FR2311859A1 - Depot de ruthenium - Google Patents

Depot de ruthenium

Info

Publication number
FR2311859A1
FR2311859A1 FR7614916A FR7614916A FR2311859A1 FR 2311859 A1 FR2311859 A1 FR 2311859A1 FR 7614916 A FR7614916 A FR 7614916A FR 7614916 A FR7614916 A FR 7614916A FR 2311859 A1 FR2311859 A1 FR 2311859A1
Authority
FR
France
Prior art keywords
ruthenium deposit
ruthenium
deposit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7614916A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inco Ltd
Original Assignee
Inco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inco Ltd filed Critical Inco Ltd
Publication of FR2311859A1 publication Critical patent/FR2311859A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Contacts (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
FR7614916A 1975-05-20 1976-05-18 Depot de ruthenium Withdrawn FR2311859A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB21497/75A GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium

Publications (1)

Publication Number Publication Date
FR2311859A1 true FR2311859A1 (fr) 1976-12-17

Family

ID=10163942

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7614916A Withdrawn FR2311859A1 (fr) 1975-05-20 1976-05-18 Depot de ruthenium

Country Status (14)

Country Link
JP (1) JPS51141738A (cs)
AT (1) ATA366276A (cs)
AU (1) AU1369576A (cs)
BE (1) BE842027A (cs)
CA (1) CA1087040A (cs)
CH (1) CH603809A5 (cs)
DE (1) DE2622181A1 (cs)
DK (1) DK220776A (cs)
ES (1) ES448043A1 (cs)
FR (1) FR2311859A1 (cs)
GB (1) GB1499549A (cs)
NL (1) NL7605002A (cs)
SE (1) SE7605668L (cs)
ZA (1) ZA762641B (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301865A (ja) * 1988-05-30 1989-12-06 Nippon Telegr & Teleph Corp <Ntt> 薄膜成長方法および薄膜成長装置
JP2799763B2 (ja) * 1990-07-11 1998-09-21 同和鉱業株式会社 有機金属錯体を用いる薄膜の製造法
JP2802676B2 (ja) * 1990-07-13 1998-09-24 同和鉱業株式会社 １，３―ジケトン系有機金属錯体を用いる薄膜の製造方法
AT410757B (de) * 1993-12-10 2003-07-25 Tyrolia Freizeitgeraete Skibremse
JP5792438B2 (ja) * 2010-08-12 2015-10-14 東京エレクトロン株式会社 成膜装置及び成膜方法
US9725794B2 (en) 2014-12-17 2017-08-08 Kennametal Inc. Cemented carbide articles and applications thereof

Also Published As

Publication number Publication date
DK220776A (da) 1976-11-21
AU1369576A (en) 1977-11-10
NL7605002A (nl) 1976-11-23
ATA366276A (de) 1977-12-15
BE842027A (fr) 1976-11-22
DE2622181A1 (de) 1976-12-09
GB1499549A (en) 1978-02-01
CH603809A5 (cs) 1978-08-31
ZA762641B (en) 1977-04-27
ES448043A1 (es) 1977-07-01
CA1087040A (en) 1980-10-07
JPS51141738A (en) 1976-12-06
SE7605668L (sv) 1976-11-21

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse