FR2312710A1 - Vanne a etancheite poussee, en particulier pour des applications de l'ultra-vide - Google Patents

Vanne a etancheite poussee, en particulier pour des applications de l'ultra-vide

Info

Publication number
FR2312710A1
FR2312710A1 FR7615498A FR7615498A FR2312710A1 FR 2312710 A1 FR2312710 A1 FR 2312710A1 FR 7615498 A FR7615498 A FR 7615498A FR 7615498 A FR7615498 A FR 7615498A FR 2312710 A1 FR2312710 A1 FR 2312710A1
Authority
FR
France
Prior art keywords
shut
ultra
push
valve
valve seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7615498A
Other languages
English (en)
Other versions
FR2312710B3 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2312710A1 publication Critical patent/FR2312710A1/fr
Application granted granted Critical
Publication of FR2312710B3 publication Critical patent/FR2312710B3/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)
FR7615498A 1975-05-24 1976-05-21 Vanne a etancheite poussee, en particulier pour des applications de l'ultra-vide Granted FR2312710A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752523152 DE2523152C3 (de) 1975-05-24 1975-05-24 Hochvakuumventil, insbesondere für Ultrahochvakuumzwecke

Publications (2)

Publication Number Publication Date
FR2312710A1 true FR2312710A1 (fr) 1976-12-24
FR2312710B3 FR2312710B3 (fr) 1979-02-16

Family

ID=5947387

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7615498A Granted FR2312710A1 (fr) 1975-05-24 1976-05-21 Vanne a etancheite poussee, en particulier pour des applications de l'ultra-vide

Country Status (4)

Country Link
CH (1) CH611687A5 (fr)
DE (1) DE2523152C3 (fr)
FR (1) FR2312710A1 (fr)
NL (1) NL7605550A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2316497A1 (fr) * 1975-07-01 1977-01-28 Vat Ag Element metallique pour l'etancheite d'un clapet ou vanne a vide pousse
FR2470315A1 (fr) * 1979-11-26 1981-05-29 Vat Ag Dispositif d'etanchement, constitue de metal, sur un obturateur pour un vide pousse
EP0364407A2 (fr) * 1988-10-13 1990-04-18 Hubert Bösch Dispositif d'étanchéité pour soupapes ou brides, notamment pour système de vide
CN101311585B (zh) * 2007-05-25 2011-01-12 费海鸿 全金属角阀

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3023475C2 (de) * 1980-06-24 1984-08-30 Leybold-Heraeus GmbH, 5000 Köln Metallgedichtetes Ventil
DE3130651C2 (de) * 1981-08-03 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Ausheizbares großes Vakuumventil
DE3717724A1 (de) * 1987-05-26 1988-12-08 Schertler Siegfried Ventilschieber mit einem schiebergehaeuse
DE4023845C1 (en) * 1990-07-27 1992-04-02 Vat Holding Ag, Haag, Ch Shut-off valve for semiconductor producinvacuum equipment - has valve disc pressed against valve seal by actuator and seal between disc and seat
DE102005004987B8 (de) * 2005-02-02 2017-12-14 Vat Holding Ag Vakuumventil
CN110803797B (zh) * 2019-10-23 2021-11-23 江苏医药职业学院 一种环境工程用净化排水设备
CN112268141A (zh) * 2020-10-23 2021-01-26 中国科学院上海高等研究院 用于真空封合之密封碟盘

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2147332A (en) * 1938-02-02 1939-02-14 Wolverine Brass Works Valve structure
US2482696A (en) * 1944-11-29 1949-09-20 Mueller Co Pipe-line stopper
DE832822C (de) * 1949-10-29 1952-02-28 Gustav Friedrich Gerdts Absperrventil mit Spreizverschluss
AT225483B (de) * 1959-08-28 1963-01-25 Dilo Ges Drexler U Co Hartdichtung
US3108780A (en) * 1960-04-18 1963-10-29 Cons Vacuum Corp Valve for ultra-high vacuum apparatus
US3164364A (en) * 1962-10-04 1965-01-05 Diamond Power Speciality Deformable valve head and seat construction
CH512684A (fr) * 1969-08-25 1971-09-15 Suisse De Rech S Horlogeres La Vanne de précision

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2316497A1 (fr) * 1975-07-01 1977-01-28 Vat Ag Element metallique pour l'etancheite d'un clapet ou vanne a vide pousse
FR2470315A1 (fr) * 1979-11-26 1981-05-29 Vat Ag Dispositif d'etanchement, constitue de metal, sur un obturateur pour un vide pousse
EP0364407A2 (fr) * 1988-10-13 1990-04-18 Hubert Bösch Dispositif d'étanchéité pour soupapes ou brides, notamment pour système de vide
EP0364407A3 (fr) * 1988-10-13 1991-03-13 Hubert Bösch Dispositif d'étanchéité pour soupapes ou brides, notamment pour système de vide
CN101311585B (zh) * 2007-05-25 2011-01-12 费海鸿 全金属角阀

Also Published As

Publication number Publication date
NL7605550A (nl) 1976-11-26
CH611687A5 (en) 1979-06-15
FR2312710B3 (fr) 1979-02-16
DE2523152B2 (de) 1981-04-16
DE2523152A1 (de) 1976-11-25
DE2523152C3 (de) 1982-01-07

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