FR2314263A1 - Procede de realisation d'un depot de corps a base de metal ou metalloide - Google Patents

Procede de realisation d'un depot de corps a base de metal ou metalloide

Info

Publication number
FR2314263A1
FR2314263A1 FR7518560A FR7518560A FR2314263A1 FR 2314263 A1 FR2314263 A1 FR 2314263A1 FR 7518560 A FR7518560 A FR 7518560A FR 7518560 A FR7518560 A FR 7518560A FR 2314263 A1 FR2314263 A1 FR 2314263A1
Authority
FR
France
Prior art keywords
dpy
cpds
coordination
cpd
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7518560A
Other languages
English (en)
Other versions
FR2314263B1 (fr
Inventor
Georges Constant
Francis Dabosi
Roland Morancho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7518560A priority Critical patent/FR2314263A1/fr
Publication of FR2314263A1 publication Critical patent/FR2314263A1/fr
Application granted granted Critical
Publication of FR2314263B1 publication Critical patent/FR2314263B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
FR7518560A 1975-06-13 1975-06-13 Procede de realisation d'un depot de corps a base de metal ou metalloide Granted FR2314263A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7518560A FR2314263A1 (fr) 1975-06-13 1975-06-13 Procede de realisation d'un depot de corps a base de metal ou metalloide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7518560A FR2314263A1 (fr) 1975-06-13 1975-06-13 Procede de realisation d'un depot de corps a base de metal ou metalloide

Publications (2)

Publication Number Publication Date
FR2314263A1 true FR2314263A1 (fr) 1977-01-07
FR2314263B1 FR2314263B1 (fr) 1978-02-24

Family

ID=9156498

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7518560A Granted FR2314263A1 (fr) 1975-06-13 1975-06-13 Procede de realisation d'un depot de corps a base de metal ou metalloide

Country Status (1)

Country Link
FR (1) FR2314263A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990008844A1 (fr) * 1989-02-02 1990-08-09 National Research Development Corporation Formation d'un revetement metallique
EP0426218A2 (fr) * 1989-10-11 1991-05-08 Philips Patentverwaltung GmbH Structure multicouche et procédé de déposition chimique réactive en phase gazeuse activée par plasma d'un matériau à plusieurs composants
FR2708290A1 (fr) * 1993-07-27 1995-02-03 Lorraine Laminage Traitement de surface d'une tôle d'acier galvanisée à chaud avant sa mise en peinture.
US8809566B2 (en) 2008-11-11 2014-08-19 Merck Patent Gmbh Materials for organic electroluminescence devices
US11390638B1 (en) 2021-01-12 2022-07-19 Applied Materials, Inc. Molybdenum(VI) precursors for deposition of molybdenum films
US11434254B2 (en) 2021-01-12 2022-09-06 Applied Materials, Inc. Dinuclear molybdenum precursors for deposition of molybdenum-containing films
US11459347B2 (en) 2021-01-12 2022-10-04 Applied Materials, Inc. Molybdenum(IV) and molybdenum(III) precursors for deposition of molybdenum films
US11760768B2 (en) 2021-04-21 2023-09-19 Applied Materials, Inc. Molybdenum(0) precursors for deposition of molybdenum films

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1568666A (fr) * 1967-05-24 1969-05-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1568666A (fr) * 1967-05-24 1969-05-23

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990008844A1 (fr) * 1989-02-02 1990-08-09 National Research Development Corporation Formation d'un revetement metallique
EP0426218A2 (fr) * 1989-10-11 1991-05-08 Philips Patentverwaltung GmbH Structure multicouche et procédé de déposition chimique réactive en phase gazeuse activée par plasma d'un matériau à plusieurs composants
EP0426218A3 (fr) * 1989-10-11 1991-05-22 Philips Patentverwaltung GmbH Structure multicouche et procédé de déposition chimique réactive en phase gazeuse activée par plasma d'un matériau à plusieurs composants
FR2708290A1 (fr) * 1993-07-27 1995-02-03 Lorraine Laminage Traitement de surface d'une tôle d'acier galvanisée à chaud avant sa mise en peinture.
US8809566B2 (en) 2008-11-11 2014-08-19 Merck Patent Gmbh Materials for organic electroluminescence devices
US11390638B1 (en) 2021-01-12 2022-07-19 Applied Materials, Inc. Molybdenum(VI) precursors for deposition of molybdenum films
US11434254B2 (en) 2021-01-12 2022-09-06 Applied Materials, Inc. Dinuclear molybdenum precursors for deposition of molybdenum-containing films
US11459347B2 (en) 2021-01-12 2022-10-04 Applied Materials, Inc. Molybdenum(IV) and molybdenum(III) precursors for deposition of molybdenum films
US11760768B2 (en) 2021-04-21 2023-09-19 Applied Materials, Inc. Molybdenum(0) precursors for deposition of molybdenum films

Also Published As

Publication number Publication date
FR2314263B1 (fr) 1978-02-24

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Legal Events

Date Code Title Description
ST Notification of lapse