FR2335876B1 - - Google Patents
Info
- Publication number
- FR2335876B1 FR2335876B1 FR7539184A FR7539184A FR2335876B1 FR 2335876 B1 FR2335876 B1 FR 2335876B1 FR 7539184 A FR7539184 A FR 7539184A FR 7539184 A FR7539184 A FR 7539184A FR 2335876 B1 FR2335876 B1 FR 2335876B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Image Input (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7539184A FR2335876A1 (fr) | 1975-12-19 | 1975-12-19 | Traceur de dessins fonctionnant par voie optique |
US05/750,456 US4097142A (en) | 1975-12-19 | 1976-12-14 | Optical pattern tracer |
DE19762656679 DE2656679A1 (de) | 1975-12-19 | 1976-12-15 | Zeichenanordnung |
GB52665/76A GB1543398A (en) | 1975-12-19 | 1976-12-16 | Optical pattern tracer |
JP51153262A JPS5277591A (en) | 1975-12-19 | 1976-12-20 | Pattern tracer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7539184A FR2335876A1 (fr) | 1975-12-19 | 1975-12-19 | Traceur de dessins fonctionnant par voie optique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2335876A1 FR2335876A1 (fr) | 1977-07-15 |
FR2335876B1 true FR2335876B1 (fr) | 1980-03-21 |
Family
ID=9163986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7539184A Granted FR2335876A1 (fr) | 1975-12-19 | 1975-12-19 | Traceur de dessins fonctionnant par voie optique |
Country Status (5)
Country | Link |
---|---|
US (1) | US4097142A (fr) |
JP (1) | JPS5277591A (fr) |
DE (1) | DE2656679A1 (fr) |
FR (1) | FR2335876A1 (fr) |
GB (1) | GB1543398A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3109597C2 (de) * | 1981-03-13 | 1983-10-13 | W.C. Heraeus Gmbh, 6450 Hanau | Vorlagenbeleuchtungseinrichtung |
JPS5990929A (ja) * | 1982-11-17 | 1984-05-25 | Canon Inc | 投影露光装置のピント合わせ方法 |
GB2131964A (en) * | 1982-12-10 | 1984-06-27 | Letraset International Ltd | Exposing through an LCD |
US4606610A (en) * | 1984-05-03 | 1986-08-19 | Energy Conversion Devices, Inc. | Imaging system using tellurium-based energy sensitive sheet and variable image displaying means |
JPS6265057A (ja) * | 1985-09-16 | 1987-03-24 | ゼロツクス コ−ポレ−シヨン | 合成画像形成装置 |
JP2501053B2 (ja) * | 1991-10-04 | 1996-05-29 | 株式会社日立製作所 | 紫外パルスレ―ザによる投影式露光方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH492572A (de) * | 1968-08-19 | 1970-06-30 | Conradi G Ag | Automatische Zeichenmaschine mit einem Schreibkopf zur Lichtstrahlregistrierung |
US3584949A (en) * | 1968-12-04 | 1971-06-15 | Richard G Clow | Optical computing apparatus and method |
US3573849A (en) * | 1969-02-04 | 1971-04-06 | Bell Telephone Labor Inc | Pattern generating apparatus |
US3704946A (en) * | 1969-02-20 | 1972-12-05 | Opt Omechanisms Inc | Microcircuit art generating means |
DE2134144A1 (de) * | 1970-07-09 | 1972-01-20 | Thomson Csf | Opto-elektrisches Schreibsystem zur Herstellung von Mikroschaltungen |
US3764211A (en) * | 1972-08-25 | 1973-10-09 | Eastman Kodak Co | Display system capable of selective annotation |
-
1975
- 1975-12-19 FR FR7539184A patent/FR2335876A1/fr active Granted
-
1976
- 1976-12-14 US US05/750,456 patent/US4097142A/en not_active Expired - Lifetime
- 1976-12-15 DE DE19762656679 patent/DE2656679A1/de not_active Withdrawn
- 1976-12-16 GB GB52665/76A patent/GB1543398A/en not_active Expired
- 1976-12-20 JP JP51153262A patent/JPS5277591A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1543398A (en) | 1979-04-04 |
JPS5277591A (en) | 1977-06-30 |
DE2656679A1 (de) | 1977-06-30 |
FR2335876A1 (fr) | 1977-07-15 |
US4097142A (en) | 1978-06-27 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |