en) | Planar multi-channel field-effect triode | |
US4063272A (en) | Semiconductor device and method of manufacture thereof | |
GB1337283A (en) | Method of manufacturing a semiconductor device | |
GB1072778A (en) | Semiconductor devices and methods of fabricating them | |
GB1020097A (en) | Semiconductor switching device and method of manufacture | |
US3443175A (en) | Pn-junction semiconductor with polycrystalline layer on one region | |
US3462655A (en) | Semiconductor wafer forming a plurality of rectifiers | |
US3436279A (en) | Process of making a transistor with an inverted structure | |
FR2363889A1 (fr) | Procede de fabrication de regions enterrees conductrices dans des circuits integres et structures resultantes | |
US3274462A (en) | Structural configuration for fieldeffect and junction transistors | |
GB1021147A (en) | Divided base four-layer semiconductor device | |
GB1340350A (en) | Surface controlled avalanche semiconductor device | |
FR2319197A1 (fr) | Circuit integre en logique a injection |