JPS51141738A - Method of depositing luthenium - Google Patents
Method of depositing lutheniumInfo
- Publication number
- JPS51141738A JPS51141738A JP51057340A JP5734076A JPS51141738A JP S51141738 A JPS51141738 A JP S51141738A JP 51057340 A JP51057340 A JP 51057340A JP 5734076 A JP5734076 A JP 5734076A JP S51141738 A JPS51141738 A JP S51141738A
- Authority
- JP
- Japan
- Prior art keywords
- luthenium
- depositing
- depositing luthenium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Electrolytic Production Of Metals (AREA)
- Contacts (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB21497/75A GB1499549A (en) | 1975-05-20 | 1975-05-20 | Deposition of ruthenium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51141738A true JPS51141738A (en) | 1976-12-06 |
Family
ID=10163942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51057340A Pending JPS51141738A (en) | 1975-05-20 | 1976-05-20 | Method of depositing luthenium |
Country Status (14)
Country | Link |
---|---|
JP (1) | JPS51141738A (en) |
AT (1) | ATA366276A (en) |
AU (1) | AU1369576A (en) |
BE (1) | BE842027A (en) |
CA (1) | CA1087040A (en) |
CH (1) | CH603809A5 (en) |
DE (1) | DE2622181A1 (en) |
DK (1) | DK220776A (en) |
ES (1) | ES448043A1 (en) |
FR (1) | FR2311859A1 (en) |
GB (1) | GB1499549A (en) |
NL (1) | NL7605002A (en) |
SE (1) | SE7605668L (en) |
ZA (1) | ZA762641B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01301865A (en) * | 1988-05-30 | 1989-12-06 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for growing thin film |
JPH0472066A (en) * | 1990-07-11 | 1992-03-06 | Dowa Mining Co Ltd | Production of thin film using organic metal complex |
JPH0474866A (en) * | 1990-07-13 | 1992-03-10 | Dowa Mining Co Ltd | Production of thin film using 1,3-diketone type organometallic complex |
JP2012041564A (en) * | 2010-08-12 | 2012-03-01 | Tokyo Electron Ltd | Film deposition apparatus and film deposition method |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT410757B (en) * | 1993-12-10 | 2003-07-25 | Tyrolia Freizeitgeraete | ski brake |
US9725794B2 (en) | 2014-12-17 | 2017-08-08 | Kennametal Inc. | Cemented carbide articles and applications thereof |
-
1975
- 1975-05-20 GB GB21497/75A patent/GB1499549A/en not_active Expired
-
1976
- 1976-05-03 ZA ZA762641A patent/ZA762641B/en unknown
- 1976-05-06 AU AU13695/76A patent/AU1369576A/en not_active Expired
- 1976-05-11 NL NL7605002A patent/NL7605002A/en unknown
- 1976-05-11 CA CA252,239A patent/CA1087040A/en not_active Expired
- 1976-05-12 CH CH594476A patent/CH603809A5/xx not_active IP Right Cessation
- 1976-05-18 FR FR7614916A patent/FR2311859A1/en not_active Withdrawn
- 1976-05-18 ES ES448043A patent/ES448043A1/en not_active Expired
- 1976-05-19 AT AT763662A patent/ATA366276A/en not_active IP Right Cessation
- 1976-05-19 DK DK220776A patent/DK220776A/en unknown
- 1976-05-19 SE SE7605668A patent/SE7605668L/en unknown
- 1976-05-19 DE DE19762622181 patent/DE2622181A1/en active Pending
- 1976-05-20 BE BE167182A patent/BE842027A/en unknown
- 1976-05-20 JP JP51057340A patent/JPS51141738A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01301865A (en) * | 1988-05-30 | 1989-12-06 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for growing thin film |
JPH0472066A (en) * | 1990-07-11 | 1992-03-06 | Dowa Mining Co Ltd | Production of thin film using organic metal complex |
JPH0474866A (en) * | 1990-07-13 | 1992-03-10 | Dowa Mining Co Ltd | Production of thin film using 1,3-diketone type organometallic complex |
JP2012041564A (en) * | 2010-08-12 | 2012-03-01 | Tokyo Electron Ltd | Film deposition apparatus and film deposition method |
Also Published As
Publication number | Publication date |
---|---|
NL7605002A (en) | 1976-11-23 |
AU1369576A (en) | 1977-11-10 |
ES448043A1 (en) | 1977-07-01 |
CA1087040A (en) | 1980-10-07 |
BE842027A (en) | 1976-11-22 |
ZA762641B (en) | 1977-04-27 |
DK220776A (en) | 1976-11-21 |
SE7605668L (en) | 1976-11-21 |
DE2622181A1 (en) | 1976-12-09 |
FR2311859A1 (en) | 1976-12-17 |
ATA366276A (en) | 1977-12-15 |
CH603809A5 (en) | 1978-08-31 |
GB1499549A (en) | 1978-02-01 |
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