FR2309648A1 - Procede et dispositif pour l'obtention d'un depot de metal de transition - Google Patents

Procede et dispositif pour l'obtention d'un depot de metal de transition

Info

Publication number
FR2309648A1
FR2309648A1 FR7513615A FR7513615A FR2309648A1 FR 2309648 A1 FR2309648 A1 FR 2309648A1 FR 7513615 A FR7513615 A FR 7513615A FR 7513615 A FR7513615 A FR 7513615A FR 2309648 A1 FR2309648 A1 FR 2309648A1
Authority
FR
France
Prior art keywords
halide
substrate
transition metal
sub
converted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7513615A
Other languages
English (en)
French (fr)
Other versions
FR2309648B1 (enExample
Inventor
Jean-Yves Caradec
Jean-Louis Philippart
Bernard Weber
Andre Pentenero
Albert Cassuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7513615A priority Critical patent/FR2309648A1/fr
Publication of FR2309648A1 publication Critical patent/FR2309648A1/fr
Application granted granted Critical
Publication of FR2309648B1 publication Critical patent/FR2309648B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • C23C16/14—Deposition of only one other metal element

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7513615A 1975-04-30 1975-04-30 Procede et dispositif pour l'obtention d'un depot de metal de transition Granted FR2309648A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7513615A FR2309648A1 (fr) 1975-04-30 1975-04-30 Procede et dispositif pour l'obtention d'un depot de metal de transition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7513615A FR2309648A1 (fr) 1975-04-30 1975-04-30 Procede et dispositif pour l'obtention d'un depot de metal de transition

Publications (2)

Publication Number Publication Date
FR2309648A1 true FR2309648A1 (fr) 1976-11-26
FR2309648B1 FR2309648B1 (enExample) 1978-10-20

Family

ID=9154690

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7513615A Granted FR2309648A1 (fr) 1975-04-30 1975-04-30 Procede et dispositif pour l'obtention d'un depot de metal de transition

Country Status (1)

Country Link
FR (1) FR2309648A1 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616143A1 (fr) * 1987-06-05 1988-12-09 Pauleau Yves Procede de depot de tungstene sur des verres de silice
WO1990011858A1 (en) * 1989-04-04 1990-10-18 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
EP0407312A1 (fr) * 1989-07-05 1991-01-09 Compagnie Européenne du Zirconium CEZUS Dispositif d'obtention de matériaux composés d'un substrat et d'un revêtement de titane purifié de forme plane
US5149514A (en) * 1989-04-04 1992-09-22 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
US5171734A (en) * 1991-04-22 1992-12-15 Sri International Coating a substrate in a fluidized bed maintained at a temperature below the vaporization temperature of the resulting coating composition
US5227195A (en) * 1989-04-04 1993-07-13 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LIVRE "VAPOR DEPOSITION" PAR C.F. POWELL, J.WILLEY ET AL *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616143A1 (fr) * 1987-06-05 1988-12-09 Pauleau Yves Procede de depot de tungstene sur des verres de silice
WO1990011858A1 (en) * 1989-04-04 1990-10-18 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
US5149514A (en) * 1989-04-04 1992-09-22 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
US5227195A (en) * 1989-04-04 1993-07-13 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
EP0407312A1 (fr) * 1989-07-05 1991-01-09 Compagnie Européenne du Zirconium CEZUS Dispositif d'obtention de matériaux composés d'un substrat et d'un revêtement de titane purifié de forme plane
FR2649420A1 (fr) * 1989-07-05 1991-01-11 Cezus Co Europ Zirconium Dispositif d'obtention de materiaux composes d'un substrat et d'un revetement de titane purifie de forme plane
US5171734A (en) * 1991-04-22 1992-12-15 Sri International Coating a substrate in a fluidized bed maintained at a temperature below the vaporization temperature of the resulting coating composition

Also Published As

Publication number Publication date
FR2309648B1 (enExample) 1978-10-20

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Legal Events

Date Code Title Description
ST Notification of lapse