FR2344128A1 - Procede ameliore de fabrication de dispositif semi-conducteur par la fusion de zone par gradient de temperature - Google Patents

Procede ameliore de fabrication de dispositif semi-conducteur par la fusion de zone par gradient de temperature

Info

Publication number
FR2344128A1
FR2344128A1 FR7706710A FR7706710A FR2344128A1 FR 2344128 A1 FR2344128 A1 FR 2344128A1 FR 7706710 A FR7706710 A FR 7706710A FR 7706710 A FR7706710 A FR 7706710A FR 2344128 A1 FR2344128 A1 FR 2344128A1
Authority
FR
France
Prior art keywords
merging
zone
manufacturing
semiconductor device
temperature gradient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7706710A
Other languages
English (en)
Inventor
Mike Fushing Chang
Harvey Ellis Cline
Thomas Richard Anthony
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of FR2344128A1 publication Critical patent/FR2344128A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/06—Single-crystal growth by zone-melting; Refining by zone-melting the molten zone not extending over the whole cross-section
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/02—Zone-melting with a solvent, e.g. travelling solvent process
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
    • C30B13/10—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Element Separation (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Electrodes Of Semiconductors (AREA)
FR7706710A 1976-03-09 1977-03-08 Procede ameliore de fabrication de dispositif semi-conducteur par la fusion de zone par gradient de temperature Withdrawn FR2344128A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/665,276 US4040868A (en) 1976-03-09 1976-03-09 Semiconductor device manufacture

Publications (1)

Publication Number Publication Date
FR2344128A1 true FR2344128A1 (fr) 1977-10-07

Family

ID=24669450

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7706710A Withdrawn FR2344128A1 (fr) 1976-03-09 1977-03-08 Procede ameliore de fabrication de dispositif semi-conducteur par la fusion de zone par gradient de temperature

Country Status (6)

Country Link
US (2) US4040868A (fr)
JP (1) JPS52122469A (fr)
DE (1) DE2709628A1 (fr)
FR (1) FR2344128A1 (fr)
GB (1) GB1572045A (fr)
NL (1) NL7702507A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4040868A (en) * 1976-03-09 1977-08-09 General Electric Company Semiconductor device manufacture
US5316795A (en) * 1990-05-24 1994-05-31 Houston Advanced Research Center Halogen-assisted chemical vapor deposition of diamond
US5071677A (en) * 1990-05-24 1991-12-10 Houston Advanced Research Center Halogen-assisted chemical vapor deposition of diamond
JP3154198B2 (ja) * 1992-08-25 2001-04-09 ソニー株式会社 半導体レーザとその製法
JP2001253792A (ja) * 2000-03-09 2001-09-18 Ngk Insulators Ltd 酸化物単結晶の板状体の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3904442A (en) * 1973-10-30 1975-09-09 Gen Electric Method of making isolation grids in bodies of semiconductor material
US3899362A (en) * 1973-10-30 1975-08-12 Gen Electric Thermomigration of metal-rich liquid wires through semiconductor materials
US3897277A (en) * 1973-10-30 1975-07-29 Gen Electric High aspect ratio P-N junctions by the thermal gradient zone melting technique
DE2450895A1 (de) * 1973-12-14 1975-06-26 Gen Electric Tiefe fingerartige dioden
US3988766A (en) * 1974-04-29 1976-10-26 General Electric Company Multiple P-N junction formation with an alloy droplet
US4040868A (en) * 1976-03-09 1977-08-09 General Electric Company Semiconductor device manufacture

Also Published As

Publication number Publication date
NL7702507A (nl) 1977-09-13
GB1572045A (en) 1980-07-23
US4040868A (en) 1977-08-09
JPS52122469A (en) 1977-10-14
US4108685A (en) 1978-08-22
DE2709628A1 (de) 1977-09-15
JPS5548447B2 (fr) 1980-12-05

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Legal Events

Date Code Title Description
ST Notification of lapse