FR2326030B1 - - Google Patents
Info
- Publication number
- FR2326030B1 FR2326030B1 FR7628344A FR7628344A FR2326030B1 FR 2326030 B1 FR2326030 B1 FR 2326030B1 FR 7628344 A FR7628344 A FR 7628344A FR 7628344 A FR7628344 A FR 7628344A FR 2326030 B1 FR2326030 B1 FR 2326030B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18851275A DD124091A1 (ru) | 1975-09-24 | 1975-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2326030A1 FR2326030A1 (fr) | 1977-04-22 |
| FR2326030B1 true FR2326030B1 (ru) | 1982-03-19 |
Family
ID=5501778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7628344A Granted FR2326030A1 (fr) | 1975-09-24 | 1976-09-21 | Microscope electronique a balayage pour le controle de structures d'objets |
Country Status (5)
| Country | Link |
|---|---|
| DD (1) | DD124091A1 (ru) |
| DE (1) | DE2635356C2 (ru) |
| FR (1) | FR2326030A1 (ru) |
| GB (1) | GB1532862A (ru) |
| SU (1) | SU1191980A1 (ru) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
| JPS5795056A (en) * | 1980-12-05 | 1982-06-12 | Hitachi Ltd | Appearance inspecting process |
| JPS59112217A (ja) * | 1982-11-29 | 1984-06-28 | Toshiba Corp | 寸法測定方法 |
| JPS59163506A (ja) * | 1983-03-09 | 1984-09-14 | Hitachi Ltd | 電子ビ−ム測長装置 |
| ATE70914T1 (de) * | 1984-03-20 | 1992-01-15 | Vickers Plc | Verfahren zum praezisionsmessen mittels eines abtastelelektronenmikroskops. |
| US4677296A (en) * | 1984-09-24 | 1987-06-30 | Siemens Aktiengesellschaft | Apparatus and method for measuring lengths in a scanning particle microscope |
| DE3802598C1 (ru) * | 1988-01-29 | 1989-04-13 | Karl Heinz 3057 Neustadt De Stellmann |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3876879A (en) * | 1973-11-09 | 1975-04-08 | Calspan Corp | Method and apparatus for determining surface characteristics incorporating a scanning electron microscope |
-
1975
- 1975-09-24 DD DD18851275A patent/DD124091A1/xx unknown
-
1976
- 1976-08-06 DE DE19762635356 patent/DE2635356C2/de not_active Expired
- 1976-08-25 GB GB3538476A patent/GB1532862A/en not_active Expired
- 1976-09-20 SU SU762399525A patent/SU1191980A1/ru active
- 1976-09-21 FR FR7628344A patent/FR2326030A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| SU1191980A1 (ru) | 1985-11-15 |
| FR2326030A1 (fr) | 1977-04-22 |
| DE2635356C2 (de) | 1984-08-16 |
| DD124091A1 (ru) | 1977-02-02 |
| DE2635356A1 (de) | 1977-04-07 |
| GB1532862A (en) | 1978-11-22 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |