JPS5290266A - Method and apparatus for testing substrate wafers - Google Patents
Method and apparatus for testing substrate wafersInfo
- Publication number
- JPS5290266A JPS5290266A JP480577A JP480577A JPS5290266A JP S5290266 A JPS5290266 A JP S5290266A JP 480577 A JP480577 A JP 480577A JP 480577 A JP480577 A JP 480577A JP S5290266 A JPS5290266 A JP S5290266A
- Authority
- JP
- Japan
- Prior art keywords
- substrate wafers
- testing substrate
- testing
- wafers
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Landscapes
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH62576A CH593478A5 (ja) | 1976-01-20 | 1976-01-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5290266A true JPS5290266A (en) | 1977-07-29 |
Family
ID=4191366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP480577A Pending JPS5290266A (en) | 1976-01-20 | 1977-01-19 | Method and apparatus for testing substrate wafers |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5290266A (ja) |
CH (1) | CH593478A5 (ja) |
DE (1) | DE2606024A1 (ja) |
FR (1) | FR2339167A1 (ja) |
NL (1) | NL7700025A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4456374A (en) * | 1981-12-11 | 1984-06-26 | Johnson & Johnson | Detecting the presence or absence of a coating on a substrate |
DE3422143A1 (de) * | 1984-06-14 | 1985-12-19 | Josef Prof. Dr. Bille | Geraet zur wafer-inspektion |
US5133019A (en) * | 1987-12-03 | 1992-07-21 | Identigrade | Systems and methods for illuminating and evaluating surfaces |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1498814A1 (de) * | 1963-09-16 | 1969-04-30 | Halbleiterwerk Frankfurt Oder | Verfahren zur Bestimmung der Guete der Struktur von Einkristallen durch lichtoptische Registrierung |
US3558814A (en) * | 1968-03-08 | 1971-01-26 | Zeiss Stiftung | Method and apparatus for plotting a specific area of an object under an observation instrument |
-
1976
- 1976-01-20 CH CH62576A patent/CH593478A5/xx not_active IP Right Cessation
- 1976-02-14 DE DE19762606024 patent/DE2606024A1/de active Pending
-
1977
- 1977-01-04 NL NL7700025A patent/NL7700025A/xx not_active Application Discontinuation
- 1977-01-19 JP JP480577A patent/JPS5290266A/ja active Pending
- 1977-01-20 FR FR7701596A patent/FR2339167A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
NL7700025A (nl) | 1977-07-22 |
FR2339167A1 (fr) | 1977-08-19 |
DE2606024A1 (de) | 1977-07-21 |
CH593478A5 (ja) | 1977-11-30 |
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