FR2339167A1 - Procede et dispositif pour tester de petites plaques utilisees comme substrat - Google Patents

Procede et dispositif pour tester de petites plaques utilisees comme substrat

Info

Publication number
FR2339167A1
FR2339167A1 FR7701596A FR7701596A FR2339167A1 FR 2339167 A1 FR2339167 A1 FR 2339167A1 FR 7701596 A FR7701596 A FR 7701596A FR 7701596 A FR7701596 A FR 7701596A FR 2339167 A1 FR2339167 A1 FR 2339167A1
Authority
FR
France
Prior art keywords
signals
substrate
defects
recording unit
plates used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7701596A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rio Tinto Switzerland AG
Original Assignee
Alusuisse Holdings AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alusuisse Holdings AG filed Critical Alusuisse Holdings AG
Publication of FR2339167A1 publication Critical patent/FR2339167A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR7701596A 1976-01-20 1977-01-20 Procede et dispositif pour tester de petites plaques utilisees comme substrat Withdrawn FR2339167A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH62576A CH593478A5 (enExample) 1976-01-20 1976-01-20

Publications (1)

Publication Number Publication Date
FR2339167A1 true FR2339167A1 (fr) 1977-08-19

Family

ID=4191366

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7701596A Withdrawn FR2339167A1 (fr) 1976-01-20 1977-01-20 Procede et dispositif pour tester de petites plaques utilisees comme substrat

Country Status (5)

Country Link
JP (1) JPS5290266A (enExample)
CH (1) CH593478A5 (enExample)
DE (1) DE2606024A1 (enExample)
FR (1) FR2339167A1 (enExample)
NL (1) NL7700025A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2518264A1 (fr) * 1981-12-11 1983-06-17 Johnson & Johnson Procede et appareil pour detecter la presence ou l'absence d'un revetement sur un substrat
EP0168643A3 (en) * 1984-06-14 1987-01-07 Josef Prof. Dr. Bille Device for the inspection of wafers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133019A (en) * 1987-12-03 1992-07-21 Identigrade Systems and methods for illuminating and evaluating surfaces

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1498814A1 (de) * 1963-09-16 1969-04-30 Halbleiterwerk Frankfurt Oder Verfahren zur Bestimmung der Guete der Struktur von Einkristallen durch lichtoptische Registrierung
US3558814A (en) * 1968-03-08 1971-01-26 Zeiss Stiftung Method and apparatus for plotting a specific area of an object under an observation instrument

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1498814A1 (de) * 1963-09-16 1969-04-30 Halbleiterwerk Frankfurt Oder Verfahren zur Bestimmung der Guete der Struktur von Einkristallen durch lichtoptische Registrierung
US3558814A (en) * 1968-03-08 1971-01-26 Zeiss Stiftung Method and apparatus for plotting a specific area of an object under an observation instrument

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EXBK/71 *
EXBK/75 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2518264A1 (fr) * 1981-12-11 1983-06-17 Johnson & Johnson Procede et appareil pour detecter la presence ou l'absence d'un revetement sur un substrat
EP0168643A3 (en) * 1984-06-14 1987-01-07 Josef Prof. Dr. Bille Device for the inspection of wafers

Also Published As

Publication number Publication date
NL7700025A (nl) 1977-07-22
JPS5290266A (en) 1977-07-29
CH593478A5 (enExample) 1977-11-30
DE2606024A1 (de) 1977-07-21

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Legal Events

Date Code Title Description
ST Notification of lapse